NCM

K L M B A C (inch) Part no.

XL

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)

Possible to transfer a workpiece at low-speed.

Change of double shaft length Change of double shaft length XA38 K 10, 15, 20, 30, 40 MRQ K J XA39 XA40 XA41 XA45 K K K XA46 Y Y Y Y Y 20, 30, 40 Y J K K, T K, T K 10, 15, 20, 30, 40 K K K K, T K Z X X, Z J J J, Z Z J 20, 30, 40 Z J 10, 15, 20, 30, 40 T J Reversed shaft, Change of double shaft length X 20, 30, 40 Reversed shaft, Change of double shaft length Combination

rep-modular-e

(AR20(K)/25(K)/30(K)/40(K)) AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR20(K)/25(K)/30(K)/40(K) Hook spanner Nominal Tightening torque 2.0 0.2 Nm 2.5 0.2 Nm 3.5 0.3 Nm 4.0 0.4 Nm AR20(K) AR25(K) AR30(K) AR40(K) AR20(K) AR25(K) AR30(K) AR40(K) 34/38 40/42 52/55 52/55 Assembly (Bracket assembly) 1) Mount the bracket to the product.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

(AR20(K)/25(K)/30(K)/40(K)) AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR20(K)/25(K)/30(K)/40(K) Hook spanner Nominal Tightening torque 2.0 0.2 Nm 2.5 0.2 Nm 3.5 0.3 Nm 4.0 0.4 Nm AR20(K) AR25(K) AR30(K) AR40(K) AR20(K) AR25(K) AR30(K) AR40(K) 34/38 40/42 52/55 52/55 Assembly (Bracket assembly) 1) Mount the bracket to the product.

High Vacuum Angle Valve, XL Series

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)

Refrigerated Air Dryers Series IDF/IDU

HAA HAW AT IDF IDU C IDFA F IDFB M ID N IDG L P AMG K 4 x 13 AFF AM B C D E F G K L M N P Q Dimensions (mm) A Port size Model IDFA22E IDFA37E AMD R 1 775 600 290 623 134 405 698 93 13 25 85 340 R 11/2 855 680 AMH AME IDFA55E, IDFA75E AMF A R B SF SFD Q E LLB D AD GD G F C M N L P K 4 x 13 R Dimensions (mm) A B C D E F G K L M N P Q Model IDFA55E IDFA75E Port size 800 (868) R 2 470 855 (

AC Servo Motor Driver (Pulse input type/Positioning type ）

VCES 1.0 V ICEO 100 A 1.2 k PP2 (Note) NG Approx. 20 mA Approx. VCES 1.0 V ICEO 100 A 1.2 k NP2 24 V DC 10% 500 mA SD Note. Pulse train input interface is comprised of a photocoupler.

Air Cylinder

Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-A9(V) BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) D-M9A(V) Note 2) BMA3-020S (A set of b, c, d, e) BMA3-025S (A set of b, c, d, e) BMA3-032S (A set of b, c, d, e) BMA3-040S

Table of Contents

Cooling water (l/min) 180C Inlet air temperature Correction factor Air flow (l/min (ANR)) Model 50C 70C 100C 41.5 43 45.5 37 43 49.5 37 43 45.5 37 42 43.5 40 44 46 39.5 43 44.5 41 43 45.5 A B C A B C A B C A B C A B C A B C A B C 35.5 36 36.5 33.5 36 38 33.5 36 36.5 33.5 35 36 34.5 36 37 34.5 35.5 36 34.5 35.5 36 38.5 40 42 36 40 45.5 36 40 42.5 36 40 41 38 40 42.5 38

CATALOG VC10

ALL-STAINLESS CONSTRUCTION SINTERED STAINLESS MUFFLER ELEMENT COMPACT DESIGN LOW PROFILE 1/8 & 1/4 NPT SIZES LOW NOISE LEVEL i.e., Exhaust noise of 3WNC Valve at 100 psi and 200 CPM reduced from 99dBA to 75dBA (measured at 3 feet from Muffler) CAN BE USED AS BREATHER VENT FILTER INLINE F520-A F540-A F560-A F5100-A F620-A F640-A F660-A F6100-A 20 40 60 100 20 40 60 100 BRASS NPT FILTER

TABLE OF CONTENTS

ALL-STAINLESS CONSTRUCTION SINTERED STAINLESS MUFFLER ELEMENT COMPACT DESIGN LOW PROFILE 1/8 & 1/4 NPT SIZES LOW NOISE LEVEL i.e., Exhaust noise of 3WNC Valve at 100 psi and 200 CPM reduced from 99dBA to 75dBA (measured at 3 feet from Muffler) CAN BE USED AS BREATHER VENT FILTER INLINE F520-A F540-A F560-A F5100-A F620-A F640-A F660-A F6100-A 20 40 60 100 20 40 60 100 BRASS NPT FILTER

MXQ

21 9 21 9 A B 10.5 10.5 5.1 5.1 9.5 9.5 24 5H9 depth 5 +0.030 0 1 NN-M6 x 1 thread depth 12 6 B A 5H9 depth 5 +0.030 0 HA GA Section AA Section BB (mm) Model F 38 38 48 58 40 46 44 44 N 4 4 4 4 6 6 8 10 G 18 18 19 19 21 36 17 H 39 39 48 58 52 44 44 NN 2 2 2 2 3 3 4 5 GA 18 18 19 19 48 73 80 105 HA 39 39 48 58 45 52 88 88 I 12 12 12 12 20 15 18 23 J 40 40 50 60 68 105 145 165 K 28 38 48

CQ2

(mm) Without auto switch With auto switch Bore (mm) Stroke range (mm) J K L C D M E I H P M5 X 0.8 A B F 5.5 P Q 11.5 B A F Q 5 10 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 30 40 36.5 46.5 38.5 48.5 23 33 29.5 39.5 30.5 40.5 Rc(PT)1/8 M8 X 1.25 4.5 14 33 40 7.5 7 10.5 13 16 34 45 60 32 7.5 10.5 Rc(PT)1/8 8 11 Rc(PT)1/8 M8 X 1.25 5 14 39.5 46.5 8 7 11 13 16 40 52 69 Rc(PT)1/8 40 10.5

CV/MVGQ

AL A H F N S + Stroke ZZ + Stroke M 73.6 l C B K CY h + l ZZ + l + Stroke MQQ M Stroke range Bore size (mm) S A AL B B1 C D E F H1 MM K KA M N HX J (mm) 40 50 63 80 100 RHC 30 35 35 40 40 130.6 133.6 140.6 152.6 159.6 27 32 32 37 37 6 7 7 11 11 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 60 70 86 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 8 11

CV/MVGQ

AL A H F N S + Stroke ZZ + Stroke M 73.6 l C B K CY h + l ZZ + l + Stroke MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bore size (mm) Stroke range (mm) 40 50 63 80 100 S A AL B B1 C D E F H1 MM K M KA J HX N RHC 30 35 35 40 40 130.6 133.6 140.6 152.6 159.6

Parallel Style Air Gripper Series MHZ

locations) (Except 10) Plug 10 : M-3P 16 to 25: M-5P End boss assembly D1 H G F E D2 B Model A MHZJ2-10S C K 0.016 0.043 12f8 5.5 28 16 40 11 7 15 H G Note 1) MHZJ2-16S C K D2 0.016 0.043 16f8 6.5 27.7 16.2 43.5 15 10 20 MHZJ2-20S C K 0.020 0.053 20f8 7.5 31.2 16.7 51.7 19 12 22 MHZJ2-25S C K 0.020 0.053 Other dimensions and specifications correspond to the standard type. 25f8 10 32.3 17.3

AC

Attachments Description Applicable Mounting location of attachment Air intermediate output port size Symbol model None AC200: 1/8 AC250: 1/4 AC300: 1/4 AC400: 3/8 AF + AR + K + AL AC2000 to AC4000 40 AW+AFM (Available only for AC2040 to 4040.) (2) Standard bracket for a set of 2 pieces: T type bracket A set of 3 pieces or more: L type bracket Check valve K AW + K + AL AC2010 to AC4010 AF

Modular Type Filter Regulator Series AW

(K) to 40(K) AW30(K), 40(K) AW20(K) AW30(K), 40(K) AW20(K) to 40(K) AW20(K) to 40(K) AW30(K), 40(K) Symbol 1 Note 4) 2 6 8 C J Note 5) N R W Note 1) Drain guide is NPT1/4 (applicable to AW30 to 40), and the exhaust port for auto drain comes with 3/8" One-touch fitting (applicable to AW30 to 40).

Table of Contents

A 30 20 ZSE ISE 20 PSE 45 Z I SE3 55 4.5 11.5 40 15 PS 4.5 Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6.5 1.6 ZSP 20 41.5 ZS-24-A Bracket A View A ISA2 IS Bracket D ZSM A PF2 30 20 IF Data 20 45 55 4.2 4.5 40 11.5 15 7.2 7.5 1.6 41.5 35 22 ZS-24-D Bracket