[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Nil Without port (For manifold) (8A) 1 4 02 Electrical entry Light/Surge voltage suppressor CE-compliant CE-compliant G Grommet, 300 mm lead wire H Grommet, 600 mm lead wire Electrical entry D T C H G Only"D" Symbol Nil S Z C Conduit Note) Note) T Conduit terminal Note) D DIN terminal Symbol S: With surge voltage suppressor Note) Refer to the figure below.

ZQ-OM01301

Vacuum pressure switch 5.1 Internal Circuit and Wiring Examples 5.2.1 Vacuum pressure switch NPN (2 output) PNP (2 output) Brown DC() Brown DC() DC (+) DC (+) Lord Black OUT1 Black OUT1 Loa d Black OUT1 Black OUT1 Main circuit Main circuit Lord M ai n ci rc ui t M ai n ci rc ui t Lord Loa Loa d DC12 DC12 d to to OUT2 White OUT2 White OUT2 OUT2 24V 24V Lord Loa FUNC FUNC d Blue DC() DC

Microspeed Cylinder: Double Acting/Single Rod Series CQSX ø 12, ø 16, ø 20, ø 25 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

, D-F9WV D-F9P B, D-F9W D-A9V D-F9N D-F9V Number of auto switches 2 pcs. 15 Note) 20 Note) 10 10 5 10 Note) 15 Note) 20 Note) 5 5 1 pc.

100

unit only (kPa) P With unit switching function (Initial value psi) D Vacuum pressure switch *3 For q, the units for metric spec. fittings are in kPa.

CM2x-OM0230Q

./ (mm) 1) (BM2-A)(BJ5-1/) () 2) (BM2-AS/)(BJ4-1/) D-M9A(V) BBA4D-C7/C8/H7 D-H7BA BBA4 BJ2-006BJ2-010BJ2-016 BM2-020(A)BM2-025(A)BM2-032(A) BM2-040(A) BMA2-020(A)BMA2-025(A)BMA2-032(A) BMA2-040(A)BMA2-050(A)BMA2-063(A) BBA4 M3x0.5x14L 1 D-C7C8 D-H7 BHN3-025ABHN3-032ABHN3-040A 11 - <> D-M9NM9PM9BM9NM9PVM9BV D-M9NWM9PWM9BWM9NWM9PWVM9BWV D-M9NAM9PAM9BAM9NAM9PAVM9BAV D-A90A93A96A90VA93VA96V

Digital Pressure Switch

Description Part number Remarks Panel mount adapter ZS-39-B Panel mount adapter + Front protective cover ZS-39-D Front protective cover ZS-39-01 Lead wire with connector + connector cover ZS-39-5G 5 cores, 2 m R1/8 conversion adapter ZS-39-N1 NPT1/8 conversion adapter ZS-39-N2 DIN rail mounting adapter ZS-39-R : Made to Order -10No.PS-OMM0005-J Summary of Product parts Names of individual

Compact Vacuum Unit

(n1) x 0.402 Ejector/Manifold ZZB-SM5 ZB0030-K1L(O)Vacuum pump system/Manifold ZZB-SM5 ZB31-Q1L(O)E F E F 1 Stations n D side U side 1 Stations n D side U side Vacuum pressure switch Vacuum pressure switch Vacuum pressure switch Vacuum pressure switch PV PD PV PD Port open to atmosphere PV PD PV PD Port open to atmosphere Port open to atmosphere Port open to atmosphere Supply valve Supply

JCRB-OM00003

(D-M9 only) Operation Environment Recommended Tool Description Model Wire stripper D-M9N-SWY * Stripper for a round cable (2.0) can be used for a 2-wire type cable. Warning (1) Never use in an atmosphere with explosive gases. Auto switches are not designed with explosion-proof construction. Never use in an atmosphere containing explosive gas since this may cause a serious explosion.

VT317

VT/O317-G(-02) VT/O317-GS(-02) VT/O317-H(-02) VT/O317-HS(-02) VT/O317-C(-02) VT/O317-CS(-02) VT/O317-T(-02) VT/O317-TS(-02) VT/O317-TZ(-02) VT/O317-D(-02) VT/O317-DS(-02) VT/O317-DZ(-02) Coil no. PVT317-001GBPVT317-G PVT317-001GB-L06 PVT317-G-06 PVT317-001CBPVT317-C Coil assembly with terminal part no.

lVFl 10

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

3M/SMseries

(Austin) 2324-D Ridgepoint Drive Austin, TX 78754 Tel: (512) 926-2646 FAX: (512) 926-7055 SMC Pneumatics Inc. (Nashville) 5000 Linbar Drive, Suite 297 Nashville, TN 37211 Tel: (615) 331-0020 FAX: (615) 331-9950 SMC Pneumatics Inc. (Dallas) 12801 N. Stemmons Frutry, Ste.815 Dallas, TX 75234 rel: (972\ 406-0082 FAX: (972) 406-9904 SMC Pneumatics lnc.

ZQ-OM01401

Q1 5 4 () 1) () Q2 1)+COM (4) 7) (2)1U (3)J1,J2, Q2 (11) (P ) L L 0.3m 0 (M5x0.8) LO L 2 4 3 6 (5) 5 4 2) B (12) (2):1U 2)(3)Q1 8) (3)Q2 Assy N C 3) ) (6) ( D [kPa] (2):3M EA NPN2 9) 8) (PD) EB PNP2 0 to -100 EC NPN1 + S EE PNP1 + C FA NPN2 D FB PNP2 -100 to 100 8)VQ100 Ass yP.41 FC NPN1 + FE PNP1 + (3)Q2 (4)LO 9)(3)J1,J2Q2 P.6 (3)C 4) F 3) ZFC 4

ZL3-OM00601

(mg/m3) 0.1 d 0.5 0.5 d 1.0 1.0 d 5.0 point() 1 20,000 400 10 1 -70 1 0.01 2 400,000 6,000 100 2 -40 2 0.1 3 Not specified 90,000 1,000 3 -20 3 1 4 Not specified Not specified 10,000 4 +3 4 5 5 Not specified Not specified 100,000 5 +7 6 +10 3.3.2 Air pressure 1) Operation with a pressure exceeding the maximum operating pressure leads to breakage of the product.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Series 10/11 -CQSX Series10/11 -CQ2X How to Order How to Order Clean room series 10 11 Clean room series 10 11 Relieving type Vacuum type Relieving type Vacuum type C(D)QSX B 20 10 30 A90 C(D)Q2XB 40 10 30 A73 D D With auto switch With auto switch (with built-in magnet) (with built-in magnet) Microspeed cylinder Microspeed cylinder Mounting Cylinder stroke (mm) Bore size Number of auto

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

9.8

D-DN

AKH/AKB Series

Model D L M AKH04-00 AKH06-00 AKH08-00 AKH10-00 AKH12-00 3 5 10 17 25 4 6 8 10 12 2.8 6.5 14 24 34 9.3 11.6 15.2 18.5 21.7 33.5 37.1 53.3 63.6 70.2 12.7 13.5 18.5 21 22 2-Applicable tubing D Inch Size Weight g Effective area (mm) Applicable tube O.D.

VDW

Series Option VV2DW2-05011 set VDW23-5G-25 sets Manifold part no. Valve part no. (Stations 1 to 5) 1 2 3 10 20 30 None With bracket Nil F Note) Type 30 is available only with bracket. Enter together in order, counting from station 1 on the D side. is the symbol for assembly. Add an in front of the part numbers to have solenoid valves, etc. mounted on manifold.

VDW Series

Series Option Example VV2DW2-0501 ... 1 set Manifold part no. 1 2 3 10 20 30 None With bracket Nil F VDW23-5G-2 ... 5 sets Valve part no. (Stations 1 to 5) Note) Type 30 is available only with bracket. "" is the symbol for mounting. Add "" in front of the part numbers for solenoid valves, etc., to be mounted. Enter together in order, counting from station 1 on the D side.

ZL3-OM00801

0.5 0.5 d 1.0 1.0 d 5.0 () (mg/m 1 20,000 400 10 1 -70 1 0.01 2 400,000 6,000 100 2 -40 2 0.1 3 90,000 1,000 3 -20 3 1 4 10,000 4 +3 4 5 5 100,000 5 +7 6 +10 3.3.2 1 9 No.ZL3-OM00801-A 3.4 3.4.1 P5 (2/V) (3/E) G (1/P) 06 Rc3/4 Rc1 Rc1/8 04 Rc1/2 F06 G3/4 8() G1 G1/8 F04 G1/2 N06 NPT3/4 5/16(inch) N04 NPT1/2 NPT1 NPT1/8 3.4.2 1) 2), 3) 1 (2/V) 1 (G) 40