Bearing Style: L (Ball Bearing Bushing), Bore Size: 10mm, Port Thread: Rc: ø32; M Thead: ø6 to ø25, Stroke: 10mm, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: L (3m)

Specification: Copper, Fluorine & Silicon-free+Low Particle Generation, Vacuum Suction Type, Bearing: Ball Bushing Bearing, Bore Size: 10mm, Stroke: 10mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Specification: Copper, Fluorine & Silicon-free+Low Particle Generation, Relief Type, Bearing: Ball Bushing Bearing, Bore Size: 10mm, Stroke: 10mm, Auto Switch: M9BAV--Solid State, Water Resist., 2 Wire, Vertical, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～0.7, Cushion: Rubber cushion, Specification: Clean Series (vacuum type), Port thread type:

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～0.7, Cushion: Rubber cushion, Specification: Clean Series (relief type), Port thread type:

Specification: 12 (Clean Series, Relief Type (w/Specially Treated Sliding Parts), Bearing: L (Ball Bushing Bearing), Bore Size: 10mm, Stroke: 10mm, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal

Specification: 22 (Copper, Fluorine & Silicon-free+Low Particle Generation, Vacuum Suction Type), Bearing: L (Ball Bushing Bearing), Bore Size: 10mm, Stroke: 10mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)

Specification: 11 (Clean Series, Vacuum Suction), Bearing: L (Ball Bushing Bearing), Bore Size: 10mm, Stroke: 10mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: L (3m)

Specification: 21 (Copper, Fluorine & Silicon-free+Low Particle Generation, Relief Type), Bearing: L (Ball Bushing Bearing), Bore Size: 10mm, Stroke: 10mm, Auto Switch: M9BAV--Solid State, Water Resist., 2 Wire, Vertical, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Bearing Style: Ball Bearing Bushing, Bore Size: 10mm, Port Thread: Rc: ø32; M Thead: ø6 to ø25, Stroke: 10mm, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 3m

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～0.7, Cushion: Rubber cushion, Specification: Clean Series (vacuum type), Port thread type:

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～0.7, Cushion: Rubber cushion, Specification: Clean Series (relief type), Port thread type:

Electric Actuator

Special cap bolt Double Clevis CD hole H10 axis d9 [mm] Stroke range (mm) A CL CD CT size 10 to 100 160.5 150.5 25 10 5 101 to 200 185.5 175.5 CU RR CW L CL + Stroke A + Stroke +0.4 +0.2 CX 10 to 100 180.5 170.5 32 10 6 0.1 0.3 CZ 101 to 200 210.5 200.5 Stroke range (mm) CW CX CZ L RR CU size 10 to 100 25 14 20 18 36 14.5 10 101 to 200 10 to 100 32 14 22 18 36 18.5 10 101 to 200 Material:

Air Slide Table Series MXS

MXS6-30 MXS6-10 MXS6-40 MXS6-50 MXS6-40 MXS6-50 0.005 0.01 0.01 10 20 30 40 10 20 30 10 20 30 40 0 0 0 Load (N) Load (N) Load (N) 8 8 8 Lr=50 mm 0.020 0.04 0.05 MXS8-75 MXS8-50 MXS8-20 MXS8-10 MXS8-30 MXS8-40 MXS8-50 0.04 0.015 0.03 MXS8-40 MXS8-30 MXS8-40 MXS8-50 0.03 MXS8-75 MXS8-75 MXS8-30 MXS8-20 0.010 0.02 MXS8-20 MXS8-10 0.02 MXS8-10 0.005 0.01 0.01 20 40 60 80 20 40 60 0 0 0 20 40

Electric Actuator

50 60 70 80 10 20 Work load [kg] Work load [kg] LEJS63/Ball Screw Drive: Vertical LEJS63;A LEJS63;B 20 Duty ratio: 50% 20 Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] Duty ratio: 50% 15000 15000 10 10 Duty ratio: 75% Duty ratio: 75% 5000 5000 0 0 0 10 2.5 5 7.5 0 20 15 5 10 Work load [kg] Work load [kg] LEJB40/Belt Drive: Horizontal LEJB63/Belt Drive: Horizontal 20

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

4.5 7 142 144 32 64 7 50 79 16 10 130 45 26 26 10 12 9.5 142 65 55 36 36 11 4.5 10 161 163 36 72 9 55 90 20 10 145 52 28 28 12 15 12 160 75 68 45 45 12 5.5 10 170 175 45 90 9 70 110 25 12 155 60 32 32 12 15 12 170 80 80 50 50 12 5.5 10 185 190 50 100 9 80 120 25 12 170 70 40 40 16 20 16 190 90 100 63 63 14 6.5 12 210 215 63 126 12 100 153 30 16 190 90 50 50 16 20 16 210 110 120 75 71 16

Tie-rod Type Hydraulic Cylinder

14 14 14 11.5 12 13.5 14.5 12 12.5 14.5 15 10 10 11.5 11.5 12 The auto switches listed below cannot be mounted on 63.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

2 (Different surfaces) 10 n 10 + 30 (n 2) 2 (Same surface) 50 D-A9l 1, 2 (Different surfaces) 10 n 10 + 40 (n 2) 2 (Same surface) 40 D-A9lV 1, 2 (Different surfaces) 10 n 10 + 30 (n 2) * n = 3, 4, 5 * The D-M9lV/M9lWV/M9lAV/A9lV are mountable on 32 to 63.

48

/closing stroke 4 6 8 12 Opening/closing stroke 16 (32) 24 (48) 32 (64) 40 (80) Size Size Size Size 10 20 32 40 10 20 32 40 10 16 20 25 10 16 20 25 32 40 4 6 10 14 CAT.NAS100-77 Controller Step data input type for servo motor Programless type Step data input type for step motor Series LECP1 Series LECP6 Series LECA6 Control motor Control motor Control motor Step motor (Servo/24 VDC) Servo

JIS Standard Hydraulic Cylinder

8.5 13 10.5 12 9.5 10 9.5 13.5 11 13 10 10.5 9.5 14.5 12.5 14 11 9.5 10 14.5 13 14 11 9.5 11 15.5 14.5 15 12 8 12 9.5 11 10 8.5 13 10.5 12 9.5 10 9.5 13.5 11 13 10 10.5 9.5 14.5 12.5 14 11 9.5 10 14.5 13 14 11 9.5 11 15.5 14.5 15 12 CHM CHS CH2 CH2 CHA CH2F (mm) Auto switch model Bore size (mm) 32 Related Products 40 50 63 80 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-F5/J59/F59F