VM

SA JIS Symbol/2 port 3 port Roller lever VM1010-4N-01 VM1010-4NU-01 VM1110-4N-01 VM1110-4NU-01 VA VM 0.5 MPa supply Applicable tubing VR T0425 TU0425, T0403, TS0425 VM1110-4N-01 VM1010-4N-01 Bottom ported 3 port 2 port VM1110-4NU-01 VM1010-4NU-01 VH 6 N F.O.F. VHS Applicable tube 2.5 mm P.T. Mounting hole 2.0 mm O.T. 4.5 mm T.T.

SY

1.94) 6 x 1m 6 x 1m 8 x 1m AS3001F-08 (Cv = 0.56) 8 x 1m AS3001F-08 (Cv = 0.56) AS3001F-06 (Cv = 0.36) AS3001F-06 (Cv = 0.36) AN101-01 (Cv = 1.11) AN110-01 (Cv = 1.94) 10 x 1m AS4001F-10 (Cv = 0.89) 10 x 1m AS3001F-08 (Cv = 0.56) 12 x 1m AS4001F-10 (Cv = 1.17) 6 x 1m 6 x 1m AS3001F-06 (Cv = 0.36) AS3001F-06 (Cv = 0.36) AN200-02 (Cv = 1.94) AN110-01 (Cv = 1.94) 10 x 1m AS4001F-10 (Cv = 0.89

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

-M-01 DIN terminal (D, Y): 10-SYJ5143-01 M8 connector (WO): 10-SYJ5143-WO-01 D Y Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 82.9 Max. 10 50.1 [57.1] 75.4 64.1 34.7 M8 x 1 54.6 49 37.1 61.2 [68.2] Approx. 300 (Lead wire length) 6 Pg7 6 6 6 73.5 [75.7] 63.7 [65.9] 83.5 82.6 65.2 72.6 58.7 0.5 45.5 45.5 45.5 45.5 17 17 17 17 17 17 17 17 42.7 0.5 0.5 6 6 6 6 0.5 8.5 8.5 8.5

SYJ300/500/700

-D-01 M8 connector (WO): SYJ54-WO-01 VZ VS VFN Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 82.4 74.9 MAX. 10 74.6 49.6 [56.6] 63.6 34.2 48.5 54.1 M8 x 1 36.6 Approx. 300 (Lead wire length) 60.7 [67.7] Pg7 6 6 6 6 65.5 [67.7] 55.7 [57.9] 75.5 64.6 57.2 50.7 42 42 42 42 34.7 17 9 17 9 17 9 17 9 8.5 8.5 8.5 8.5 21 21 21 21 44.5 44.5 44.5 44.5 Refe page 4-4-61 for dimensions

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

DIN terminal Closed center: VFR2310Exhaust center: VFR2410Pressure center: VFR2510L plug connector Closed center: VFR2310-LExhaust center: VFR2410-LPressure center: VFR2510-LM plug connector Closed center: VFR2310-MExhaust center: VFR2410-MPressure center: VFR2510-M01 02 01 02 01 02 01 02 01 02 01 02 01 02 D Y 01 02 D Y 01 02 D Y Applicable cable O.D. 6 to 8 [4.5 to 7] Light/Surge voltage

SYJ3000/5000/7000

SYJ5 40-M-01 3 4 5 DIN terminal (D): SYJ5 40-D-01 3 4 5 M8 connector (WO): SYJ5 40-WO-01 3 4 5 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 82.9 Max. 10 75.4 50.1 [57.1] 64.1 34.7 49 M8 x 1 54.6 37.1 61.2 [68.2] Approx. 300 (Lead wire length) 6 Pg7 6 6 6 65.8 103.4 [107.8] 59.3 123 [127.4] 45.5 45.5 45.5 45.5 18.1 43.3 17 17 17 17 17 17 17 17 141.2 121.2 143 6 8.5 6 6 6 48.9

13

6 6 6 6 6 10 10 One-touch and screw-in connection Applicable tubing diameter B Model A 60 6 29.5 16 12.8 28 5 47 60 6 29.5 16 12.8 28 5 47 60 6 29.5 16 12.8 28 5 47 60 6 29.5 16 12.8 28 5 47 63 6 30.5 18 12.8 29 5 50 63 6 30.5 18 12.8 29 5 50 78 8 39 23 13.7 35 7 61 78 8 39 23 13.7 35 7 61 B C D E F G H (Mounting hole) ZH05BS-06-01 ZH05BL-06-01 ZH07BS-06-01 ZH07BL-06-01 ZH10BS-06-01 ZH10BL

OMU0023

FF00 5 01 02 004B 0001 01 02 01 Acquires the INP signal information. Acquires the information repeatedly until the received information shows that the INP is "1". 6 Repeat steps 5-6 When INP becomes "1", the Return to Origin operation is completed.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

(Nl/min = 1904.1) 6 x 1m 6 x 1m 8 x 1m AS3001F-08 (Nl/min = 549.6) 8 x 1m AS3001F-08 (Nl/min = 549.6) AS3001F-06 (Nl/min = 353.3) AS3001F-06 (Nl/min = 353.3) AN101-01 (Nl/min = 1089.5) AN110-01 (Nl/min = 1904.1) 10 x 1m AS4001F-10 (Nl/min = 873.5) 10 x 1m AS3001F-08 (Nl/min = 549.6) 12 x 1m AS4001F-10 (Nl/min = 1.17) 6 x 1m 6 x 1m AS3001F-06 (Nl/min = 353.3) AS3001F-06 (Nl/min = 353.3) AN200

Table of Contents

ZSE1-01-15CN1 pc.

VFR

02 01 02 01 02 01 02 01 02 Light/Surge voltage suppressor (At TZ) Applicable cable O.D. 6 to 8 Applicable cable O.D. 2.3 to 2.8 Light/Surge voltage suppressor (At EZ) Light Light Max. 10 Max. 10 Other dimensions are the same as the grommet type.

CG5-S

(mm) Applicable fitting size 4 6 8 10 12 Applicable tubing O.D. (mm) Connection threads Model Model 4 6 8 10 12 KGL04-99 KGE04-01 R 1/8 4 KGL06-99 -02 R 1/4 KGL08-99 KGE06-01 R 1/8 KGL10-99 6 -02 R 1/4 KGL12-99 -03 R 3/8 KGE08-01 R 1/8 Plug-in Reducer KGR -02 8 R 1/4 -03 R 3/8 Applicable tubing O.D.

KJ

Model Port A size Port B size No. of Port A Porting Port A Port B Model 6 8 4 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R 8, R 10, R 10, R 10, R 6 8 10 4 6 KM11 One-touch fitting One-touch fitting 6, 10 1 4 3 8 KM12 One-touch fitting Rc female thread 6, 10 KM13 One-touch fitting One-touch fitting 3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

Speed Controller with Indicator

13 (13) AS221FS-01-04 (S) 4 8.2 AS221FS-01-06 (S) 6 10.4 14 (13) AS221FS-01-08 (S) 8 13.2 22.4 29.5 14.2 15 (14) AS221FS-01-10 (S) 10 15.9 25.3 32.4 15.6 16 (15) AS221FS-02-23 (S) 3.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 1/8 13 (12.7) 7.2 20.9 30.2 (30.3) 22.6 49.7 48.3 44.2 42.8 13.3 21.5 24 7.8 16.2 23 (24) AS221FS-02-04 (S) 4 8.2 AS221FS-02-06 (S) 6 10.4 23.4 32.7

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

screw-in connection Model A 58.5 41.5 29.5 6 12.8 3.2 12 58.5 41.5 29.5 6 12.8 3.2 12 61 41.5 29.5 6 12.8 3.2 12 61 41.5 29.5 6 12.8 3.2 12 66 44.5 30.5 6 12.8 4.2 12 70 44.5 30.5 6 12.8 4.2 12 74.5 54 39 8 13.7 4.2 17 79.5 54 39 8 13.7 4.2 17 B C D E F G H ZQ ZH05DS-06-01-06 ZH05DL-06-01-06 ZH07DS-06-01-06 ZH07DL-06-01-06 ZH10DS-06-01-08 ZH10DL-06-01-08 ZH13DS-08-02-10 ZH13DL-08-02-10 14.2

VZS

M plug connector 2 position double: VZS2250-M(Z)-01 3 position closed center: VZS2350-M(Z)-01 3 position exhaust center: VZS2450-M(Z)-01 3 position pressure center: VZS2550-M(Z)-01 DIN terminal 2 position double: VZS2250-D(Z)-01 3 position closed center: VZS2350-D(Z)-01 3 position exhaust center: VZS2450-D(Z)-01 3 position pressure center: VZS2550-D(Z)-01 Applicable cable O.D.: 3.5 to 7 MAX

CG5-S

(mm) Applicable fitting size 4 6 8 10 12 Applicable tubing O.D. (mm) Connection threads Model Model 4 6 8 10 12 KGL04-99 KGE04-01 R 1/8 4 KGL06-99 -02 R 1/4 KGL08-99 KGE06-01 R 1/8 KGL10-99 6 -02 R 1/4 KGL12-99 -03 R 3/8 KGE08-01 R 1/8 Plug-in Reducer KGR -02 8 R 1/4 -03 R 3/8 Applicable tubing O.D.

V

2 0.17 3 Water 1.1 0.6 0.9 0.5 1 0.5 0.5 (6A) VX2120-01 3 0.33 6 0.45 0.2 0.4 0.2 0.45 0.2 0.15 VX2130-01 4.5 0.61 11 Oil 2 1.5 2 1.5 1 1.5 1.5 VX2110-02 2 0.17 3 1.1 0.6 0.9 0.5 1 0.5 0.5 VX2120-02 3 0.33 6 Air 5 2 1.5 1.7 1.5 1 1.2 1.2 VX2220-02 3 0.33 6 3 3 3 2.5 3 1.7 2 VX2320-02 3 0.33 6 0.45 0.2 0.4 0.2 0.45 0.2 0.15 VX2130-02 4.5 0.61 11 0.75 0.35 0.6 0.35 0.75 0.35 0.3 VX2230-

5 Port Solenoid Valve Series VQZ1000/2000/3000

side port size 01 02 C6 C8 With bracket DIN rail mounting (For manifold) 01 02 C6 C8 Rc 1/8 Rc 1/4 6 one-touch fitting 8 one-touch fitting Rc 1/8 Rc 1/4 6 one-touch fitting 8 one-touch fitting D N Name plate Note) When two or more symbols are specified, indicate them alphabetically.

EXxx-OMO0027

5 6050:01 Channel 0 6050:02 Channel 1 6060:0 (No input data allocation) Slot 6 60A0:0 Diag.