V100

Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT325 VT325V (Vacuum spec. type) VT325 VT325V (Vacuum spec. type) 0.55 kg (For AC) 0.60 kg (For DC) Note) Values for a single valve unit.

CM2

D-G39A D-K39A D-A44A D-H7lW D-H7BAL D-H7lF D-C73C D-C80C D-B5 D-B6 D-H7l D-H7C D-B59W D-G5NTL Bore 20 25 32 40 A B 5(3) 5(3) 6(4) 11 A 6(4) 6(4) 7(5) 12 B 0(0) 0(0) 0.5(0) 5.5 A 0.5(0) 0.5(0) 1.5(0) 6.5 B 3(1) 3(1) 4(2) 9 A 4(2) 4(2) 5(3) 10 Hs 69.5 72 75.5 79.5 B 6(4) 6(4) 7(5) 12 Hs 60 62.5 66 70 A 7(5) 7(5) 8(6) 13 Hs 25 27.5 31 35 B 0(0) 0(0) 1(0) 6 Hs 22.5 25 28.5 32.5 A 1(0) 1(0) 2

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

MGZ Floating Joint MGT Center of sphere M M U U D H G B F P C E R A (mm) DMax. operating tension and compression N Center of sphere R Model Max. screw-in depth P Allowable eccentricity U M A Applicable bore size Mass (kg) B C D E F G H Nominal size Pitch Compression Tension -X JB40-8-125 JB63-10-150 JB80-16-200 JB100-20-250 JB140-22-250 20, 25 32 40 50, 63 80 8 10 16 20 22 1.25 1.5 2 2.5

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Parts (b) Lever Description Note C4: A, B port One-touch fitting for 4 C6: A, B port One-touch fitting for 6 No.

Compact Manifold Regulator Series ARM5

Description No. 2 Common IN Individual IN Common IN Individual IN Bonnet Polyacetal Regulator NARM2500-A-N02 NARM2500-B-N02 NARM3000-A-N03 NARM3000-B-N03 9 Regulator 1 Component Parts 10 End plate R 1 No.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Floating Joint Center of sphere M M U U D H G B F P C E R A (mm) Max. operating tension and compression N Center of sphere R Model Max. screw-in depth P Allowable eccentricity U M A Applicable bore size Weight (kg) B C D E F G H Nominal size Pitch Compression Tension JB40-8-125 JB63-10-150 JB80-16-200 JB100-20-250 JB140-22-250 20, 25 32 40 50, 63 80 8 10 16 20 22 29 35.5 47.5 59 71.5 1.25

Guide Cylinder/Compact Type Series MGC

$9 $5 %4 CLG1 A' B' CL1 MLGC %2 Ball bushing bearing Front mounting flange View B-B' CNG #5 e #7 r #8 !

Refrigerated Air Dryers Series IDF/IDU

Note Note 1) Value when cooling water inlet temperature is 32C and with rated load Note 2) Calculated at 1 RT = 3,300 kcal/h IDF-S0302 230 VAC IDU3E to 37E-23 IDU55E, 75E-23 IDF-S0198 (mm) Dimensions A B C D E Model IDF120D IDF150D 180 250 160 90 225 IDF190D IDF240D 180 250 160 48 273 IDF120D to 240D B Cooling water outlet A Condensation pressure gauge Cooling water inlet E D C Drain plug

ITV

VEF VEP VER VEA VY1 VBA VBAT AP100 833-1 B RoHS Series ITV1000/2000/3000 Made to Order Specifications 4 Please contact SMC for detailed dimensions, specifications, and lead times.

Table of Contents

A B 2-P C L L C A B A B LVA10 2-F B B K LVA60 LVA20 With flow rate adjustment With indicator (Max.

5

D-K39 D-K39C D-A5m D-A6m D-A3m D-A3mC D-A44 D-A44C Auto switch model D-G5m D-K59 D-G5NT D-G5mW D-K59W D-G5BA D-G59F D-F5m D-J59 D-F59F D-F5mW D-J59W D-F5BA D-M9m D-M9mV D-M9mW D-M9mWV D-M9mA D-M9mAV D-B5m D-B64 D-A9m D-A9mV D-A59W D-F5NT D-P3DWA D-P4DW Bore size A B A B A B A B A B A B A B A B A B A B A B 40 9 9 5 5 2.5 2.5 4.5 4.5 2 2 5.5 5.5 3 3 10.5 10.5 0 0 1 1 0 0 50 9.5 8.5 5.5 4.5

MNB

D-Y7BAL D-A3 D-A44 D-G39 D-K39 D-A5 D-A6 D-A59W D-F5NTL D-P5DWL Bore size (mm) A B A B A B A B A B A B A B 32 1 3.5 1.5 4 0 0.5 9.5 12 4.5 7 2 4.5 0 0.5 CL 40 1 3.5 1.5 4 0 0.5 9.5 12 4.5 7 2 4.5 0 0.5 50 1.5 4 2 4.5 0 1 10 12.5 5 7.5 2.5 5 0 1 CL1 63 1.5 4 2 4.5 0 1 10 12.5 5 7.5 2.5 5 0 1 80 5.5 7 6 7.5 2.5 4 14 15.5 9 10.5 6.5 8 2.5 4 MLGC 100 5.5 7 6 7.5 2.5 4 14 15.5 9 10.5 6.5 8 2.5

MNB

Series MNB Cylinder with Lock Double Acting, Single Rod Proper Auto Switch Mounting Position D-F5W D-J59W D-F5 D-J5 D-F5BAL D-F59F D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W, D-Y7WV D-Y7BAL D-A3 D-A44 D-G39 D-K39 D-A5 D-A6 D-A59W D-F5NTL D-P5DWL Bore size (mm) A B A B A B A B A B A B A B 32 1 3.5 1.5 4 0 0.5 9.5 12 4.5 7 2 4.5 0 0.5 CL 40 1 3.5 1.5 4 0 0.5 9.5 12 4.5 7 2 4.5 0 0.5 50 1.5 4 2 4.5

25

[mm] Ionizer front back direction [mm] 150 100 50 0 50 100 150 150 100 50 0 50 100 150 250 200 150 100 50 0 50 100 150 200 250 0 0 50 50 100 100 1 s 0.5 s 150 150 0.5 s 200 200 2 s 1 s 2 s 250 250 5 s 5 s 300 300 3) With energy saving type de-ionizing cartridge, Supply pressure: 0.3 MPa Installation distance in height from ionizer to workpiece (Charged object location) [mm] Installation

Electric Actuators

B-1 A-1 B-2 A-2 B-3 A-3 Signal Cable color S Brown Red Orange Y ellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

Adsorption Plate

Particle diameter Adsorption surface size A B C Standard (0.3) 1 2 3 4 5 6 50 x 50 mm 100 x 100 mm 150 x 150 mm 200 x 200 mm 250 x 250 mm 300 x 300 mm 0.2 0.4 When particle diameter and port position are both standard, neither of them are specified.

7ND9071en

7 Actuator Total Travel 250 [>=0] 4 Max.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Lx = 400 mm, Ly = 250 mm, Lz = 1500 mm 4.

Refrigerated Air Dryers

(17) B Contact capacity: Operating signal 220 VAC, 6 A Error signal 250 VAC, 7 A Refrigerant R407C (HFC) IDF F Dimensions [mm] Minimum current value: 20 V, 5 mA (AC/DC) for operating and error signals Model A B IDF4E, 6E, 8E, 11E 32 230 IDF15E1 43 258 IDU3E, 4E, 6E 32 230 IDU8E, 11E 42 230 IDU15E1 43 258 [mm] Dimensions Model A B C D IDF22E, 37E 25 46 135 81 IDF55E, 75E 50 36 207 IDU22E

Digital Flow Switch (Integrated display type) ( compatible)

A to B C to D 4 L 0.50 to 4.00 0.35 to 5.50 125 to 1000 0 to 1375 16 L 2.0 to 16.0 1.7 to 22.0 125 to 1000 0 to 1375 L/min 40 L 5.0 to 40.0 3.5 to 55.0 125 to 1000 0 to 1375 100 L 10 to 100 7 to 140 100 to 1000 0 to 1400 250 L 50 to 250 20 to 350 200 to 1000 0 to 1400 PF3W7 4 L 0.13 to 1.06 0.09 to 1.54 125 to 1000 0 to 1372 16 L 0.53 to 4.23 0.45 to 5.81 125 to 1000 0 to 1374 G/min 40 L