SMC Corporation of America
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O X M O U N T I N G U U Side D D Side O P T I O N When a longer than Standard DIN Rail is required, enter the number of Manifold Station that corresponds with the length of DIN Rail needed (20 Stations Max) V A LV E S TAT I O N S 02-10 .Double Wiring Specifications 11-20 .Applicable up to 20 Solenoids.

VS7 S kit (Serial transmission) Kit F kit (D-sub connector) T kit (Terminal block) P kit (Flat cable connector) U S F 15 pin U S P 26 pin U S A S U S P 20 pin U S P 16 pin U S P A B C 10 pin F 25 pin T2 T1 Model Max. number 16(1) 14 8 8 16 16 16(1) 14 16(1) Note 1) Due to the limitation of internal wiring.

20 25 6 8.5 11.5 9 13 18 4 4 5 5.5 11.6 6 7.5 16.4 20 20 27 6.5 8.5 13 10 14 20 4 4.5 9.2 6 5.5 12.6 6 8 17.2 20 25 27 7.5 10.5 13 11 15 4 4.5 9.8 6 6 13.3 20 25 7.5 10.5 7 Series C(L)KQG32 Dimensions CLKQG;32 (Clamping height LOW type) The figures below indicate the CLKQGB32-;RCL-X2081.

Specifications Standard/internal pilot specifications External pilot specifications 20 20 stations U side D side w How to Order Valves Enter the symbols for the required specifications in the blanks below.

Low temperature operation 1) The valve can be used in an ambient temperature of between 4 to 14F (20 to 10C).

Symbol Stations Note 02 2 stations P, E port entry Double wiring Note 1) U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) 16 02 16 stations 2 stations Note 2) Specified layout: Indicate the wiring specifications on the manifold specification sheet.

78.4 59.8 59.8 24 24 30 30 Conduit terminal Conduit Faston terminal Model Q R U T Q R 99.5 99.5 20 20 196 231 68.5 68.5 47.5 47.5 20 20 VXF25A< VXF26A< Q R U 196 231 23 23 20 20 202 237 U 16 Series VXF2 Dimensions: Flange type VXF25B<<U S S S J J z300 Q R I 1/2 Exhaust port 24.4 Q z300 1/2 Exhaust port K I

S U S U S U S w U S AXT100-1-J 20 Note 3) U S e r AXT100-1-F Note 3) AXT100-1-GU20 Note 1) Suffix -XP to the end of the part number for dust-protected SI unit.

S U S U S U S w U S AXT100-1-J 20 Note 3) U S e r AXT100-1-F Note 3) AXT100-1-GU20 Note 1) Suffix -XP to the end of the part number for dust-protected SI unit.

This allows for viable connections to take place without necessarily specifying whether the manifold station is double, single, or mixed wiring. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM. Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4 Single wiring Connector Top entry Connector entry direction can be changed with a single push.

The following graph shows an example of the detection of an overload warning when the overload warning level (Pn52B) is changed from 20% to 50%. An overload warning is detected in half of the time required to detect an overload alarm.

U side Intermediate connector block assembly wiring example D side U side Connector block Intermediate connector block 20 19 20 19 D side 7 7 8 8 5 5 6 6 3 3 4 4 U side D side 2 1 2 1 FREE LOCK SOL.b SOL.a SOL.a SOL.b SOL.b SOL.a SOL.a SOL.b COM COM SOL.a SOL.b SOL.b SOL.a SOL.a SOL.b SOL.b SOL.a Station 3 Station 4 Station 1 Station 2 (Station 4) Double solenoid (Station 3) Double solenoid

EX510-VSS EX510-VSQ L 20 20 L 20 20 2.8 2.8 B C A How to Order EX510-V + 10 S S EX510-VWS EX510-VWQ Output Valve connector L 20 20 L 20 20 S W 1 point 2 points Nil S Q None For SY, SYJ series For VQ, VQZ series Note) Cable length (L) 2.8 2.8 10 30 1 m 3 m B C A + Note) VQ is compatible with the positive common only.

.) 4-O T Q 2-P AH AG B S W K U L AA AL AB A I J AI AJ 4-AK hole V AP R Y + Stroke Z + Stroke X AG For 4-AO AN AI Cutout window AM Mounting dimensions For standard strokes (mm) Bore size (mm) Stroke range (mm) O N M L K J I B AP AO AN AM AH AG AB AA AL AK AJ AI A 20 25 32 40 50 75, 100, 125, 150, 200 M6 x 1 depth 9 45 25 80 60 55 30 108 25 M6 115 65 125 112 11 12 9 6.6 95 82 99 M6 x 1 depth

A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] 100 2 or 3 particles/cc 10 00 10 20 30 40 50 60 70 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

H 39 45 55 60 UU 134 158 190 220 N 15 17 20 25 U 114 136 165 190 Model U 105 124 153 174 Model H 30 33 43 44 N 15 17 20 25 U 114 136 165 190 UU 150 177 215 250 Model UU 125 146 178 204 N 15 17 20 25 U 105 124 153 174 H 39 45 55 60 H 30 33 43 44 Model CDRA1FW50 CDRA1FW63 CDRA1FW80 CDRA1FW100 CDRA1FX50 CDRA1FX63 CDRA1FX80 CDRA1FX100 CDRA1FY50 CDRA1FY63 CDRA1FY80 CDRA1FY100 CDRA1FZ50 CDRA1FZ63

40 20 14 15.5 19 75 1/4 104.5 58.5 63 Up to 600 18 12 32 45 17.5 35 27 11 75 134.5 56.5 14 20 40 20 14 16.5 23 90 1/4 119.5 68 80 Up to 800 22 18 37 45 22 40 32 13 95 169 72 22 30 60 25 20 19 33 102 1/4 150 81 100 Up to 800 26 20 37 55 25 40 41 16 114 189 89 22 30 60 30 20 19 37.5 116 1/4 170 96 Bore size (mm) T N P S U V L GR GE GF K MM Q RR H VA W Z ZZ J 32 34 27 1/8 154 13 6.5 4 88.5

8 @2 @0 @3 @5 @8 @7 o u !7 t CY3R15/20 CY3R15 Component Parts No. Description No.

. 0.5m 31 63 R22.5 3 2. 5 46 Rotary Actuator Free-Mounting Type Series CDRBU2 Free-Mounting Type CRBU2 CRB2 CRB1 47 Rotary Actuator with Angle Adjuster Free-Mounting Type Series CRBU2WU Sizes: 10, 15, 20, 30, 40 How to Order CRBU2 W U 10 180 S Standard Size 10 15 20 30 40 Size 10 15 90 CDRBU2 W U 10 180 S With auto switch Sizes: 10, 15 With auto switch Sizes: 20, 30, 40 CDRBU2 W U 20 180