Valve Single Unit

83503 Flat ribbon cable connector socket: 20 pins MIL with strain relief; Conforming to MIL-C-83503 Flat ribbon cable connector socket: 10 pins MIL with strain relief; Conforming to MIL-C-83503 Flat ribbon cable connector socket: 20 pins MIL with strain relief; Conforming to MIL-C-83503 SY D-sub connector: Conforms to MIL-C24308 Flat ribbon cable Terminal block (M3) 9 pins Terminal block

Vacuum Unit

K V V Direct exhaust Complex exhaust1 End plate exhaust C Refer to page 18 for the standard supply pressure per nozzle diameter.

One-touch Fittings

Port size Symbol Size 01 1/8" 05 3/16" 07 1/4" 09 5/16" 11 3/8" 13 1/2" Symbol Size M5 M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 00*1 Same diameter tubing 1 Only for Bulkhead union. Spare Parts Use the part number below to order the gasket for M5 thread.

VEX1

(A) 2 (A) 1 (P) 3 (R) 2 (A) 2 (A) 3 (R) Model C[dm3/(s.bar)] b Cv C[dm3/(s.bar)] b Cv C[dm3/(s.bar)] b Cv C[dm3/(s.bar)] b Cv VEX312-01 VEX312-02 VEX332-02 VEX332-03 VEX332-04 VEX350-04 VEX322-01 VEX322-02 VEX342-02 VEX342-03 VEX342-04 1/8 1/4 1/4 3/8 1/2 1/2 1/8 1/4 1/4 3/8 1/2 2.4 3.5 4.1 8.7 9.8 24 3.3 4.1 8.1 12 13 0.19 0.35 0.36 0.29 0.37 0.32 0.34 0.28 0.34 0.26 0.20 0.59 0.89 1.1

LEC-OM07605CN

A C A d A E A F A H A A (1) b # # Ready-off Ready-off (1) d # # ON ON (1) C # # OFF OFF (2) * * * (8) 8 8 8 CPU CPU (1) # # b . (3) # # d . # # C . 1. ## ## 01 1 64 64 2. *** 3.

REA/REB

AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.

REA/REB

-06-X214 AS2301F-01-06-X214 2.

REA/REB

Speed 600 mm/s E(h8) E(h8) X D I 4 -TC Effective thread depth R 14 8 -Q Effective thread depth R 14 22 K W 23 25 23 25 4 -M8 x 1.25 Effective thread depth 12 High Precision Guide Type REBH Order Made Auto Switches C 0.1 14.5 B 2 S + Stroke ZZ + Stroke 2 (mm) Model B C D E(h8) I K L NA Q x R S TC x R W X ZZ REA50 REA63 0 86 32 53 30-0.033 32-0.039 58.2 25 110 55 M8 x 1.25 x 16 176 M12 x 1.25

Modular Style Regulator with Built-in Pressure Gauge Series ARG

MPa MPa MPa P P P P K K K K C C C C U U U U O O O O S S S S H H H H L L L L to to to to Mounting angles other than 45, 135, 225 and 315 are available through the Made to Order (page 29).

I

) B Backlit LCD 01 Direct Piping 1/8 T1 NPTF 1/8 P I P I N G S P E C I F I C AT I O N S S W I T C H S P E C I F I C AT I O N S 01 Direct Piping PT 1/8 T1 NPTF 1/8 65 3 Wire Output PNP 25 3 Wire Output NPN 26 3 Wire Analog Output S W I T C H S P E C I F I C AT I O N S 65 3 Wire Output PNP 25 3 Wire Output NPN 26 3 Wire Analog Output W I R I N G S P E C I F I C AT I O N S 0.6m L Grommet entry

Sine Rodless Cylinder Series REA/REB

Individual -X 947 Series REAR Dimensions A K W HT HC X N 2 x P piping port H HA Y T 8 x MM thread depth M 4 x counterbore B CB L T Counterbore depth C 4 x J effective thread length E X F GW GP WS QW PW D 4 x LD HS CR Q + Stroke W K REAR10 REAR15 Switch rail HR G Plug Z + Stroke (mm) CR CB A B C D F G GP GW H HA HC HR HS HT J x E Model REAR10 2 0.5 10.5 6.5 3.2 12 6.5 6 27 25.5 26 24 25 24

REC

24 21 22 41 14 32 16 12.5 50 8 10 56.2 7 26.5 51 1/4 181 247 Axial foot style: RECL G H Width across flats B2 F G K A NA 2-RcP F AL Standard port 2-NN Pluged (M5 x 0.8) H1 H2 Width across flats B1 I D C B 4-LD LH MM 2-4 3.2 N N X X Y S + Stroke Y LX Z LS + Stroke LZ ZZ + Stroke (mm) A AL B B1 B2 C D F G H H1 H2 I K LD LH LS LX LZ MM N NA Bore (mm) Stroke range 20 M8 x 1.25 Up to 700 18 15.5

Fieldbus System

N.O. 2 2-position double (Rubber) 4-position dual 3-port valve (C) 2(B) 4(A) 2(B) (A)4 C: Locking type (Manual) Note) C (R1)5 1 (P) 3(R2) 1(P) 5(R1) 3(R2) N.C.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

How to Order Manifold Example/Valve T C VV3QZ15 08 N7 VQZ215R 5M 02 Thread (Cylinder ports and P, R ports) External pilot specification Example/Manifold VV3QZ25 Rc(PT) 06C6C R N NPT T NPTF F G(PF) External pilot specification Cylinder ports (1) Symbol N1 N3 N7 N9 N11 NM M5 01 02 External pilot port 3/8" 1/8" 5/32" 1/4" 5/16" Mix M5 1/8 Tube O.D.

KP/KPQ/KPG

KPQY12-04 KPGY04-M5 KPGY04-01 KPGY04-02 KPGY06-M5 KPGY06-01 KPGY06-02 KPGY08-01 KPGY08-02 KPGY10-02 KPGY10-03 KPGY12-03 KPGY12-04 M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 10 14 8 10 14 12 14 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 6 13 19 7 14 20 14 22 29 39 41 68 4 4 4 18 20.7 10.4 D1 10 M M L1 8 L2 A D1 6 K 10 10

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Note1) C kit only.

Fieldbus system EtherCAT compatible SI Unit

1 to 65000 (k) 40x4:0 Fault mode UNSIGNED8 Number of Channels 40x4:01 40x4:20 Channel 0 Channel 31 (Output setting value during communication fault) 0=Hold 1=Clear 2=Force ON Enum0804 40x5:0 Idle mode UNSIGNED8 Number of Channels 40x5:01 40x5:20 Channel 0 Channel 31 (Output setting value during communication idling) 0=Hold 1=Clear 2=Force ON Enum0804 40xE:0 System parameters UNSIGNED8

PSxx-OMM0006CN

ZS-35-C X X X X X E ZS-35-D X X ZS-35-F X X X X X + F ZS-35-G X X 1/ 1 ZS-24-A A M35 L,M45 L 2 ZS-24-B B M45 L, 2 ZS-24-D D M35 L,M45 L 2 ZS-35-C (01,N01) ZS-35-D (W1,WF1,M5,C4,C6) ZS-35-F +(01,N01) ZS-35-G +(W1,WF1,M5,C4,C6) -10No.PS-OMM0006CN-E M8(3 ) 01 N M L ISE40A 1/ 2 ISE40A -0.11.000 MPa Y ZSE40A 0.0-101.3 kPa K + T + 1 01 R1/8(M5) N01 NPT1/8(M5) A A D D N NPN1

VQ4000

SQ Flow Characteristics at the Number of Manifold Stations (Operated individually) VQ0 Passage/Stations Station 1 Station 5 Station 10 Station 15 Model VQ4 5.9 0.23 1.5 6.2 0.19 1.5 6.8 0.31 1.8 7.0 0.38 1.9 5.9 0.23 1.5 6.2 0.19 1.5 6.8 0.31 1.8 7.0 0.38 1.9 5.9 0.23 1.5 6.2 0.19 1.5 6.8 0.31 1.8 7.0 0.38 1.9 C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv

AC Servo Motor Driver (CC-Link Type ）

[C][0].