Modular F.R.L. Unit

4 3/8 1/2 1/4 3/8 1/2 3/4 1/4 1/4 3/4 1/8 Port size Port size 3/4 1 3/4 1 1 3/8 3/8 1 1/4 How to Order How to Order AF 30 B X430 03 AF 30 B X425 03 Body size Body size For high pressure 20 30 40 50 60 For high/low temperature 30 40 50 60 3/8 1/2 3/4 1 1/8 3/8 1/2 3/4 1 X430 X440 Low temperature High temperature Option Option Description With bracket Symbol Nil B Symbol Nil B Description

MB

D-K39 D-A5 D-A6 D-A59W D-F5NTL D-P5DWL Bore size (mm) A A B A B A A A A B B B B B 32 12 7 4.5 0 0.5 3.5 4 0.5 9.5 4.5 2 1 1.5 0 CJ1 40 12 7 4.5 0 0.5 3.5 4 0.5 9.5 4.5 2 1 1.5 0 50 12.5 7.5 5 0 1 4 4.5 1 10 5 2.5 1.5 2 0 CJP 63 12.5 7.5 5 0 1 4 4.5 1 10 5 2.5 1.5 2 0 80 15.5 10.5 8 2.5 4 7 7.5 4 14 9 6.5 5.5 6 2.5 CJ2 100 15.5 10.5 8 2.5 4 7 7.5 4 14 9 6.5 5.5 6 2.5 125 17.5 12.5 10 6 6

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

B port D B C G1 U G2 U If B port of Body (B) is machined, the port is plugged with Rc 1/8.

Stopper Cylinder

D Lever type models Caution RS (D) 32/40/50-L RS (D) 32/40/50-B RS (D) 32/40/50-C RS (D) 32/40/50-D RS (D) 32/40/50-E Mounting base 1. Do not allow a pallet to collide with the cylinder when the lever is upright.

Secondary Batteries

Bracket*1 Symbol 37B 75B 37 kW 75 kW Nil B *1 Bracket is included, (but not assembled).

Process Valve Series VNA

A: Non-locking push type A (projecting) 1 2 4 2 200 VAC 50/60 Hz 1 100 VAC 50/60 Hz Symbol N.C. 0.5 MPa N.O. 1 MPa N.C. 1 MPa Note 2)3 110 VAC 50/60 Hz Valve size 1 1 6A 8A 10A 10A 15A 20A 25A 32A 1 8 1 4 3 8 3 8 1 2 3 4 Note 2)4 220 VAC 50/60 Hz 7 5 24 VDC B: Slotted locking type B (tool required) Note 2)6 12 VDC Note 2)7 240 VAC 50/60 Hz 15 (11) 2 Note 2)9 Other 20 (14) 3 Note 1) Electrical

Cylinder with Lock

P 1000 1000 80 80 100 100 63 63 50 50 40 40 80 80 100 100 63 63 50 50 40 40 100 100 32 32 Load mass m [kg] Load mass m [kg] 50 50 32 32 10 10 1 100 500 1000 1 100 500 1000 400 300 200 400 300 200 Maximum speed V [mm/s] Maximum speed V [mm/s] 6 Cylinder with Lock Double Acting, Single Rod 32, 40, 50, 63, 80, 100 MWB Series RoHS How to Order 50 B 40 MWB With auto switch MDWB M9BW B 40 50

JXCx-OMT0023

FUNCTIONS AND CONFIGURATION Dver LECSAS1 S3 S4 S1 S3 Item Max. input pulse frequency 1Mpps (for differential receiver), 200kpps (for open collector) Command pulse multiplying factor (electronic gear) Electronic gear A/B, A: 1 to 65535, B: 1 to 65535, 1/50 A/B 500 Position control mode In-position range setting 0 to 65535pulse (command pulse unit) Error excessive 3 rotations Torque limit Parameter

V

Eg: AK2000-01 Ambient & Fluid Temperature 5 ~ 60C / 41 ~ 140F *S (mm2 ) is Effective Orifice Figure given for A-R Direction (Exhaust Flow) Port Size A B C Model 3/8, 1/4 50 25 22 (N)AK2001-N01, 02 1/4, 3/4, 1/2 67 36 36 (N)AK4000-N02, 03, 04 3/4, 1 95 50 50 (N)AK6000-N06, 10 QUICK EXHAUST VALVE SERIES (N)AQ S Y M B O L S High Exhaust Characteristics Port Sizes from M5 ~ 34 PT, NPT High Flow

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

size C4 (4 Onetouch fitting) C4 (4 One-touch fitting) A, B port C6 (6 One-touch fitting) M5 x 0.8 Flow Rate Characteristics Flow rate characteristics Port size 1 4/2 (P A/B) 4/2 5/3 (A/B R) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port M5 x 0.8 C4 C6 M5 x 0.8 M5 x 0.8 1/8 C6 C4 1/8 1/8 1/8 1/8 1/8 1/4 1/4 1/8 0.46 0.62 0.79 0.55 0.59 0.74 0.71 0.55

CNA

1 o q %0 y $3 r #3 #1 $1 #6 B A @3 !4 %2 !3 $0 @8 #7 $2 w #0 $7 $9 $5 %1 %3 $6 @1 @4 !8 @0 !7 !9 @2 @6 $4 A section B section (Release piston bushing) (Piston guide bushing) 100 80 63 50 40 50, 63, 80, 100 @9 !2 !2 Description Material Note Component Parts Description Material Note No. No.

CNA

1 o q %0 y $3 r #3 #1 $1 #6 B A @3 !4 %2 !3 $0 @8 #7 $2 w #0 $7 $9 $5 %1 %3 $6 @1 @4 !8 @0 !7 !9 @2 @6 $4 A section B section Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (Release piston bushing) (Piston guide bushing) 100 80 63 50 40 50, 63, 80, 100 @9 !2 !

MGG

Parts changed to stainless steel Symbol Part number Note Bore size (mm) 20, 25, 32, 40, 50 !9 is type L only. r!1!6!7!8!9@0@1@2@3@6@9#0#1#3#4#5#6#7 -XC6A 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. r!0!5!6!7!8!9@0@1@3@4@7@8@9#1#2#3#4#5#9$0 20, 25, 32, 40, 50 #1 is rod side only. r!1!7@0@1@2@3#1#5 -XC6B 63, 80, 100 @9 is rod side only. r!0!5!8!

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 b C H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part no.

Base Mounted Metal Seal/Rubber Seal Series VQ

SI unit output no. 0 1 2 3 4 5 6 7 8 9 SI unit output no. 0 1 2 3 4 5 6 7 A B A A B B Unused A Unused A A B A B B A A A VQC Double Double Double Double Double SI Unit SI Unit Single Single Single Single Single SQ Stations 1 2 3 4 5 Stations 1 2 3 4 5 Single/Double Mixed Wiring (Option) Double wiring (Standard) VQ0 Type SC OMRON Corporation SYSBUS Wire System Type SD SHARP Corporation Satellite

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

B Stroke B-A Stroke B operation 1) Initial state (0 stroke position) Stroke B Stroke A C 2) Operation When the air pressure is supplied from the C port, the rod operates the stroke B. B B A Stroke B A C Stroke B Stroke A Double output is possible.

CL

45 50 B1 13 17 17 22 BZ GB 8 8 8 11 GQ 4 7 7 8 B 40 47 47 54 D 8 10 12 14 H2 8 8 8 10 GD 55 GL 6 9 9 11 B2 26 32 32 41 GA GR 4 7 7 7 H1 5 6 6 8 20 25 32 40 1/8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 63.5 73.5 to 400 to 450 to 450 to 500 CXS 64.5 74.5 83.5 64.5 70 74.5 80 83.5 CXT 100.5 90.5 (mm) MX Bore 20 25 32 40 K 5 5.5 5.5 7 LC 4 4 4 4 LD 6.8 6.8 6.8 7 NA 24 30 NN P 1/8 1/8 1/8 1/4 LS 167 177 179

ZP

(mm) ZP40HN ZP50HN ZP63HN ZP80HN ZP100HN ZP125HN 40 50 63 80 100 125 27 15 1 1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 Misc.

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W F R L T B None Axial Right Left Top Bottom 100/115VAC (50/60Hz) G 1 N.C. (B contact) 2 pcs.

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.