0.4

) P kit Flat ribbon cable connector (26P) J/G kit T kit Terminal block (VQ1000, 24 terminals) T kit Terminal block (VQ2000) M kit Stations L kit (VQ1000/2000): 3.

SQ1000/2000

plate assembly u F kit L kit T kit S kit P (J) kit q !

CS1

Wiper ring Piston seal Valve seal Tube gasket Holder gasket Rod seal 125 CS1-125A-PS SDR-36 P115 P7 C120 G55 P36 140 CS1-140A-PS SDR-36 P130 P7 C135 G55 P36 160 CS1-160A-PS SDR-40 P150 P7 C155 G55 P40 180 CS1-180A-PS SDR-45 P165 P7 C175 G65 P45 200 CS1-200A-PS SDR-50 P185 P7 C195 G65 P50A 250 CS1-250A-PS CS160-1618-G4 SDR-60 P235 P7 G80 P60 300 CS1-300A-PS CS160-1618-G5 SDR-70 P285 P7 G90

MXQ

Contents Contents Contents Kit no. 6 8 12 16 20 25 8 12 16 20 25 6 8 12 16 20 25 MXQ6-PS MXQ8-PS MXQ12-PS MXQ16-PS MXQ20-PS MXQ25-PS MXQ6P-PS MXQ8P-PS MXQ12P-PS MXQ16P-PS MXQ20P-PS MXQ25P-PS MXQ8R-PS MXQ12R-PS MXQ16R-PS MXQ20R-PS MXQ25R-PS Set of nos. above !8 to @0, $1 to $4 Set of nos. above Set of nos. above !8 to @0 !8 to @0 #3 to #6 Set of nos. above !

MXS

Contents Contents Contents 6 8 12 16 20 25 8 12 16 20 25 6 8 12 16 20 25 MXS6-PS MXS8-PS MXS12-PS MXS16-PS MXS20-PS MXS25-PS MXS8R-PS MXS12R-PS MXS16R-PS MXS20R-PS MXS25R-PS MXS6P-PS MXS8P-PS MXS12P-PS MXS16P-PS MXS20P-PS MXS25P-PS 1 set including !7 to !9 & #2 to #5 1 set including !7 to !9 & $1 to $3 1 set including !7 to !

Bernoulli Gripper

4 e r t y u q With stoppers i u w 30 40 Basic type With vibration suppression cover: Resin u t y r u q With stoppers i !0 w e 40, 60 20, 30, 40, 60, 80 Basic type With vibration suppression cover: Stainless steel q u t y r With stoppers o i w e u !0 !1 9 Bernoulli Gripper ZNC Series 80 Basic type e !2 q u t y With stoppers o i r w e Component Parts No.

Vacuum System Peripherals:

(VJA314) K4 Vacuum switch unit/Filter unit For general purpose Vacuum switch, Filter E Vacuum switch (For general purpose) PS PB F Air operated (ZX1A) K5 Adsorption confirmation Filter only E N.C. (VJ114) With suction filter Air operated N.O. (VJA324) K7 N.C.

CHKD/CHKG

2 u t e w 32 to 100 Without auto switch e 20 to 25 Parts List Replacement Parts/Seal kit Material Seal kit no. Content Description Bore size (mm) No. Note 20 Aluminum alloy 1 CHKG20-PS Black anodized Rod cover 25 Aluminum alloy 2 CHKG25-PS Black anodized Head cover 32 Aluminum alloy 3 CHKG32-PS Hard anodized Cylinder tube 40 CHKG40-PS 20, 25 Stainless steel Nos. u, !1, !2, !3 and !

Compact Cylinder with Air Cushion

Bore size (mm) Applicable switch Reed switch Solid state switch Bore size 20 25 32 40 50 63 80 100 Series Contents Order number RQB20-PS RQB25-PS RQB32-PS RQB40-PS RQB50-PS RQB63-PS RQB80-PS RQB100-PS Bracket no.

RQ

Note RQB20-PS RQB25-PS RQB32-PS RQB40-PS RQB50-PS RQB63-PS RQB80-PS RQB100-PS D-F7, J79 D-F7V D-J79C D-F7W, J79W D-F7WV D-F7BAL D-F7BAVL D-F79F D-F7NTL Kits consist of piston seal, rod seal and gasket RQ Switch mounting screw (M3 x 0.5 x 10l) Switch spacer Switch mounting nut D-A7, A80 D-A73C, A80C D-A7H, A80H D-A79W 32, 40, 50, 63, 80, 100 BQ-2 CUJ CU [Stainless steel mounting screw kit]

Soft Start-up Valve

And then, the air pressure whose flow rate is adjusted by the needle t flows to port 2 (A). q r w Low speed air supply PS > PA t e Initial Operation Return Stroke Description of cylinder actuation B Cylinder movement with fixed orifice Pressure, Stroke The meter-in control of the needle t slowly moves the cylinder from A to B.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Bore size (mm) MXP10-PS 10 MXP12-PS 12 2 pieces of no. !

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

6 Nickel plated 40 to 100 Chromated Nickel plated * * * * * Nickel plated Painted black Tufftride Replacement Part: Seal Kits Bore size (mm) Contents Kit No. 32 40 50 63 80 100 MBB32-PS MBB40-PS MBB50-PS MBB63-PS MBB80-PS MBB100-PS Set of the No. @9, #0, #1, #2 and #3. * The seal kit includes 2 cushion seals, 1 rod seal, 1 piston seal, and 2 tube gaskets. 1.7-33 Series MBB Basic/(B) Locking

CNG

t t t B1 H1 Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Applicable bore size (mm) Part no.

ZSE30A(F)/ISE30A

Pressure Momentary change Set-value P-1 H-1 t (ms) t (ms) Time Switch output operation in normal conditions ON OFF Time Switch output operation when anti-chattering function is on. ON OFF Time J Power-saving mode (F7) Power-saving mode can be selected. It shifts to the power-saving mode without button operation for 30 seconds.

CNG

t t t B1 H1 (mm) (mm) (mm) Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Snap ring Snap ring t m Part No.

Cylinder with Lock Series CNG

t t t B1 H1 (mm) (mm) (mm) Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Snap ring Snap ring t m Part No.

MHF2

Description Contents MHF2-16D2 MHF2-16D1 MHF2-16D 20, 21, 22 MHF16-PS MHF16-PS MHF16-PS Seal kit 3, 4, 5, 6, 14, 16,19 Mounting screw MHF-A1602-2 MHF-A1602-1 MHF-A1602 Finger assembly Kit No.

Compact Cylinder Series NCQ8

1 r t !2 !

51

CG3N20-PS CG3N25-PS CG3N32-PS CG3N40-PS 20 25 32 40 1 2 3 4 5 6 7 8 9 10 11 12 Hard anodized Hard anodized Chromated Hard chrome plated Set of the nos. !0, !1, !2 Bearing alloy Resin Resin Resin Carbon steel NBR NBR NBR Note) Refer to the following for disassembly/ replacement. Order with a part number for each type and bore size. The seal kit includes a grease pack (10 g).