Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

E (J) of the load.

Electric Actuator / Low profile slider type

( (L Li in ne ea ar r g gu ui id de e ( (L Li in ne ea ar r g gu ui id de e s si in ng gl le e a ax xi is s t ty yp pe e) ) d do ou ub bl le e a ax xi is s t ty yp pe e) ) LECP Series This manual describes the actuators operation in combination with the LECP6 series controllers.

3 Port Solenoid Valve Metal Seal Series VZ200 1

port size) Built-in One-touch fittings Applicable tubing O.D. 8 C8 Applicable valve model Piping P, E port Port size Symbol VV3Z4-S50: only C6 & C8.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

D TG R E FB UF TF TG MF * Supplied with 4 mounting screws.

Dual Rod Cylinder Series CXSJ/CXS

2 e @1 q @7 @5 @8 CXSL10 CXSL15 @0!5 @9@3@4r!8w!9!3 i!0 @2ut!6 @0 !5 @9 @4 r w !8 !9 !3 i !0 @2 u t !6 !4ye!1!2 q @1 !4 y e !1 !2 @3 @1 q CXSL20 to 32 @0 !5!6@3@4r!8w!7o i!0u@2t !4 y e !1 !2 q @1 Component Parts: Standard Piping Component Parts No.

Cylinder with Lock

C DH7 E EN 0 0.1 ER (Max.)

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

) E L E C T R I C A L E N T R Y O P T I O N S None Z With Indicator Light and Surge Voltage Suppressor F Through Base H O W T O O R D E R M A N I F O L D S E E I N S I D E F R O N T C O V E R F O R FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT, REQUEST CATALOG REFERENCE N233 DETAILS OF YOUR LOCAL SALES OFFICE 2.74 SOLENOID VALVES SERIES NVFS H O W T O O R D E R M A N I F O L D / O P T I O

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

A B N E J B (F) T 2-U PB PA A B Pilot port threaded type With flow rate adjustment (Max.

Electric Slide Tables

7 @6 r w @9 @7 @8 e u @0 i y D A A D C-C D-D B-B !5 !1 !9 @3 #0 q @4 E C C E !4 !2 !0 !8 @1 !6 t o @2 @5 !3 Component Parts No. Description Material Note 1 2 3 4 5 6 7 8 9 No.

Made to Order

A + Stroke MGQM (Slide bearing) A, E Dimensions MGQL (Ball bushing bearing) A, E Dimensions A E A E Bore size (mm) Bore size (mm) 11 to 99 st 0 11 to 39 st 4 11 to 99 st 11 to 39 st 55 41 to 99 st 16 41 to 99 st 12 16 39 12 16 43 43 49 0 6 65 22 A E A E Bore size (mm) Bore size (mm) 21 to 74 st 0 21 to 39 st 10 21 to 74 st 61.5 21 to 39 st 74 76 to 199 st 14.5 41 to 199 st 27 76 to 199 st

5 Port Air Operated Valve Series SYA3000/5000/7000 1

E Symbol Type Stations A and B port sizes are same as port sizes in standard body size.

LJ1H

Nil W Power supply voltage A B E 10mm 25mm 40mm Standard motor 100/115VAC (50/60Hz) 200/230VAC (50/60Hz) Without motor Non-standard motor 1 2 0 100/110VAC (50/60Hz) 200/220VAC (50/60Hz) Cable entry direction: Axial Table Lead screw/Lead/Stroke combinations Lead screw type Stroke (mm) Model 400 Refer to Table below. 200 300 500 600 800 1000 1200 1500 P N S Ground ball screw Rolled ball screw

CL

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Membrane Air Dryer

QW Edition E Safety Instructions Be sure to read Handling Precautions for SMC Products (M-E03-3) before using.

CP95

80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 Intermediate strokes are available.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Determination of load's kinetic energy (E) bore size E > Es E Es Determination of bore size Review of larger bore size E = m E 2 a ( ) 2 = (Refer to page 8-16-8.) 1000 P Ps P > Ps Determination of pressure for intermediate stop (p) (Refer to page 8-16-8.)

Series IDG

0 100 200 300 400 500 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG60H IDG75H 0 P1 = 0.3MPa P1 = 0.3MPa 0 Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C 10 10 P1 = 0.5MPa P1 = 0.5MPa P1 = 0.7MPa 20 20 P1 = 0.7MPa 30 30 40 40 50 0 200 400 600 800 50 0 200 400 600 1000 800 Outlet air flow rate l/min (ANR) Outlet air flow rate

48

How to Order LEL 25 100 M T 1 1 6N q w e r t y !

VP300/500/700

Common exhaust: VV3P7-41Stations 1-04 (G) (E) (T) (D, Y) N.C.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

Basic style: CG1YB GA GB 2-P (Port size) (Rc, NPT, G) 2-TC Section TA/TB Width across flats B1 H1 MM 0 -0.05 I 0 -0.05 TD E D E AL A TA TB 4-TC K F F H TE TF TG NA S + Stroke ZZ + Stroke KA C 0.1 8-J NA Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Section TA/TB