240

10 6 0.01 0.1 0.01 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Overhang L (mm) Graph b b Load Eccentricity 100 mm Graph , Load Eccentricity 100 mm Graph 1 Load Eccentricity 100 mm 1 10 10 Mass m (kg) Mass m (kg) Mass m (kg) 1 20 16 20 16 20 16 10 6 0.1 1 10 0.1 10 6 6 0.01 0 20 40 60 80 100 0.01 0.1 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L

MXH

Eccentricity 200 mm 1 10 10 0.1 Weight m (kg) Weight m (kg) Weight m (kg) 1 1 20 16 20 16 10 6 20 16 10 6 0.01 0.1 0.1 10 6 0.01 0.001 0.01 80 100 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 Overhang L (mm) Overhang L (mm) Overhang L (mm) Selection Example 1.

Free Mount Cylinder for Vacuum Series ZCUK

Symbol 2 to 8 10 to 16 20 to 32 40, 50 02 04 06 08 10 13 16 20 25 32 40 50 Suffix 2 4 6 8 10 13 16 20 25 32 40 50 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 B4 M4 x 0.7 Female thread Applicable cylinder model Symbol M5 x 0.8 B5 M6 x 1 B6 M8 x 1.25 B8 D R D R X11 ZC(D)UK 10 Nil ZC(D)UK 16 to 32 M10 x 1.25 B10 Material Note) -X11 pad: 2 to 8 diameter and flat style

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Load (N) 0 10 20 30 40 Load (N) 0 10 20 30 50 Load (N) 40 10 10 10 L = 100 mm L = 100 mm L = 100 mm Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.03 0.06 0.02 0.02 0.04 0.01 0.01 0.02 0 0 0 80 20 40 60 80 Load (N) 20 40

XLAQ/XLDQ

55 75 F 17 26 41 52 G 40 39 63 68 H 87 91 129 142 J XLAQ-16 XLAQ-25 XLAQ-40 XLAQ-50 40 50 65 70 Note) The heater (Option) is not available with XLAQ-16. 471 Aluminum One-touch Connection and Release High Vacuum Angle Valve 2-step Control, Single Acting/Bellows Seal, O-ring Seal XLDQ Series How to Order XLDQ M9N A 40 q w e r t y w Actuator port direction q Flange size Rear flange surface

MXF

10 20 30 10 20 30 40 Load (N) Load (N) Load (N) MXF12 Lr = 30 mm 0.10 0.08 0.08 MXF12-50 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.08 MXF12-50 0.06 0.06 MXF12-30 0.06 MXF12-30 MXF12-50 MXF12-20 MXF12-30 0.04 0.04 MXF12-20 0.04 MXF12-20 0.02 0.02 0.02 20 40 60 0 0 0 20 40 60 80 20 40 60 Load (N) Load (N) Load (N) 8-6-4 5 Low Profile Slide

Bore Size: 20mm, Symmetric Type: Standard, Stroke: 40mm, Adjuster: w/o Adjuster, Function: Standard, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M

Magnet: D (Built-in), Mounting: A [Double End Tapped [ø32 - ø50]], Bore Size: Ø32 mm, Port Thread: M Thread [ø12-ø25]; Rc [ø32-ø100], Stroke: 40 mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Magnet: D (Built-in Magnet), Mounting: B [Through Hole (Standard)], Bore Size: 50mm, Port Thread: Rc: 32 to 100 Bore; M Thread: 20, 25 Bore), Stroke: 40mm, Body Option: Rod End Female Threads (Standard), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M

Bore Size: Ø25, Thread: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 40mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Bore Size: Ø63, Thread: TN (NPT), Stroke: 40mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Bore Size: Ø32, Thread: Bore 12-16: M5x0.8; Bore 20-100: Rc, Stroke: 40mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Bearing Style: M (Slide Bearing), Bore Size: 10mm, Port Thread: Bore 6-25: M Thread; Bore 32: Rc, Piping: Standard Porting, Stroke: 40mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Bearing Style: L (Ball Bush Bearing), Bore Size: 6mm, Port Thread: Bore 6-25: M Thread; Bore 32: Rc, Piping: Standard Porting, Stroke: 40mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Bearing Style: L (Ball Bush Bearing), Bore Size: 6mm, Port Thread: Bore 6-25: M Thread; Bore 32: Rc, Piping: P (Axial Direction Ported), Stroke: 40mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Bearing Style: L (Ball Bush Bearing), Bore Size: 10mm, Port Thread: Bore 6-25: M Thread; Bore 32: Rc, Piping: Standard Porting, Stroke: 40mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Bearing Style: M (Slide Bearing), Bore Size: 15mm, Port Thread: Bore 6-25: M Thread; Bore 32: Rc, Piping: Standard Porting, Stroke: 40mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Bearing Style: M (Slide Bearing), Bore Size: 6mm, Port Thread: Bore 6-25: M Thread; Bore 32: Rc, Piping: Standard Porting, Stroke: 40mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Bearing Style: L (Ball Bush Bearing), Bore Size: 15mm, Port Thread: Bore 6-25: M Thread; Bore 32: Rc, Piping: Standard Porting, Stroke: 40mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Bearing Style: M (Slide Bearing), Bore Size: 25mm, Port Thread: Bore 6-25: M Thread; Bore 32: Rc, Piping: Standard Porting, Stroke: 40mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal