Rotary Actuator/Vane Type

) 7 to 20 10-(20-X) to (X-1.5) 30 10 to 22 12-(22-X) to (X-5) 7 to 22 10-(22-X) to (X-2) 40 7 to 15 9-(15-Y) to (Y-2) [9-(15-Y) to (Y-4.5)] Note) Note) Values inside [ ] are for the CRBU2.

Slider Type Ball Screw Drive/11-LEFS Series

1050 11-LEFS40ll-1000l 1414.5 1444.5 1006 1178 16 7 1050 526

LEYx-OMZ0015

7 12 13 14 15 1 2 3 4 5 6 8 In-line [LEY63] In-line [LEY25/32] Rod end male thread 26 24 32 26 29 30 27 28 27 31 27 28 27 25 7 Parts list No.

Electric Slide Table / High Precision Type 《 AC servo motor 》

Specification . 4 1.1 LECS series driver . 4 1.1.1 How to order . 4 1.1.2 Specification . 4 1.2 LECY series driver . 7 1.2.1 How to order . 7 1.2.2 Specification . 8 1.3 Construction . 9 2.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

+0.030 0 (172) 122 M4 x 0.7 depth 8 (F.G. terminal) 25 (3.1) 90 129 Motor cable (6) 68 124 160 124 47 35 Encoder cable (7) 114 79 Note 2) (158) Note 2) 49.5 6H9 ( ) depth 7 +0.030 0 7 63.5 73 Encoder Z-phase detecting position L A (Table traveling distance) (64) 186 (B: With lock/226) 28 (64) Stroke 39 (4) 21 Motor cable (6) 70 58 47 6.7 17.5 Vacuum port Rc1/8 Note 3) 35 Encoder cable (7)

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

B 0(0) 0(0) 0.5(0) 5.5 A 6(4) 6(4) 7(5) 12 B A B 1.5(0) 1.5(0) B 0(0) 0(0) 1(0) 6 B 5(3) 5(3) 6(4) 11 A 7(5) 7(5) 8(6) 13 A B 6(4) 6(4) 7(5) 12 A 4(2) 4(2) 5(3) 10 B 3(1) 3(1) 4(2) 9 A 0.5(0) 0.5(0) 1.5(0) 6.5 Hs 22.5 25 28.5 32.5 Hs 25 27.5 31 35 Hs 60 62.5 66 70 Hs 69.5 72 75.5 79.5 Bore (mm) 20 25 32 40 4.5(2.5) 3.5(1.5) 2.5(0.5) 4.5(2.5) 3.5(1.5) 2.5(0.5) MGF 2.5(0.5) 7.5 5.5(3.5) 10.5

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

B 0(0) 0(0) 1(0) 6 B 0(0) 0(0) 0.5(0) 5.5 A 6(4) 6(4) 7(5) 12 B 5(3) 5(3) 6(4) 11 B A B 1.5(0) 1.5(0) A 7(5) 7(5) 8(6) 13 B 6(4) 6(4) 7(5) 12 A 4(2) 4(2) 5(3) 10 B 3(1) 3(1) 4(2) 9 A 0.5(0) 0.5(0) 1.5(0) 6.5 A Hs 22.5 25 28.5 32.5 Hs 25 27.5 31 35 Hs 60 62.5 66 70 Hs 69.5 72 75.5 79.5 Bore (mm) 20 25 32 40 4.5(2.5) 3.5(1.5) 2.5(0.5) 4.5(2.5) 3.5(1.5) 2.5(0.5) MGQ 5.5(3.5) 10.5 4.5(2.5) 9.5

LEKF-OMZ0035

Slider type LEKFS series . 7 2.1 Specification . 7 2.2 How to Order . 9 2.3 Construction . 11 3.

Vacuum Pad with Ejector

Mounting and Installation 7 5. Air Supply 9 6. Exhaust from Ejector 9 7. Piping 10 7.1 Piping connections to the PD Ports 10 7.2 Piping connections to the Supply (P) port 11 8. Construction 12 9. Dimensions 15 10.

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: 02 [R1/4 (M5 Female Thread)], Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: 02 [R1/4 (M5 Female Thread)], Output Specification: 28 [Current Output (4~20mA) Type], Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 4 [For Positive Pressure (0~500kPa)], Port Size: 02 [R1/4 (M5 Female Thread)], Output Specification: 28 [Current Output (4~20mA) Type], Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 4 [For Positive Pressure (0~500kPa)], Port Size: 02 [R1/4 (M5 Female Thread)], Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 1 [For Vacuum (0~-101kPa)], Port Size: 02 [R1/4 (M5 Female Thread)], Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 1 [For Vacuum (0~-101kPa)], Port Size: 02 [R1/4 (M5 Female Thread)], Output Specification: 28 [Current Output (4~20mA) Type], Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 3 [For Compound Pressure (-100~100.kPa)], Port Size: 02 [R1/4 (M5 Female Thread)], Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 3 [For Compound Pressure (-100~100.kPa)], Port Size: 02 [R1/4 (M5 Female Thread)], Output Specification: 28 [Current Output (4~20mA) Type], Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Display Pressure: 10 (1.0MPa), Connection Thread: 02 (R 1/4), Grade: SRB (General Degreasing, Production Line), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Display Pressure: 4 (0.4MPa), Connection Thread: 02 (R 1/4), Grade: SRB (General Degreasing, Production Line), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Display Pressure: 2 (0.2MPa), Connection Thread: 02 (R 1/4), Grade: SRA (Precision Cleaning, Clean Room M5.5), Attachment: C2 (Clear Cover Removable, Wrench Tighten)