24

8 MGQ MGG 16 to 63 100 stroke or more 80, 100 250 stroke or more MGC MGF MGZ MGT D-X 465 MGP Series 16 to 25/MGPM, MGPL, MGPA (With Air Cushion) WA Z WB XAH9 depth 6 Section XX details T-slot dimensions b a X (Mounting hole position) XAH9 X0.02 (Pin hole position) e c d XB [mm] XA 3 Bore size [mm] a b c d e 6 16 4.4 7.4 3.7 2.5 6.7 20 5.4 8.4 4.5 2.8 7.8 25 5.4 8.4 4.5 3 8.2 Section XX 4

CJ2

Applicable bore (mm) B H C d Part no.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

Maximum manufacturable stroke [mm] 1000 Function B A D A C D C B Stroke B When air pressure is supplied to ports and , both strokes A and B retract.

NCQ8

Mounting bolt C D Mounting Bolt Size for NCQ8B056 to 250(Without Auto Switch) (Inch) Model C D Bolt size Model C D Bolt size NCQ8B056-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B075-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B106-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B150-012 025 037 050 062 075 087 100 125 150

Aluminum High Vacuum Angle Valve

(b) XLC50, 63, 80, 100, 160/ Air operated D E C E C E XLA Fn (KF flange) Fd (K flange) (a) XL XL XLQ (c) XM XY J DK XSA H B XVD A XGT G CYV A (mm) J A B C D E Note 1) Fn Fd G H K Model XLC-50 XLC-63 XLC-80 XLC-100 XLC-160 70 183 80 31 10.5 75 52 77 29 10.5 95 88 209 100 39 11 87 70 76.5 36 9 110 90 250 117 45.5 11 114 83 105 44 9 130 108 317.5 154 55 11 134 102 139 58 9 180 138 339 200 65

NCQ8

Mounting bolt C D Mounting Bolt Size for NCQ8B056 to 400-(Without Auto Switch) Model C D Bolt size order number D Bolt size order number Model C D Bolt size order number Model C NCQ8B056-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B075-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B106-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

LAT E C x 200 (= D) 20 LZ LC3F2 Note 1) Distance within which the table can move when it returns to origin.

CHKD/CHKG

Mounting bolt D C CHQ CHK CHK C Model Mounting bolt part no. C Model D D Mounting bolt part no.

NCM

1.67 2.16 B 0.42 0.52 0.56 A 1.30 1.61 2.10 B 0.37 0.46 0.50 A 1.42 1.72 2.21 B 0.48 0.58 0.61 Bore size 075 (3/4") 106 (1-1/16") Mounting Height (NCDMR and NCDMR-*C) 150 (1-1/2") (in) Auto Switch Mounting Position (NCDMR-*C) D-M9 D-M9W D-A9 D-A9V D-C73C D-C80C D-G5NTL D-B5 D-B59W D-B64 Auto switch model D-M9V D-M9WV D-H7 D-H7W D-H7BAL D-H7NF D-C7 D-C80 (in) D-M9 D-M9W D-A9 D-H7 D-H7W D-H7C

NCG/CG1

Lead wire length indication Note 1) Applicable auto switch with 5 m lead wire (Z) Reed switch: D-B53/B54, D C 7 3 ( C ) / C 8 0 C , D A 7 3 ( C ) ( H ) / A80C, D-A53/A54, D-Z73, D-90/97/90A/93A Solid state switch: Manufactured upon receipt of order as standard.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

750 _ _ 1 C 321 _ _ 0 D 692 _ _ 1 D 310 _ _ 0 E 642 _ _ 1 E 300 _ _ 0 F 600 _ _ 1 F 290 7 8 7.

Proposals for Energy Saving

Stroke Refer to the catalog "Precision Cylinder Series MTS" CAT.ES20-127 C for details. 17 &RXUWHV\RI6WHYHQ(QJLQHHULQJ,QF5\DQ:D\6RXWK6DQ)UDQFLVFR&$ *HQHUDO Free Mount Cylinder for Vacuum Air Blow Series ZCUK How to Order C 16 ZCUK D 20 Basic type C S D 16 D 20 ZC UK A90 With auto switch Built-in magnet Number of auto switches Nil 2 pcs.

Cylinder with Lock

Auto switch model Bore size [mm] 32 40 50 63 80 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-A9/A9V BMB5-032 BMB5-032 BA7-040 BA7-040 BA7-063 BA7-063 D-A3/A44 D-G39/K39 BMB2-032 BMB2-040 BMB1-050 BMB1-063 BMB1-080 BMB1-100 D-F5/J59 D-F5W/J59W D-F59F/F5BA D-F5NT D-A5/A6/A59W BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 D-P3DWA BA10-032S BA10-040S BA10-050S BA10-050S BA10-063S BA10-063S D-P4DW BMB3T-040 BMB3T

1.1 LINEAR ACTUATORS: AIR CYLINDERS SERIES NCJ2 SERIES NCJ2 BORE SIZES Ø6•10•16 Double Acting Single Rod / Double Rod Single Spring Return / Extend Compact and Lightweight Auto Switch Sensing Optional M A D E I N USA Non Rotating Piston Rod Optional High

D I M E N S I O N S ( I N C H) S TA N D A R D S I N G L E A C T I N G S P R I N G E X T E N D D O U B L E C L E V I S T Y P E NCJ2D_-_T ZZ 50 100 150 200 300 400 500 3.73 3.94 4.23 4.71 3.91 4.12 4.41 4.89 5.31 5.92 6.69 *Clevis Pin Included S Z D GA NB U Bore Size A B C CD CX MM NA R 50 100 150 200 300 400 500 50 100 150 200 300 400 500 H 0.157 0.31 0.93 0.31 10 (3/8) 0.60 0.47 0.55 0.187

Table of Contents

TAU1065 B Length per roll Color Operating temperature (C) Symbol Length Symbol Color Tubing model 20 100 20 m roll 100 m reel B Black Precautions Be sure to read before handling.

JXCx-OMT0023

repeat command end Program end 1000[r/min] 20[ms] 1000[10STMm] 100[ms] 3 [times] 100[10STMm] 100[ms] 2 [times] 200[10STMm] 100[ms] a) b) c) d) e) f) d) Incremental move command (200 10STM m) b) Incremental move command (100 10STM m) Forward rotation 0r/min Servo motor speed 1100 1200 1300 1000 1500 1700 a) c) e) f) 13 44 13.

5-Port Solenoid Valve

C C q: SY30M-56-4A w: SY50M-56-4A e: SY70M-56-4A D Individual EXH (SUP) spacer assembly D Mounting onto a manifold follows the order explained above.

Free Mount Cylinder

(g) JIS Symbol Double acting, Spring rod Stroke (mm) Model 40 50 60 70 80 90 100 43 (53) 49 (59) 50 (65) C(D)U6-D 64 (74) 72 (82) 80 (90) C(D)U10-D 92 (122) 104 (134) 116 (146) C(D)U16-D 216 (253) 238 (275) 260 (297) 282 (319) 304 (341) C(D)U20-D Made to Order Specifications (For details, refer to P.43.) 363 (422) 397 (456) 431 (490) 465 (524) 499 (558) C(D)U25-D Symbol Specifications

Cylinder with Lock

Width across flats KA 4 x J 4 x FD GB flats B1 MM E RY BF FY d D e C B V H1 AL N RT FT BN C B 10.2 f l A K M ZZ + l + Stroke h + l FZ FX S + Stroke H ZZ + Stroke (mm) Bore size (mm) Stroke range (mm) 40 50 63 80 100 A AL B B1 BF BN BP BQ C D E FD FT FV FX FY FZ GA GB GC GD GL GL1 GR H H1 Up to 800 30 27 60 22 71 96 1/8 1/8 44 16 32 9 12 60 80 42 100 85 15 50 16 12 12 10 51 8 Up to 1000 35

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(When using 10-SS5Y-60-D, block disk is assembled on D side.) sheet. (When using 10-SS5Y-60-D, block disk is assembled on D side.)