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Filter Rc1/2 20 m V V 3 Valve Rc1 V Rc1/2 V 4 Valve Rc1/2 V V 9 Y-strainer Rc3/8 #40 V V Install either the strainer or filter. If foreign matter with a size of 20 m or more are likely to enter, select the particle filter, and then prepare it. Filter Rc3/8 20 m V V 5 Flow meter Rc1 V Prepare a flow meter with an appropriate flow range.

63 20 to 63 20 to 100 20 to 100 20 to 100 Symbol JCM V V V V V V V Standard Note 10) v v v V V V V Long st CM2 V V V V V V V D CM3 v v v v v v v CG1lF v v v V V v v CG1l-lJ K v CG1lH CG1 CG1 V v v v 10-, 11CG3 v v v v v v v 25ANote 9) JMB V V v v v 20Note 9) v v v v CG1lR V v v CG1lM MB MB1 v v XB6 Note 2) Note 2) Note 15) v XB7 CA2 v v v XB9 Note 15) v XB13 Note 15) CS1 v

(R) Vacuum spec. (V) Standard External pilot spec. (R) Standard External pilot spec. (R) Vacuum spec. (V) Standard External pilot spec. (R) Vacuum spec. (V) Port size Vacuum spec.

Low Speed Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-A9(V) MQ BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) RHC D-M9A(V) Note 2) BMA3-020S (A set of b, c, d, e) BMA3-025S (A set of b, c, d, e) BMA3-032S (A set of b,

Applicable bore size (mm) d H1 B1 C1 Width across flats L 6 10 16 20 25 32 NTP-006 NTP-010 NTJ-015A NT-015A NT-02 NT-03 M3 x 0.5 1.8 5.5 6.4 2-P through 4-T counterbore M4 x 0.7 2.4 7 8.1 H + Stroke A' Auto switch M5 x 0.8 4 8 9.2 M6 x 1.0 5 10 11.5 M8 x 1.25 5 13 15.0 M10 x 1.25 6 17 19.6 (mm) Bore size (mm) A P A' Q QA B R C T D V E GA GB H J K L MM NN 6 10 16 20 25 32 M3 x 0.5 depth

G r a p h i c O p e r a t i o n Te r m i n a l Actuator cable* Pages 566, 581 Controller type Standard cable Robotic cable LECP6 (Step data input type) LE-CP-m-S LE-CP-m LECA6 (Step data input type) LE-CA-m LECP1 (Programless type) LE-CP-m-S LE-CP-m The * mark: Can be included in the How to Order for the actuator.

Mep a = 1000 2000 L1 (mm) Pitching m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) m a = 2000 1000 L1 a = 3000 0 10 20 30 Transfer load m (kg) 600 L2 400 Mer L2 (mm) L3 (mm) m Rolling Yawing 200 L2 Mer 0 10 20 30 m Transfer load m (kg) 2000 a = 1000 L3 1000 a = 2000 m a = 3000 Mey a 0 10 20 30 Transfer load m (

MY1B (Basic type) B A 10 16 20 Mounting position A 27 35 20 B 133 165 90 Operating range l Note) 6.5 8.5 6 MY1M (Slide bearing type) B A 16 20 Mounting position A 90 70 B 110 90 Operating range l Note) 7.5 11 MY1C (Cam follower guide type) B A 16 20 Mounting position A 70 90 B 90 110 Operating range l Note) 11 7.5 MY1H (High precision guide type) B A 10 16 20 Mounting position A 27 35

How to Mount and Move the Auto Switch Auto switch mounting screw M2.5 x 0.45 x 4 L Watchmakers (precision) screwdriver Solid state D-M9N(V), D-M9P(V), D-M9B(V) D-M9NW(V), D-M9PW(V), D-M9BW(V) D-M9NA(V), D-M9PA(V), D-M9BA(V) Hexagon socket head set screw M4 r 1.

D-A9 V D-M9 V D-M9WV 20 (22) 7.5 (5) ( ): Denotes the values of D-A9V.

A73H A80H E76A E73A E80A 3-wire (NPN equivalent) A72 A73 A80 A73C A80C 5 V 12 V 200 V 100 V IC circuit 10 16 20 25 32 16 20 25 32 Grommet CXS Relay, PLC 5 V, 12 V 12 V 100 V or less IC circuit 2-wire 24 V Connector 5 V, 12 V 5 V 12 V 24 V or less 100 V IC circuit 10 3-wire (NPN equivalent) DGrommet Relay, PLC 24 V 2-wire 5 V, 12 V 100 V or less IC circuit -X Solid state auto switches

A73H A80H E76A E73A E80A 3-wire (NPN equivalent) A72 A73 A80 A73C A80C 5 V 12 V 200 V 100 V IC circuit 10 16 20 25 32 16 20 25 32 Grommet CXS Relay, PLC 5 V, 12 V 12 V 100 V or less IC circuit 2-wire 24 V Connector 5 V, 12 V 5 V 12 V 24 V or less 100 V IC circuit 10 3-wire (NPN equivalent) DGrommet Relay, PLC 24 V 2-wire 5 V, 12 V 100 V or less IC circuit -X Solid state auto switches

G T L S M kit (Flat ribbon cable with terminal block) kit (Terminal box) kit (Lead wire) kit (Serial transmission unit) kit (Multi-connector kit) Number of pins: 20 (VQ2000 only) 2-4-113 Valve Specifications Sonic conductance Type of actuation Voltage Electrical entry Manual override C [dm3/(sbar)] 4/2 5/3 (A/B R1/R2) 12 V 24 V DC 100 V 110 V AC 200 V 220 V AC 50/60 Hz 50/60 Hz Push type

132 11 16 13 40 100 13 340 1/2 66 140 12 20 16 47 125 15 340 1/2 77 140 12 20 16 55 160 20 375 3/4 94 159 12 24 20 60 421 CHAW Series Dimensions Rod flange type: CHAWF 4 x FD 4 x J 2 x Rc P T T V V Cushion adjustment screw GA Air release GA M Width across flats G Width across flats G MM MM R (max.) d d W W D E E D FY B C MA a a FT MA B F NA NA F K A A K H + Stroke S + Stroke FX H ZZ + 2

(Except 50) MY1MW16, 20, 50, 63 MY1CW16, 20, 50, 63 Side port Side port Front port Front port L L L L L L R R R R R R R L L R R R L L Bottom port Bottom port L R Slide table operating direction MY1MW25, 32, 40 MY1CW25, 32, 40 L L This port cannot be used.

Note 3) Bowl O-ring and other O-rings are slightly lubricated. 20 Series AC20D-A to AC40D-A Dimensions AC20D-A AC30D-A to AC40D-06-A 2 x P1 (Port size) 2 x P1 (Port size) A F J J M A F J J M S S R C B R C B V Q1 Q1 V Q2 Q1 Q1 OUT IN IN OUT H H Pressure gauge (Option) Pressure gauge (Option) U U Clearance for maintenance G Drain Drain P2 (Pressure gauge port size) E Clearance for maintenance

CM2 R 20 100 A A CDM2 20 100 A A M9BW R With auto switch Number of auto switches Mounting style With auto switch (Built-in magnet) Bottom mounting style A B 2 pcs. Nil S n Front mounting style 1 pc. n pcs.

M3: 0.8 Nm 1-5-64 Type 20: Top Ported/SS5YJ7-20Stations -00 [ ]: AC Grommet (G) Approx. 300 (Lead wire length) 6 L2 L1 4-4.5 (For mounting) 6.5 (DIN 7.8) 20.3 (DIN 21.6) 15.5 3 8 3.3 122 [126.4] 17 16.5 107.4 [111.8] B A B A B A B A B A P R R 50 25 57.3 (DIN 58.6) 56.5 (DIN 57.8) P R R 17 17 79.5 [81.7] 78.7 [80.9] 1/8 (P, R port) 1/8 (A, B port) Manual override (Pitch) P = 19 20 Built-in