Rated Flow Range: 10 to 100 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 3/4, Output Specification: OUT1: NPN; OUT2: NPN, Temperature Sensor: None, Lead Wire: w/o Lead Wire w/M8 Connector, Unit Specification: Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 10 to 100 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 1, Output Specification: OUT1: NPN; OUT2: NPN, Temperature Sensor: None, Lead Wire: w/o Lead Wire w/M8 Connector, Unit Specification: Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 1/2, Output Specification: OUT1: NPN; OUT2: NPN, Temperature Sensor: None, Lead Wire: w/o Lead Wire w/M8 Connector, Unit Specification: Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: Rc, Port Size: 1/2, Output Specification: OUT1: NPN; OUT2: NPN, Temperature Sensor: None, Lead Wire: w/o Lead Wire w/M8 Connector, Unit Specification: Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: Flow Adjustment Valve, Thread: Rc, Port Size: 1/2, Output Specification: OUT1: NPN; OUT2: NPN, Temperature Sensor: None, Lead Wire: w/o Lead Wire w/M8 Connector, Unit Specification: Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -

1

COM. 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 COM. COM. 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 9 10 7 8 7 8 7 8 7 8 5 6 5 6 5 6 5 6 3 4 3 4 3 4 3 4 1 2 1 2 1 2 1 2 COM. COM. (P: 26 pins) (PG: 20 pins) (PH: 10 pins) (J,G: 20 pins PC wiring) Mixed wiring of single and double wiring can be specified on the manifold specification.

Table of Contents

CY3R32 CY3R40 P (Piping port) Model TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 CY3R15 CY3R20 CY3R25 CY3R32 CY3R40 8-15-20 20 Magnetically Coupled Rodless Cylinder Direct Mount Type Series CY3R Dimensions Centralized piping type: 15 to 40 HB HC N X MX W K MTS H MY 2-P (Piping port) HA CB 4-J x E T 4-counterbore dia.

Table of Contents

V Red F 0 V Black G Shield 10-12-20 20 Stroke Reading Cylinder Series CE1 Construction 12, 20 32 @7 @4@8 @0 oi @3 !

ZP

Model Model ZPT20B-0-A10 ZPT40B-0-A14 12.4 47.5 24.4 20 22 23.5 32.5 25 40 48 16 43 34 10.5 ZPT25B-0-A10 ZPT50B-0-A14 15.6 25 27 24 33 28 51.5 32.4 50 57 19 53 38 ZPT32B0-A10 32 34 29 38 18.9 37 14 Dimensions by Stroke Dimensions by Stroke 40 50 20 25 32 Model F F H E E F H F E E E F Model G: 6 G: 8 G: 6 G: 8 ZPTB10-0-A14 150.5 60 64 145 149 154.5 G: 4 G: 6 G: 4 G: 6 G: 4 G: 6 ZPTB10-0-A10

Table of Contents

Model Model ZPT20B-0-A10 ZPT40B-0-A14 12.4 47.5 24.4 20 22 23.5 32.5 25 40 48 16 43 34 10.5 ZPT25B-0-A10 ZPT50B-0-A14 15.6 25 27 24 33 28 51.5 32.4 50 57 19 53 38 ZPT32B0-A10 32 34 29 38 18.9 37 14 Dimensions by Stroke Dimensions by Stroke 40 50 20 25 32 Model F F H E E F H F E E E F Model G: 6 G: 8 G: 6 G: 8 ZPTB10-0-A14 64 60 150.5 145 149 154.5 G: 4 G: 6 G: 4 G: 6 G: 4 G: 6 ZPTB10-0-A10

Magnetically Coupled Rodless Cylinder

Mounting orientation and static moment Mounting orientation Horizontal mounting Ceiling mounting Wall mounting Vertical mounting Bore size (mm) A [mm] 6 m 19 21 25 27 33 40 49 Static load 10 15 20 25 32 40 m x g x (z + A) m x g x x m x g x y m x g x x m x g x y M1 M2 M3 moment Static m x g x (z + A) m x g x x m x g x y A: Distance between the center of the guide shaft and the upper surface

ZP

Dimensions (per stroke) Model Weight (g) Dimensions (per stroke) Model Weight (g) Dimensions (per stroke) Model Weight (g) Lateral A 17 20 B 34 40.5 D 11 14.5 11.0 12.2 A 17 20 B 30 37 D 10 14 7.7 8.6 A 17 20 B 34 40.5 D 11 14.5 11.0 12.2 A 17 20 B 30 37 D 10 14 7.7 8.6 ZP3-Y015U:J3-B3 ZP3-Y015U:J6-B3 ZP3-Y015U:K3-B3 ZP3-Y015U:K6-B3 ZP3-Y02U:J3-B3 ZP3-Y02U:J6-B3 ZP3-Y02U:K3-B3 ZP3-Y02U:K6

SY

stations 2 to 20 stations 20 C44 C46 Note 1) An asterisk () indicates order made products.

Table of Contents

Rc, NPT, G port can be selected for bore sizes with 20 or more. (Refer to page 8-19-8.)

Mechanically Jointed Rodless Cylinder Series MY1

Seal kit includes a grease pack (10 g). When !5 and !6 are shipped independently, a grease pack (20 g) is included. Order with the following part number when only the grease pack is needed. Grease pack part number: GR-S-010 (10 g), GR-S-020 (20 g) Note) Two kinds of dust seal bands are available.

Table of Contents

200 g 194 g 201 g 187 g 203 g 193 g Weight With sensor cable 101 g 108 g 102 g 109 g 95 g 111 g 101 g Without sensor cable 16-3-27 6 Series PSE560 Internal Circuit PSE56Voltage output type 1 to 5 V Output impedance Approx. 1 k PSE56--28 Current output type 4 to 20 mA Allowable load impedance 500 or less (at 24 VDC) 100 or less (at 12 VDC) Brown LINE(+) Brown DC(+) Load Main circuit Main

Air Cylinder Series CM2

G 20 25 32 40 Built-in Magnet Cylinder Model If a built-in magnet cylinder without an auto switch is required, there is no need to enter the symbol for the auto switch.

Compact Cylinder

6 g 43 g 3 g 151 g Mounting Bolt for CQ2B/Without Auto Switch Mounting method: Mounting bolt for through-hole mounting of the CQ2B is available as an option.

Table of Contents

P (Finger closing port) MHS M G NA I AD AE AC MHC AA Auto switch mounting groove dimensions (2 locations) MHT MHSH3-40D MHSH3-50D MHSH3-32D MHY MHW 4 4 7 4 7 5 MRHQ 5 3 7.5 5 3 5 3 Misc. 5 90 5 90 90 D20 20 20 20 20 20 20MHSH3-63D MHSH3-80D 4 10 4 5 11 3 5 3 5 5 90 90 20 20 20 20 (mm) L J 20 21 24 28 32 G 43.5 45 55.5 61 72 FX 22 26 32 40 50 O 4.5 4.5 5 5.5 6 EO 15.5 19 24 31 41 NA 14 16

5 Port Solenoid Valve Series SY3000/5000/7000/9000

, (H): SY7 20(-F2) G H C8, N9 C10, N11 3 4 5 SY7 20-02(-F2) G H 3 4 5 (For mounting bracket) 2 x M4 x 0.7 depth 6.5 20 20 (A, B port) 1/4 7 31.5 [38.5] 40 24.5 One-touch fitting (A, B port) Applicable tubing O.D. : 8, 5/16" : 10, 3/8" G: Approx. 300 H: Approx. 600 134.4 [138.8] 60.7 [62.9] (Lead wire length) 38.5 51.5 13.6 B A Manual override (For manifold mounting) 2 x 4.2 19 42 (Light/surge