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Pressure units conversion (Approximation) 17 Unit Pa (N/m2) kPa MPa bar kgf/cm2 atm mmH2O or mmAq mmHg or Torr PSI 1 x 103 1 x 106 1 x 105 1.0197 x 105 9.8692 x 106 1.0197 x 101 7.5006 x 103 1.4503 x 104 1 1.4503 x 101 1 x 103 1 x 103 1 x 102 1.0197 x 102 9.8692 x 103 1.0197 x 102 1 7.5006 1 x 106 1 x 103 1.0197 x 105 7.5006 x 103 1.4503 x 102 1 1 x 10 1.0197 x 10 9.8692 1 x 105 1 x 102 1

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

To order connector cable only Connector dimensions 4 Brown: 1 Blue: 3 9 3 1 Black: 4 33.9 L 35 10 Cable length (L) Part no. 300 mm V100-49-1-1 500 mm 1000 mm 2000 mm 5000 mm V100-49-1-2 V100-49-1-3 V100-49-1-4 V100-49-1-7 3000 mm V100-49-1-5 4000 mm V100-49-1-6 Caution Failure to meet IP65 performance may result if using alternative connectors than those shown above, or when insufficiently

SV

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE1 US C R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

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VVQC 000 3A 1 1 VVQC 000 1A 1 D C6 Series Series SV 1 2 1 2 VQC1000 VQC1000 SYJ VQC2000 VQC2000 Note) Tie-rods (2 pcs.) for additional stations included.

Hydraulic Filters

2 3 4 5 Standard T dimension Port size (Nominal size) T dimension 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 215 215 215 265 265 265 325 325 130 130 130 150 150 150 190 190 65 65 65 75 75 75 85 85 72 72 72 86 86 86 106 106 90 90 90 115 115 115 145 145 110 110 110 130 130 130 170 170 6 6 6 6 6 6 8 8 195 195 195 245 245 245 19 19 19 19 19 19 20 20 10 10

Compressed Air Cleaning Filter Series

8, 1/4 300 250C 1/4, 3/8 750 350C 3/8, 1/2 1,500 Piping support type AMG 450C 1/2, 3/4 2,200 550C 3/4, 1 3,700 650 1, 1 1/2 6,000 850 AMG150C to 550C AMG650/850 1 1/2, 2 12,000 2C 1/8, 1/4 300 Large dust particle filtration, Oil droplet separation Large dust particle filtration, Oil droplet separation 4C 1/4, 3/8 750 8C Main Line Filter 3/8, 1/2 1,500 Piping support type 11C 1/2, 3/4 2,200

CL

212 236 42 50 59 76 92 100 112 118 100 110 130 160 180 230 255 275 60 70 86 102 116 15 17 17 21 21 16 16 18.5 15 17 17 21 21 16 16 18.5 11 11 11 11 11 16 16 18.5 8 11 11 13 16 67 78 73 84 77 92 85 100 112.5 141.5 121 150 133 167 Without rod boot With rod boot Bore size (mm) J K KA MM N S W P H ZZ e f h ZZ l 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/5 stroke 1/5 stroke 1/5

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

SOL.b 14 1 SOL.a Station 1 1 SOL.a Station 1 SOL.a 1 The common polarity should be the same as the common specifications of the valve to be used.

Electric Actuator Miniature Rod Type Miniature Slide table Type

Description (Extract) Initial input value Input range ORIG direction Note1) CCW 1: CW , 2: CCW ORIG mode 1:ORIG Press ORIG limit LEP6 : 150 , LEP10 : 150 , LEP10L : 150 ORIG time 100 ORIG speed LEPJ : 20 , LEPK : 10 ORIG ACC /DEC 3000 Creep speed 20 ORIG sensor 0: Disable Note1) Become effective after restarting the controller.

MNB

8 1/8 1/4 1/4 1/4 1/4 1/8 1/8 1/8 1/8 1/8 1/8 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 13 13 14 14 20 20 25 31 38.5 39.5 45.5 54 7 9 9 9 12 14 3 3 2 2 4 4 10 10 12 12 16 16 72 83 100 115 126 150 38 46 52 62 63 75 87 101 120 135 153 178 56 65 77 92 100 120 54 63 75 90 102 116 Bore size (mm) 32 40 50 63 80 100 K MM N P Q H S T V W ZZ VA GA GB GC GD J GL GL1 GR GE GF 8.5 10 12.5 17.5 22 25

Series AP500

pressure to less than 150 psig (1 MPa) due to supply pressure effect.

Step Motor Driver （ Pulse input type ）

protect 1 1 Enable SW 2 2 Unit name Part no. of each product W-AREA1 0.00 0.00 W-AREA2 0.00 0.00 ORG Correct 0.00 0.00 Sensor type 1 1 Option set1 1 1 Undefined parameter11 1 1 Undefined parameter12 1 1 LEPS Return to origin parameter default Model LEPS6 LEPS10 ORIG direction 2 2 Return to origin parameter default ORIG mode 1 1 ORIG limit 150 150 ORIG time 100 100 ORIG speed LEPJ:20 LEPJ

AC Servo Motor Driver (CC-Link Type ）

(Target Position) (Rotation speed) constant [ms] function (Note 1) [ 10STM m] [r/min] 1 5.00 3000 100 150 0 1 2 7.00 2000 Invalid Invalid 0 1 3 8.00 1000 Invalid Invalid 0 0 (Note 2) Note 1. Always set "0". 2.

SQ1000/2000

CP VVQZ2000 (For P, J kits) SSQ1000 4 B P 1 150 For station 1

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

VFS 1 4 S mount VV5F3-70 Individual Side Side plate Bottom Valve Top Valve 1 8 1 4 1 4 VF370 VS4 1 4 VV5F3-71 Individual Side Side plate Side Valve Side Valve 1 8 VF3170 (Single solenoid only) 1 4 1 4 1 4 VQ7 Note 1) Supply (P port) is common.

ZP

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

CY1

7 e #3 #4 @1 @2 r t #1 @9 !2 o !1 #0 !4 #2 !3 !

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center Closed center 1 150 or less 4.72 (4.55) VFR631 VFR630 39 0.17 9.3 39 0.15 9.3 3 4 (B) (A) 4 2 (B) (A) 4 2 42 [40] 0.12 [0.15] 9.6 [9.4] Exhaust center 4.72 (4.55) VFR641 VFR640 38 0.14 8.9 1 3 4 150 or less Pressure center 38 [20] 0.10 [0.44] 8.7 [5.7] 9.3 150 or less 4.72 (4.55) VFR651 VFR650 3 4 1 40 0.16 (EA)(P)(EB) 5 1 3 (EA) (P) (EB) 5 1 3 Pressure center Model Port size Type

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1 8 M5 x 0.8 M6 x 1 M8 x 1.25 Rc M6 x 1 M8 x 1 M6 x 1 M8 x 1 4 6 8 10 13 16 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 1 8 M6 x 1 M8 x 1.25 Rc 1 8 13-11-2 3 Series ZPT Vacuum Pad: Vertical Vacuum Entry without Buffer How to Order Vacuum entry port Pad dia.

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Station 6 Station 12 Station 18 Station 24 CP Station 7 Station 13 Station 19 S (For P, J kit) VVQZ2000 SSQ1000 4 B P 1 150 For station 1 kit