CRBU

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer A port B port Chamfer A port Chamfer R R A port B port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead

o

Manilold Sa$e as NVJ3OO Series manitold base Type 20,41, S41,42,S42.

o

Manilold Sa$e as NVJ3OO Series manitold base Type 20,41, S41,42,S42.

F/ISE

22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction None Nil TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

S Couplers Series KK/KKH/KK13

2 e !4 !5 !4 !5 !

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

Manilold Sa$e as NVJ3OO Series manitold base Type 20,41, S41,42,S42.

MRHQ

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

Cylinder with Lock Series CLS

5 CL1 e !8 r ^2 t #6 #7 #8#5#9 $7 %5 ^0 MLGC CNG $2 ^3 ^9 ^0 &0 180, 200, 250 Steel tube Component Parts Component Parts MNB No. Description Material Note No.

PFxx-OMA1007

Body size Standby E/P regulator Standby regulator Residual Pressure Relief valve 20 EXA1-AC2 30 EXA1-AC1 EXA1-AC2 40 60 EXA1-AC1 -14No.PF-OMA1007-B Names and Functions of Individual Parts Air Management System (Standby E/P regulator type) No.

Rotary Gripper Series MRHQ

"#$ " %# &'# D t D D t t c c e c e e u u u s s s d d d i i i Rotary Gripper g g g o o o n n n r r r P P P A A A 9 9 9 MRHQ 10/16/20/25 w w w 9 9 m 9 I m I 1 1 n 9 9 9 9 n 9 9 d u d u r u a a a r u 9 o 9 9 s o s F tr F ie tr ie r r r 1 1 1 Modular construction D r D r d d d e e e e v v s s o o i i n g n g n n n n a a H H n P n P g g r r Gripper section is unitized for simple replacement.

MB

6. 6-6-19 19 Series MBW With Mounting Bracket Basic: (B) 2-P G MM MM G VW Cushion valve Port E D D e A K F N MA MB Effective thread Effective thread 2 x 4-J C 13 B N F A K f 9 l S + Stroke H H + Stroke h ZZ + 2 Stroke 2-RcP G G MM MM With rod boot D e e Effective thread Effective thread Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650

MXW

7 y r e t w q @1 !0 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !6 !4 !1 !3 !2 @0 !9 o u i Component Parts No.

Dual Rod Cylinder Series CXSJ/CXS

2 e @1 q @7 @5 @8 CXSL10 CXSL15 @0!5 @9@3@4r!8w!9!3 i!0 @2ut!6 @0 !5 @9 @4 r w !8 !9 !3 i !0 @2 u t !6 !4ye!1!2 q @1 !4 y e !1 !2 @3 @1 q CXSL20 to 32 @0 !5!6@3@4r!8w!7o i!0u@2t !4 y e !1 !2 q @1 Component Parts: Standard Piping Component Parts No.

MXW Series Long Stroke Slide Table

-M4 x 0.7 thread depth 6 (Helisert) 5H9 +0.03 depth 4.5 0 6 38 5 22 12 Y Y 25 40 84 L 10 13 13 K A 30 24 15.8 A Z NN-M4 x 0.7 thread depth 8 Bottom through hole 3.3 (N-1) x H G N-M4 x 0.7 thread depth GG HH H 6 depth 4.5 5H9 +0.03 Bottom through hole 3.3 0 5H9 +0.03depth 4.5 0 F E G F E Model HH H GG J Z N L K NN 64 106 71 MXW875 30 19 92 228 5 45 31 1 98 112 106 MXW8100 32 34 115 278 5

Air Slide Table Series MXW

MXS MXQ 8 x M5 x 0.8 thread depth 13 Note) MXF 6H9 + 0.030 0 depth 5.5 (Insert) 6H9 + 0.030 0 depth 5.5 7 MXW MXJ 72 98 48 MXP MXY Y Y 25 160 40 L 40 40 MTS 11 24 24 K A 60 50 32.5 Z A Bottom through-hole 5.1 N x M6 x 1 thread depth 12 (N-1) x H G H 7 GG HH 6H9 + 0.030 0 depth 5.5 NN x M6 x 1 thread depth 12 Bottom through-hole 5.1 F E 6H9 + 0.030 0 depth 5.5 (mm) DHH H J K L E N F NN G Z

CNS

2 %5r CNA CNS Description Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-J CX E DB A C D -X (mm) 20B A 53 77 112 160 C 15 35 45 55 D 26 50 64 80 E 4.9 8 11.7 14.8 F 3 5 6 8.5 G 6.5 9.5 11 14 H 3.4 5.5 6.6 9 J M4 x 0.7 M6 x 1 M8 x 1.25 M10 x 1.5 Model Applicable cylinder MY3A16, MY3B16

JXCx-OMY0008

J X C E H Electric equipment Actuator Model Controller Stroke example: Controller type For LEFS25FB-100B-S1CE17, E EtherCAT specify LEFS25FB-100.

Cylinder with Lock Series CNS

RR1 CL1 MLGC CNG I Type Single Knuckle Joint MNB CNA MM A2 8 NDH10 Material: Cast iron (mm) CNS Applicable bore size (mm) A2 E1 MM NX RR1 U1 L1 NDH10 Part no.