SMC Corporation of America
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Blow Velocity Distribution (Supply Pressure: 0.3 MPa) qEnergy saving static neutralization nozzle IZN10E-01 wHigh flow rate nozzle IZN10E-02 0 0 100 100 Distance [mm] Distance [mm] 200 200 4 m/s 14 m/s 300 300 11 m/s 3 m/s 400 400 8 m/s 2 m/s 500 30 30 20 10 0 10 20 500 30 30 20 10 0 10 20 Distance (Horizontal) [mm] Distance (Horizontal) [mm] 8 IZN10E Series Flow Rate Characteristics qEnergy

Rush speed into cushion is as follows: M + m 2 = 1.4a Ek = 2 Ek: Kinetic energy (J) M: Weight for the driven object (kg) m: Weight for movable part of cylinder (kg) : Maximum speed (m/s) a: Average speed (m/s) = 1.4 x 300 = 420 mm/s. Note) Set a so that rush speed into cushion should not exceed 0.75 m/s.

20 -20 10 0 0 0 0 5 10 15 20 25 0.2 0.3 0.4 0.5 [MPa] [L/min (AMR) ] Pmax Qmax 10 Pmax 2 (P1 Q1 ) 3 Qmax 0 37 - No.ZQ-OM01401-B 11.2 () ZQ000A 11.3 -100 -80 [kPa] -60 -40 -20 0 (V 6 ) 0 5 10 15 20 [L/min (AMR) ] ZQA (PD)() ZQ000A (PD) 100 80 [L/min(ANR)] 70 [L/min(ANR)] 0.5MPa 0.5MPa 80 60 0.4MPa 50 0.35MPa 0.3MPa 60 0.3MPa 40 40 30 20 20 10 0 0 0 1 2 3 4 5 0 1 2 3 4 5 [] [

Also, regularly check there is no deterioration due to ozone. 444 Technical Data IZN10 Series Blow Velocity Distribution (Supply Pressure: 0.3 MPa) IZS (1) Energy saving static neutralization nozzle/IZN10-01 (2) High flow rate nozzle/IZN10-02 IZN IZN IZF ZVB IZD IZE IZH 0 0 100 100 200 200 Distance [mm] Distance [mm] 3 [m/s] 14 [m/s] 300 300 2 [m/s] 11 [m/s] 400 400 1 [m/s] 9 [m/s] 500 30

160 176 125 165 M 8 160 115 4 12 11 142 95 19 18 67 190 210 135 96 200 M10 42 194 35 J K L U I O T GR N S W P GL GQ M Q R V Bore size (mm) 20 25 32 40 93 60 5.5 80 35 16 4 25 26 50 M5 x 0.8 4 50 14 53 105 M6 x 1 112 103 70 9 95 40 20 7 32 31 60 M5 x 0.8 7 60 14 63 125 M8 x 1.25 132 104 70 9 95 40 20 7 32 38 60 Rc 1/8 Rc 1/8 7 60 13 63 125 M8 x 1.25 132 115 82.5 11 115 45 25 8 38 47 70 8

160 176 125 165 M 8 160 115 4 11 12 142 95 18 19 96 42 35 67 190 210 135 200 M10 194 P GL GQ GR I J K L M N O Q R S T U V W Bore size (mm) 20 25 32 40 93 60 5.5 80 M5 x 0.8 4 4 35 50 25 14 26 16 53 50 105 M6 x 1 112 103 70 9 95 M5 x 0.8 7 7 40 60 32 14 31 20 63 60 125 M8 x 1.25 132 104 70 9 95 Rc 1/8 Rc 1/8 7 7 40 60 32 13 38 20 63 60 125 M8 x 1.25 132 115 82.5 11 115 8 8 45 75 38 14 47

fluid outlet 0.6 60 Pressure [MPa] 0.5 50 Lifting head [m] Usable flow rate range 0.4 40 0.3 30 Circulating fluid return 0.2 20 0.1 10 0 0 0 20 40 60 80 100 120 140 160 180 Circulating fluid flow[L/min] Fig. 8-11 Pump capacity(HRL300-A-20 CH1) 8.5.4 HRL-A-20CH2 0.6 60 0.5 50 Lifting head [m] Pressure [MPa] 0.4 40 Usable flow rate range Circulating fluid outlet 0.3 30 0.2 20 Chiller display

fluid outlet Lifting head [m] Pressure [MPa] 0.4 40 0.3 30 Usable flow rate range 0.2 20 Circulating fluid return 0.1 10 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 Circulating fluid flow [L/min] Fig. 8-9 Pump capacity(HRL100-A-20 CH1) 8.5.2 HRL200A20 CH1 0.6 60 0.5 50 Circulating fluid outlet Lifting head [m] Pressure [MPa] 0.4 40 0.3 30 Usable flow rate range 0.2 20 Circulating fluid

EK M : Kinetic energy (J) : Load weight (kg) + Weight of movable part (kg) : Piston speed (m/s) EK= 2 M 2 Allowable Kinetic Energy When Locking 40 1.19 {12.1} 32 0.67 {6.8} 25 0.42 {4.3} 20 0.26 {2.7} Bore size (mm) Piston speed (m/s) J {kgf cm} Stopping Accuracy (Not including tolerance of control system.)

Bracket (Option) AV R 1/8, 1/4 Dedicated mounting screw AU 22 14 (Hex. width across flats) (M4 x 0.7) M5 x 0.8 38 AF 2 26 2-4.5 600 8 AR (Lead wire length) 19 3 25 IR 5 9 8 5 VEX 36 1 3 22 22 AMR 3.2 ITV IC M5 type PT type 40 VBA VE SMC DIGITAL PRESSURE SENSOR ALM. SET 20 VY1 + G P.SET PPA AL 14-11-19

PT)1/8 50 82 105 37 80 25 60 63 132 20 47 33 12 25 70 M8 X 1.25 40 38 188 Rc(PT)1/8 60 92 125 44 95 20 70 73 162 25 58 82.5 40.5 14 26 M8 X 1.25 45 50 241 Rc(PT)1/8 75 104 150 55 115 20 Without rear plate Long stroke Bracket mounting stroke Bracket mounting stroke Stroke range (mm) Bore (mm) Bore (mm) Bore (mm) Y R Z 20 25 32 40 50 20 25 32 40 50 20 25 32 40 50 100st or more 250 to 400 88

Note 3) The AW30 and AW40 bowl assembly comes with a bowl guard (steel band material). 59 Filter Regulator AW10 to 40 Dimensions AW10, 20 H M T D N Panel fitting dimension J Bracket (option) Y S U W IN OUT B C Z Q P IN OUT V Plate thickness AW10, AW20: Max. 3.5 K Pressure gauge port size Pressure gauge (option) OUT Square embedded type pressure gauge (option) O S Port size Drain E Min. clearance

)] + *2 600 [L/min(ANR)] 300 270 [MPa] 0.20.6 [] -550() 2] *3 20 [m/s 2] *4 100 [m /s *1 *22 2/V *310500Hz XYZ 2 *4XYZ 3 21 No.ZL3-OM00801-A 9.2 / ZL3-JSY3140 *1 [ms](0.5MPa 27 [Hz] 5 [DCV] 24 10 [W] 0.4 *1 JIS B 8419:2010 20 9.3 9.4 GZ33-K1K-01-X56 GZ33-P1C-N01-X55 kPa inHg/psi -100100kPa -30inHg14psi R1/8 NPT1/8 3F.S ,5F.S [g] ZL3 ZL6 390 470 +80 +25 +20 +60 / +120

20 15 15 10 10 5 5 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [] Circulating fluid temperature [] 60Hz 50Hz Fig. 8-3: Cooling Capacity 8.5 Pump Capacity 0.6 60 Usable flow rate range 0.5 50 Circulating fluid outlet (60Hz) Lifting head [m] Pressure [MPa] 0.4 40 0.3 30 0.2 20 Circulating fluid outlet (50Hz) 0.1 10 Circulating fluid return 0.0 0 0 10 20 30 40

=r: 14 EJ ffi) n:H" NXT OAG14A NXT OIG}1 P M AJ(I &44 NXT 0rG17'4 7 1 10 1 1 4 &ait 3 12,34 t5,et 21,t6 2a.12 ?f21 n. g!4) 31t1 l,loB thln 8 rtrtlo.n @itact tctoP. DritENsroNs A B c D E F G H J K lul N o P R s T u 3.43 (84 2.43 (72) 1.89 (48) 2.61 {67) 3.54 {so) 1.73 (44) 1.81 (46) 3.54 (90) 1.97 (s0) 0.79 (20) 0.35 (91 5.12 (130) 4.

Cooling Capacity: 018 [Cooling Capacity: 1700/1900 W (50/60 Hz)], Pipe Thread: N (NPT with PT-NPT Conversion Fitting Set), Option: None

Cooling Capacity: Cooling Capacity: 1700/1900W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: Rc, Option: B + M + T