High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

Servo Motor Controller (24 VDC)

Please wire referring to the following diagram * NPN type * PNP type A1 COM CN5 I/O signal power 24VDC A1 COM CN5 I/O signal power 24VDC A2 COM A2 COM A3 IN0 A3 IN0 A4 IN1 A4 IN1 A5 IN2 A5 IN2 A6 IN3 A6 IN3 A7 IN4 A7 IN4 A8 IN5 A8 IN5 A9 SETUP A9 SETUP A10 HOLD A10 HOLD A11 DRIVE A11 DRIVE A12 RESET A12 RESET A13 SVON A13 SVON Load B1 OUT0 Load B1 OUT0 B2 OUT1 Load B2 OUT1 Load B3 OUT2 Load

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Parallel I/O Connector: CN5 Wiring diagram LEC6N(NPN) LEC6P(PNP) Power supply 24 VDC for I/O signal CN5 Power supply 24 VDC for I/O signal CN5 A1 A1 COM+ COM+ COM COM A2 A2 A3 A3 IN0 IN0 A4 A4 IN1 IN1 A5 A5 IN2 IN2 A6 A6 IN3 IN3 A7 A7 IN4 IN4 A8 A8 IN5 IN5 A9 A9 SETUP SETUP A10 A10 HOLD HOLD A11 A11 DRIVE DRIVE A12 A12 RESET RESET A13 A13 SVON SVON Load Load B1 B1 OUT0 OUT0 Load Load B2 B2

One-touch Fittings

D2 D1 Connection thread H Release button dimensions X Y Male Branch Tee: KQ2T-G (Sealant) Connection thread R Model H (Width across flats) Effective area [mm2] Min. port size Release button dimensions D2 L1 L2 A2 M Applicable tubing O.D.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

L : Stroke [mm] V : Speed [mm/s] a1: Acceleration [mm/s2] a2: Deceleration [mm/s2] T = T1 + T2 + T3 + T4 [s] Calculation example) T1 to T4 can be calculated as follows. T1 and T3 can be obtained by the following equation.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Combination 4 Types Combination of Applicable Chart C59 -X6 -X16 -X16 -X16 C62 C8 C10 -X6 C30 -X10 C61 A2 A24 A24 C11 C60 C32 A1 A2 A13 A14 A15 A14 Chart 1, 2, 7 Chart 1, 2, 3, 8 Chart 1, 3, 9 Chart 2, 3, 7, 8 Chart 2, 3, 8, 9 Chart 2, 7 Combination is available only when all the conditions are fulfilled in above combination chart.

S Couplers Series KK/KKH/KK13

/O.D. mm 5/8 6/9 6.5/10 8/12 8.5/12.5 Symbol 01 02 03 04 Symbol 50 60 65 80 85 175 Series KKH Dimensions/Socket (S) Male thread type (mm) A1 A2 When connected T Connection port size D H Width across flats L2 When connected Effective area mm2 L1 Min. bore size Body size Mass g A2 Model A1 T KKH3S-01MS R 1/8 36.0 6.0 20.4 20.3 33.5 39.1 36.6 14 -02MS 20.2 R 1/4 1/8 34.0 9.0 19.4 31.5 39.5 37.0

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Combination 4 Types Combination of Applicable Chart C59 -X6 -X16 -X16 -X16 C62 C8 C10 -X6 C30 -X10 C61 A2 A24 A24 C11 C60 C32 A1 A2 A13 A14 A15 A14 Chart 1, 2, 7 Chart 1, 2, 3, 8 Chart 1, 3, 9 Chart 2, 3, 7, 8 Chart 2, 3, 8, 9 Chart 2, 7 Combination is available only when all the conditions are fulfilled in above combination chart.

CRQ2

Pattern Air cushion None Size Thread type Attached C How to order model with auto switches Combination 4 Types Combination of Applicable Chart 10, 15 20, 30, 40 Size 10, 15 Port type Nil Nil TF TN TT Nil Chart 1, 2, 5 Chart 1, 2 Chart 2, 5 Chart 2, 5 C30 C8 C10 C30 C12 A2 A24 C11 C8 A1 A2 A14 A14 M5 Rc 1/8 G 1/8 NPT 1/8 NPTF 1/8 Refer to page 11-8-2 for How to Orderproducts with auto switch

Rotary Cylinder Series MRQ Size: 32, 40 1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com F1 = x A1 x P (1) F2 = x A2 x P (2) A1 = D2 (3) 4 A2 = (D2 d2) (4) 4 F1 = Cylinder force generated on the extending side (N) F2 = Cylinder force generated on the retracting side (N) = Load rate A1 = Piston area

PSxx-OMG0005CN

[V] A B C 0-101 kPa 0 -101 kPa 10.1 kPa -100100 kPa -100 kPa 100 kPa 01 MPa 0 1 MPa -0.1 MPa 0500 kPa 0 500 kPa -50 kPa -13No.PS-OMG0005CN-E PSE5601 PSE56N01 02 N02 PSE56-C01 A B PSE56-01 8.2 R1/8 PSE56-02 12 R1/4 PSE56-N01 9.2 NPT1/8 PSE56-N02 12.2 NPT1/4 PSE56-A2 PSE56-C01 Rc1/8 PSE56-A2 15.5 URJ1/4 PSE56-B2 9.5 TSJ1/4 PSE56-B2 ZS-31-X D E F G H I ZS-31-X188 20 9 R1/8 R1/8 14 1.5

LEF-OM007xx

A1,A2 32 200 S3 32 200 S3 200 to 230VAC LECSA2 A2 200 to 230VAC LECSA2 A2 Both side D Both side D 40 400 S4 40 400 S4 100 to 120VAC 100 to 120VAC LECSB1 LECSB1 B1 B1 25 100 S6 25 100 S6 Motor option 32 200 S7 AC servo motor (Absolute encoder 32 200 S7 AC servo motor (Absolute encoder LECSB2 LECSB2 200 to 230VAC B2 200 to 230VAC B2 B1,B2 B1,B2 Without lock Nil Without lock Nil 400 400 40

LECA6_C

B13 A13 B13 CN5 -A1 COM DC24V 24V A2 COM DC24V 0V A3 INO Bit No.

LECP6_C

6.1 / . . 1 1 2 11 2 13 3 DC24V10 3 DC30V 4 ON 3.5mA20(DC24V ) 4 10mA 5 OFF 1.5mA 11V 5 2.0V() 6.2 /(NPNPNP ) /NPN LECP6NPNP LECP6P (1) I/O (NPNPNP ) NPN (a) COM+ A1 (b) IN0A3SVONA13 (a) PNP (b) (a) COMA2 (b) IN0A3SVONA13 (2) I/O NPN OUT0B1 ALARMB13 COMA2 PNP COM+ A1 OUT0B1 ALARMB13 23 - 63 / I/O A1 B1 A1 A13 B1 B13 A13 B13 CN5 PLC -A1 COM DC24V /24V A2

Step Motor Controller With Step data Teaching Function (Servo / 24VDC)

NPN Type PNP Type I/O signal power I/O signal power CN5 CN5 24VDC 24VDC A1 COM A1 COM A2 COM A2 COM A3 IN0 A3 IN0 A4 IN1 A4 IN1 A5 IN2 A5 IN2 A6 IN3 A6 IN3 A7 IN4 A7 IN4 A8 MODE A8 MODE A9 SETUP A9 SETUP A10 HOLD A10 HOLD A11 DRIVE A11 DRIVE A12 RESET A12 RESET A13 SVON A13 SVON B1 OUT0 Load B1 OUT0 Load B2 OUT1 B2 OUT1 Load Load B3 OUT2 B3 OUT2 Load Load B4 OUT3 B4 OUT3 Load Load B5 OUT4

3

Load at the end of lever arm = m a2 = m1 + m2a22 + k a12 12 3 Dk = m2 2r2 5 -X 387 MK Series Design/Selection Caution 1.

CY1F

115.5 D-F9, D-F9V (mm) Mounting patternq Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 B1 A1 Operating range B1 B2 B3 (mm) 10 15 25 5.5 34 64 22 76 34 76 5 35 70 23 82 35 82 5 40.5 99.5 28.5 111.5 40.5 111.5 Mounting patternw B2 A2 D-F9W, D-F9WV (mm) Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 Operating range B1 B2 B3 (mm) 10 15 25

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

T1 Metric Size L4 Weight (g) AS A2 A1 M L3 L2 L1 d T1 D1 D2 H2 H1 Max.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Seal NBR O-ring NBR 15-9-86 13 Dual Speed Controller Adjustable by Flat Head Screwdriver With One-touch Fitting Dimensions Metric size L2 L3 Applicable tubing O.D. d D1 M1 L6 D2 L1 D4 L4 AS H ASP (Hexagon width across flats) ASN D3 AQ D4 ASV A1 L5 AK A2 L6 ASS ASR ASF T Metric Size A1 A2 L4 L5 L6 L3 D2 D3 D4 L1 Model H L2 D1 d T M1 ASD230F-M5-04D 17.5 29.4 9.3 4 12.9 30.7 31 0.7 9.6 10

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

ASV Inch size M1 L3 L2 AK Applicable tubing O.D. d D1 ASS L6 D2 L1 ASR D4 L4 H ASF (Hexagon width across flats) (Hexagon width across flats) D4 D3 A1 L5 A2 L6 T Inch Size Model H D1 D2 D3 D4 L1 L2 L3 L4 L5 L6 A1 A2 M1 T d 1/8" 5/32" 3/16" 1/4" 3/16" 1/4" 5/16" 1/4" 5/16" 3/8" 1/4" 5/16" 3/8" 1/4" 5/16" 3/8" 3/8" ASD230F-U10/32-01T ASD230F-U10/32-03T ASD230F-U10/32-05T ASD230F-U10/32-07T