Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

SY920 --03 3 8 3 position 3 position 2.2 [2.3] 8.7 [8.3] 0.34 [0.40] 0.84 [0.84] 0.64 [0.53] 0.30 [0.27] Exhaust center Exhaust center 8.0 0.33 1.9 0.36 0.19 0.75 130 117 122 164 279 285 327 293 8.9 [3.3] 1.5 0.34 [0.40] 0.25 2.2 [0.82] 6.5 0.78 [0.71] 0.27 0.44 [0.37] 0.57 0.21 [0.18] 0.84 Pressure center Single Pressure center Single 1 8 95 119 88 91 106 111 112 153 293 296 312 318 317 360

Exhaust Cleaner for Vacuum Pump AMV Series

amount (L) AMV3-10 AMV6-14 AMV15-20 AMV37-20 AMV75-30 AMV160-40 1.6 3.0 5.9 10 43 59 0.3 0.5 1.0 1.0 10 10 360 650 1,500 3,700 7,500 16,000 1 1 1/2 2 2 80 (3B) JIS 10K FF flange 360 650 1,500 3,700 7,500 16,000 100 (4B) JIS 10K FF flange Construction Gasket Cover Element Tension bolt No Description Material Component Parts 1 2 3 4 Holder Case Cover Tension bolt Aluminum alloy Carbon steel

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) Model LA LB LC LD LE LF LH LT 200 (233) 224 (257) 235 (273.5) 274 (318) 333 (399) CVRA1L50 62 108 4.5 9 44 41 263 (301.5) 316 (360) 375 (441) CVRA1L63 76 127 5 11 55 48 CVRA1L80 92 154 6 13 67 58 CVRA1L100 112 189.5 6 13 87 73.5 ( ) are the dimensions for rotation of 180 and 190.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) Model LA LB LC LD LE LF LH LT 200 (233) 224 (257) 235 (273.5) 274 (318) 333 (399) CVRA1L50 62 108 4.5 9 44 41 263 (301.5) 316 (360) 375 (441) CVRA1L63 76 127 5 11 55 48 CVRA1L80 92 154 6 13 67 58 CVRA1L100 112 189.5 6 13 87 73.5 ( ) are the dimensions for rotation of 180 and 190.

Table of Contents

How to Mount and Move the Auto Switch. 336 337 338 339 340 341 342 343 344 344 345 346 347 348 349 350 350 351 352 353 353 354 355 356 357 358 358 359 360 360 361 361 363 363 365 365 366 366 367 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 Mechanically Jointed

The CRQ2 series is a compact rotary, rack and pinion style actuator. Single and double shaft types are available in all sizes (10~40mm). The CRQ2 uses internal cushioning and the body can be used as a flange. The use of a double piston eliminates backlash. Auto switches are available.Low profile , Both single shaft and double shaft are available in all sizes , 2 auto switches are mountable

around the stud axisBody rotates at 360 around the stud axisM5 female x M5 male

Bowls on size 30 or more are now covered with a transparent bowl guard, completely protecting them from the environment, and making the inside visible from 360 degrees. 

HRX-OM-X010

WS-F HRZ***-W1S-F HRZ***-W2S-F , Main breaker Operation display panel Ventilating fan (exhaust side) Power cable access Circulating fluid fill port Facility water outlet Ventilating hole (intake side) Sub tank drain port Emergency off [EMO] switch Facility water inlet Circulating fluid return Circulating fluid level gauge Circulating fluid supply Drain pan port Main tank drain port Rotates 360

LEKF-OMZ0035

Slider type LEKFS series 2.1 Specification AC servo motorMotor typeS*/T*) Model LEKFS25 LEKFS32 LEKFS40 Stroke [mm] 100 to 500 100 to 500 200 to 600 Horizontal 10 20 20 30 40 45 30 50 60 Work load [kg] Note1) Vertical 4 8 15 5 10 20 7 15 30 Up to 400 1500 900 450 1500 1000 500 1500 1000 500 401 to 500 1200 720 360 1500 1000 500 1500 1000 500 501 to 600 900 540 270 1200 1000 500 1500 1000

IDX-OM-W094

600mm 1 2 INOUT IN OUT O IDFA60/70/80/90 Series 6-2 IDX-OM-W094 O O O () O O 8mm5m S )DUPONT KRYTOX GPL207 IDFA60/70/80/90 Series 6-3 IDX-OM-W094 6.2 2-1 6.1 OFF OFF ON OFF ON T ON IDFA60/70/80/90 Series 6-4 IDX-OM-W094 7 7.1 IDFA60-23 IDFA70-23 IDFA80-23 IDFA90-23 oC 565 MPa 0.151.0 8) 1 () oC 24585% 3 oC 204 312 552 810 (ANR) 2 7 oC 300 408 654 900 m 3/h 10 oC 360

Membrane Air Dryer

(at 0.7 MPa inlet air pressure) for the dew point indicator. -6- 1) Single Units type Model Specifications IDG30A IDG50A IDG30HA IDG50HA IDG30LA IDG50LA Compressed Air Fluid Range of operating conditions 0.31.0 -550 -550 Inlet air pressure MPa Inlet air temperature oC Ambient temperature oC Standard performance Outlet air atmospheric pressure dew point oC Inlet air flow rate L/min(ANR) 360

IDX-OM-W028

855 IDU55E R2 470 1345 53 530 1440 360 30 500 75 700 526 IDU75E 1480 1575 70 IDU Series 6-3 External Dimentions 6 3 IDX-OM-W028 Air Dryer 6 References 6-4 Electrical Circuit IDU22E-23 IDU37E-23 GFCI For Option R GFCI For Option R L N PE L N PE TB TB THR MC1 OLP THR MC1 C01 OLP CM C01 CM MC2 ILS ILS FM2 MC1 THS EDV For Option V THP C12 EDV MC1 C11 MC2 FM1 MC2 C11 PRS FM1 P (G) EDV PE For

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

This matches the controller. (1) LEKFS32EA-300 4 - 1.2 Specification Battery-less absolute encoder type (Step motor 24VDC) Model LEKFS25 LEKFS16 LEKFS40 LEKFS32 Stroke [mm] 50 to 800 50 to 1000 50 to 500 150 to 1200 Horizontal 14 15 12 25 30 20 45 50 25 55 65 Work load [kg] *1 Vertical 2 4 0.5 7.5 15 4 10 20 2 2 23 to 400 10 to 700 5 to 360 20 to 1100 12 to 750 6 to 400 24 to 1200 16 to 800

HRX-OM-I051

W2S Main breaker Operation display panel Ventilating fan (exhaust side) Power cable access Circulating fluid fill port Facility water outlet Ventilating hole (intake side) Emergency off [EMO] switch Sub tank drain port Refrigerant pressure gauge Facility water inlet Circulating fluid return Circulating fluid level gauge Circulating fluid supply Main tank drain port Drain pan port Rotates 360

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8"1/2" 2.5, 4, 6 AS121F-M3 AS131F-M3 M3 x 0.5 6, 10, 16, 20 AS121F-M5 AS131F-M5 M5 x 0.8 6, 10, 16, 20 AS121F-U10/32 AS131F-U10/32 10-32 UNF Tube swivels 360 Universal type permits 360 piping swivel. (1) 20, 25, 32 AS221F-01 AS231F-01 R 1/8 20, 25, 32,

Flow Control Equipment

Effective area is larger than the former model. 6, 10, 16, 20 AS12l1F-M5 AS13l1F-M5 M5 X 0.8 6, 10, 16, 20 AS12l1F-U10/32 AS13l1F-U10/32 10-32UNF 20, 25, 32 AS22l1F-01 AS23l1F-01 R(PT)1/8 Tube swivels 360 20, 25, 32, 40 AS22l1F-02 AS23l1F-02 R(PT)1/4 40, 50, 63 AS32l1F-02 AS33l1F-02 R(PT)1/4 Universal style permits 360 piping swivel. 40, 50, 63 AS32l1F-03 AS33l1F-03 R(PT)3/8 63, 80, 100

MGG

700st 3 600st 2 400st 500st st: Stroke (mm) 100st 200st 300st 0 1 0 20 40 60 80 100 120 140 160 180 200 220 240 260 Allowable end load F (N) 5 Guide Cylinder Series MGG MGGM 63Stroke 7.5 7 (Slide bearing type) 6 Deflection Y (mm) 5 1100st 1000st 4 900st 3 800st 700st 2 600st 400st 500st st: Stroke (mm) 1 100st 200st 300st 0 0 20 40 60 80 100 120 140 160 180 200 220 240 260 280 300 320 340 360

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

1 3 Port Direct Operated Poppet Solenoid Valve Series VKF300 Compact yet provides a large flow capacity Various manifold piping directions V100 Output port: Manifold set-up allowing 360 rotation of 2 (A) entry direction (in 90 increments) Body width 18 mm SY Type 20 and 21 SYJ Available in vacuum applications (101.2 kPa) VK VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

VQ7-6/7-8

1/2 180.5 175.5 (3 position) Bottom ported drawing 183.5 171.5 139 14 12 P PB PA 80.5 4-1/8 67 R2 R1 40(41.5) (Pilot pressure EXH port) 1 3 5 SMC 6-1/2, 3/4 32(35) 32(35) 35 35 L Dimension Formula L n 10 9 8 7 6 5 4 3 1 2 P , R1, R2 port n: Stations L1 = 56n + 64 L2 = 56n + 80 n: Stations L1 = 56n + 90 L2 = 56n + 106 L1 624 568 512 456 400 344 288 232 120 176 1/2 L2 640 584 528 472 416 360