TABLE OF CONTENTS

or L) ELW53JJ8XCCP (G or L) ELW53JV8XCCP (G or L) ELW53JK8XCCP (G or L) ELW53VV8XCCP (G or L) ELW53VK8XCCP (G or L) ELW53KK8XCCP (G or L) 215 215 135 70 55 120 120 70 55 85 70 55 50 50 35 135 120 50 35 30 70 50 35 30 40 35 30 30 30 20 215 120 40 30 25 120 40 30 25 40 30 25 30 25 25 135 65 30 20 15 65 30 20 15 30 20 15 20 15 15 G 132 G 132 DE-ENERGIZED ENERGIZED G 132 H 364 G 132 J 116 G 132

Table of Contents

Cannot be used as a single unit. 3-8-9 10 Series VFS1000 How to Order VFS1 1 20 01 1 G Symbol Option 2 position single F: With foot bracket Thread type 1 Nil N Rc NPT NPTF G Port size 01 Rc 1 8 T 2 position double F Option 2 Mountable only for VFS1120.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

of this product vary. *2 Indicates case of grommet type Add 20 g for the grommet type with PCB, 70 g for the conduit type, 50 g for the DIN terminal type, and 15 g for the M12 connector type.

VFS

Cannot be used as a single unit. 3-8-9 10 Series VFS1000 How to Order VFS1 1 20 01 1 G Symbol Option 2 position single F: With foot bracket Thread type 1 Nil N Rc NPT NPTF G Port size 01 Rc 1 8 T 2 position double F Option 2 Mountable only for VFS1120.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

conduit port (G 1/2).

Secondary Batteries

Action D B T Port thread type Double acting Double acting with spring loaded Single acting (Spring extend) 20 to 50 Nil TN TF Rc NPT G Note) TF for 20 indicates M5.

%silltr

Temperature oC 0 5 l0 l5 20 25 30 35 40 g/m'n *(Standard) 4.98 6.99 9.86 t3.76 18.99 25.94 35.12 47.19 OJ.UJ 3 g/m (Atrnospheric) 4.98 6.E6 9.5 t 13.04 17.69 23.76 3t.64 41.83 54.11 Temperrture oC 0 -5 -10 -t5 -20 -25 -30 -35 40 g/m'n (Standard) 4.98 3.36 2.28 1.52 1.00 0.u 0.4 0.25 0.15 g/m (Atmospheric) 4.98 l.6l 1.08 0.7 0.45 o.29 0.18 Temperstur oF 32 40 60 60 100 120 140 160 lm giftr

SMC Basic Pneumatics

Temperature oC 0 5 l0 l5 20 25 30 35 40 g/m'n *(Standard) 4.98 6.99 9.86 t3.76 18.99 25.94 35.12 47.19 OJ.UJ 3 g/m (Atrnospheric) 4.98 6.E6 9.5 t 13.04 17.69 23.76 3t.64 41.83 54.11 Temperrture oC 0 -5 -10 -t5 -20 -25 -30 -35 40 g/m'n (Standard) 4.98 3.36 2.28 1.52 1.00 0.u 0.4 0.25 0.15 g/m (Atmospheric) 4.98 l.6l 1.08 0.7 0.45 o.29 0.18 Temperstur oF 32 40 60 60 100 120 140 160 lm giftr

Vacuum

(mm) 02_o2 0 4 _ o 4 0 6 0 6 0 8 _ 0 8 10 _ o.10 1 3 @ 1 3 1 6 @ 1 6 20 @2O 25 _ a25 32 _ a32 40 s4O 50 o50 Pad dia. (mm) 02_o2 0 4 o 4 0 6 a 6 0 8 0 8 1 0 _ o 1 0 1 3 _ o 1 3 1 6 _ s 1 6 20 szo 25 o25 32 s32 40 s4O 50 650 Thread Dia. s2-sB o4(}o50 B4 M4 x 0.7 o B5 M5 x 0.8 o a Thread B6 M G x l a o B8 M8 x 1.25 o a 8 1 0M 1 0 x 1 . 2 5 o o .

Vacuum

(mm) 02_o2 0 4 _ o 4 0 6 0 6 0 8 _ 0 8 10 _ o.10 1 3 @ 1 3 1 6 @ 1 6 20 @2O 25 _ a25 32 _ a32 40 s4O 50 o50 Pad dia. (mm) 02_o2 0 4 o 4 0 6 a 6 0 8 0 8 1 0 _ o 1 0 1 3 _ o 1 3 1 6 _ s 1 6 20 szo 25 o25 32 s32 40 s4O 50 650 Thread Dia. s2-sB o4(}o50 B4 M4 x 0.7 o B5 M5 x 0.8 o a Thread B6 M G x l a o B8 M8 x 1.25 o a 8 1 0M 1 0 x 1 . 2 5 o o .

Vacuum Unit

g x 5 pcs. + 5 g x 5 pcs. + 141 g = 661 g 18 A ZK2mA Series Ejector Exhaust Characteristics/Flow Rate Characteristics (Representative value) The flow rate characteristics correspond to the standard supply pressure.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

87 g (G1/4: 132 g) Flow adjustment valve +34 g Lead wire +35 g Bracket +20 g Panel mount adapter +15 g DIN rail mounting bracket +65 g Weight 11 2-Color Display Digital Flow Switch PF2M7(-L) Series *1 Refer to the Recommended pneumatic circuit examples on page 2. *2 When using the accumulated value hold function, use the operating conditions to calculate the product life, and do not exceed

Nozzle Type Ionizer

Bar length [mm] IZN10-G-100-X205 100 IZN10-G-200-X205 200 IZN10-G-300-X205 300 IZN10-G-400-X205 400 IZN10-G-500-X205 500 IZN10-G-600-X205 600 Supply pressure specifications: 0.05 to 0.15 MPa If the tubing is bent for use, maintain a minimum bending radius of 20 mm.

Ionizer Nozzle type IZN10 Series IZS

Bar length (mm) IZN10-G-100-X216 IZN10-G-200-X216 IZN10-G-300-X216 IZN10-G-400-X216 IZN10-G-500-X216 IZN10-G-600-X216 100 Part no. IZN10-G-X198 Part no.

Title not found

Both sdes (2 to 20 siaiions) '!

LEC-OM02704CN

DC24V 2. 20 3. 4. 5. 6. 7. 8.

Modular Type Filter Regulator Series AW

Note 2) Drain guide is G 1/4 (applicable to AW30K and AW40K). Rc NPT G F Note 2) Accessories Note 3) Description With bracket Float type auto drain (N.C.) Note 2) Symbol Nil B C D E G H Applicable model AW20K to 40K AW20K to 40K AW30K, 40K AW20K to 40K AW20K to 40K AW20K to 40K Port size Body size Symbol Port size 20 30 40 Float type auto drain (N.O.)

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

Bottom: 85 g G1/4/Straight: 115 g Bottom: 130 g 8 One-touch fitting/Straight: 50 g Bottom: 65 g Body 100 g Flow adjustment valve Lead wire Bracket Panel mount adapter DIN rail mounting bracket +45 g Weight +35 g +20 g +15 g +65 g +25 g Note 1) Refer to Example of Recommended Pneumatic Circuit on Features 2.

NVZseies

NVZsO4R-OM Lead wire length Tgpe 20 Manifold,/ Top Ported inch (mm) Gromm{ (G), (H) % NPTF 4 ports L type dug connectot(L) M type plug connector(M) 21 Manifold,/ Top Ported' inch (mm) Grommet (G), (H) 2 Mounting holes L Vpe dug cmnecto.

3 Way,3 Port Solenoid Valve NVZ Series

NVZsO4R-OM Lead wire length Tgpe 20 Manifold,/ Top Ported inch (mm) Gromm{ (G), (H) % NPTF 4 ports L type dug connectot(L) M type plug connector(M) 21 Manifold,/ Top Ported' inch (mm) Grommet (G), (H) 2 Mounting holes L Vpe dug cmnecto.