Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

8 1/8 1/8 1/4 P A 20 25 32 40 AL 18 22 22 24 D 15.5 19.5 19.5 21 C2 34 40 40 52 FD 30 37 37 47.3 E 8 10 12 14 GC 13 13 13 16 FT 7 7 7 7 KA FL 10.5 10.5 10.5 13.5 FX 4 4 4 5 FY 60 60 60 66 FZ 36 Z 75 75 75 82 GA 8 8 8 11 GB 6 8 10 12 I 6 6 6 6 K 28 33.5 37.5 46.5 MM 5 5.5 5.5 7 NN 24 30 34.5 42.5 NA WA 31 31 31 36 Bore size 0 200.033 0 260.033 0 260.033 0 320.039 41 45 45 50 37 41 41 45 13

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

D-F59F D-F5NTL Same side 10 125 125 130 140 150 160 1 pc. 10 D-B5/B6 D-G5/K59 D-G5W/K59W D-G59F D-G5BAL/G5NTL Different sides 15 2 pcs. Same side 75 110 110 115 125 135 145 1 pc. 10 Different sides 20 2 pcs. D-B59W Same side 75 115 115 115 130 140 150 1 pc. 15 Different sides 35 80 80 95 2 pcs.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

G 3/8 16 M10 x 1.5 10 M20 x 1.5 22 38.4 17 128 4 11.5 6 46 300 99 72 30 86 100 Up to 1000 40 55 25 G 1/2 18 M10 x 1.5 10 M20 x 1.5 22 42.9 17 138 4 17 10 51 320 118 89 32 91 Bore size [mm] e d f l h 1 to 50 901 to 1000 32 36 54 23 12.5 25 37.5 50 75 100 125 150 175 200 225 250 75 88 100 113 138 163 188 213 238 263 288 313 40 36 54 23 12.5 25 37.5 50 75 100 125 150 175 200 225 250 75

Air Cylinder Series MB

2 38 M27 X 2.0 13 M12 X 1.75 6 20 19 27 60 32 110 136 54 46 52 65 75 95 114 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 13 14 15.5 16.5 19 19 47 51 58 58 72 72 16 16 16 16 16 16 4 4 5 5 5 5 M6 X 1 M6 X 1 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 6 6 7 7 10 10 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 27 27 31.5 31.5 38 38 1/8 1/4 1/4 3/8

Cylinder with Lock Series CLS

FA GAGB H P N K KA M J MM GC BD BG BE MB MA 125 140 160 180 200 250 19 31 50 47 145 75 18 110 136 1/4 115 36 90 59 43 14 16 107 58 110 M14 x 1.5 15 M30 x 1.5 35 1/2 25 to 1000 3 19 47 78 14 15 31 35 50 161 18 30 110 146 1/4 128 36 90 59 43 16 114 64 110 M14 x 1.5 M30 x 1.5 1/2 30 to 1000 5 17 36 22 53 95 46 14 39 56 182 23 132 169 1/4 144 40 90 59 43 18.5 130 74 120 M16 x 1.5 M36 x 1.5 3/

CXWM/CXWL

Bore size/Stroke (mm) Data 10 25, 50, 75, 100 16 25, 50, 75, 100, 125, 150, 175, 200 End lock 20 25, 50, 75, 100, 125, 150, 175, 200 25 25, 50, 75, 100, 125, 150, 175, 200 R End lock 32 (25), 50, 75, 100, 125, 150, 175, 200 Nil None Note 1) For (25) stroke, the shock absorber is mounted on a single side of the plate.

SMC

Extension end 8 10, 20, 30, 40, 50, 75 Rubber stopper Retraction end Both ends 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Standard type Nil PNote 1) Axial piping type Note 1) The combination of axial piping type and both ends adjusters or retraction end adjusteris not

CNA

16 (n-4) 1 10+55 2 n=4, 8, 12, 16 (n-4) 120+55 2 n=4, 8, 12, 16 10 75 80 90 D-A59W With 1 n (Same) Different mounting 35 55 75 75 80 80 90 90 With 2 With n 15 90 100 110 120 With 1 With 2 (Different and same) With 1 Same side D-F5lW D-J59W D-F5BA D-F5lF D-F5NTL Different mounting n=2, 3, 4, 35+30(n-2) n=2, 4, 6, 8, 75+30(n-2) n=2, 4, 6, 8, 80+30(n-2) n=2, 4, 6, 8, 90+30(n-2) 25 110 120

7

Description Material Qty Note 18 19 20 21 22 23 24 25 26 27 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 Rod cover Tube cover Piston Piston rod Bushing Cushion valve Speed controller valve Clevis bushing Coil scraper Rod seal Piston seal Tube gasket Magnet holder Magnet Switch mounting rod Chromated Hard anodized Chromated 1 1 1 1 1 1 1 2 1 1 1 1 1 1 2 2 4 1 2 2 1 1 1 1 2 Phosphor bronze NBR

Table of Contents

16.5 25.5 90 87 115 10 11 M6 x 1.0 M14 x 1.5 Rc 1/8 7 40 70 100 42 73 16.5 25.5 0.5 1 90 97 115 12 11.5 M8 x 1.25 M20 x 1.5 Rc 1/8 8.7 40 75 122 50 91 18.5 28.5 0.5 1 110 119 138 12 10.5 M8 x 1.25 M20 x 1.5 Rc 1/4 8.7 65 105 145 64 99 20.5 35.5 1 1 120 142 155 PA dimensions are for split from center.

MQQ

W Mounting orientation: Horizontal Operating pressure: 0.5MPa Allowable Lateral Load at Rod End Standard type: MQQTB Lateral load resisting type: MQQLB/Built-in ball bushing 60 5 50 Maximum allowable lateral load W(N) Maximum allowable lateral load W(N) 4 28 40 3 28 25 30 25 2 20 20 20 16 16 1 10 10 10 30 60 75 100 30 60 75 100 Stroke (mm) Stroke (mm) Note 1) The indicated allowable lateral

CLS

0 i o @1 @0 @3 y u !1#1 @9 #4^2^7^5^1 ^3 ^6 ^4 8%2 %3 %4 %6 q !9 w %7 $1 $2 $3 $6 $8 $9 $0 #3 #0 @5 #2 $5 $4 %0 %1 t y !2 !1 !3 CL u !4 !6 CL1 !7 !5 MLGC CNG e ^0 ^2 !

ITV

ARJ 0.5 0.5 Return AR425 to 935 0 0 ARX Out 0.5 0.5 AMR ARM 1 2 3 4 1 0 25 50 75 1 100 5 Input signal (%F.S.)

CQM

1 !2 !3 !4 !5 !6 !

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

x 1 thread depth 10 41 +0.030 0 5H9 ( ) depth 4 30 M 0.5 37.5 40 Z ZZ (NN 1) x H G 10.5 24 10.5 24 H B A 10.5 10.5 5.1 9.5 26 1 5H9 ( ) depth 4 +0.030 0 6 NN x M6 x 1 thread depth 12 B A 5H9 ( ) depth 4 +0.030 0 Section AA Section BB GA HA (mm) ZZ 107 107 107 117 132 182 230 280 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118

Guide Cylinder/Compact Type Series MGC

AE W View A-A' Standard Stroke (mm) A AA AB AC AD AE AF AP B BP Note 3) BZ C D E F G GC Bore size (mm) 20 25 32 40 Stroke range (mm) 75, 100, 125, 150, 200 94 12 13 16.5 70 35 M6 x 1 depth 12 32 135 1/8 73.5 26.5 50 118 6.8 11 depth 8 28 104 16 16 19 75 40 37 160 1/8 86.5 31.5 50 140 8.6 14 depth 10 29 M8 x 1.25 depth 16 75, 100, 125 150, 200, 250 300 104 16 16 19 75 40 37 160 1/8 86.5 31.5

Aluminum High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

ZP

1 8 M5 x 0.8 M6 x 1 M8 x 1.25 Rc M6 x 1 M8 x 1 M6 x 1 M8 x 1 4 6 8 10 13 16 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 1 8 M6 x 1 M8 x 1.25 Rc 1 8 13-11-2 3 Series ZPT Vacuum Pad: Vertical Vacuum Entry without Buffer How to Order Vacuum entry port Pad dia.

ZPT/ZPX

ZPX40HBNJ25-B01-A18 50-B01-A18 75-B01-A18 ZPX50HBNJ25-B01-A18 50-B01-A18 75-B01-A18 ZPX63HBNJ25-B01-A18 50-B01-A18 75-B01-A18 ZPX80HBNJ25-B01-A18 ZPX 80HBNJ50-B01-A18 75-B01-A18 ZPX100HBNJ25-B01-A22 50-B01-A22 75-B01-A22 418 268 Misc. 40 50 63 80 100 125 0 +10 +1 1 441 289 0 +19 +1 2 684 312 0 +37 +2 3 723 284 0 +61 +2 6 767 305 100-B01-A22 ZPX125HBNJ25-B01-A22 50-B01-A22 75-B01-A22 1 +121

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Stations . 3 2 1 Blanking plate assembly Connector box mounting position D side SX3000-75-1A(-Q) Symbol Mounting position U U side D D D side SS5Y3-45-AU-05D-C6 1 set (Type 45, 5-station manifold base part no.) SX3000-75-1A 1 set (Blanking plate assembly part no.) SY3140-5LOU 2 sets (Single solenoid part no.) SY3240-5LOU 2 sets (Double solenoid part no.)