REA/REB

D-F7NV, D-F7PV, D-F7BV D-J79C D-F79W, D-F7PW, D-J79W D-F7NWV, D-F7BWV Note 1) Note 1) D-F9N, D-F9P, D-F9B Note 2) Note 2) D-Y59A, D-Y7P, D-Y59B D-Y69A, D-Y7PV, D-Y69B Note 2) Note 2) D-Y7NW, D-Y7PW, D-Y7BW D-Y7NWV, D-Y7PWV, D-Y7BWV D-F7BA D-F7NT D-F79F D-F7LF Note 1) Indicates auto switches for REAR10/15/20 and REBR15.

CV/MVGQ

16 90 + 50 (n 4) 2 n = 4, 8, 12, 16 100 + 50 (n 4) 2 n = 4, 8, 12, 16 110 + 50 (n 4) 2 Different sides D-B59W n 75 + 50 (n 2) n = 2, 3, 4 90 + 50 (n 2) n = 2, 4, 6, 8 100 + 50 (n 2) n = 2, 4, 6, 8 110 + 50 (n 2) n = 2, 4, 6, 8 Same side 15 90 100 110 35 100 100 110 100 1 Different sides 2 Same side 100 100 110 D-A3 D-G39 D-K39 35 + 30 (n 2) n = 2, 3, 4 100 + 30 (n 2) n = 2, 4, 6

CQM

Note 12 16 20 25 32 40 50 D-F7 , J79 D-F7 V D-J79C D-F7 W, J79W D-F7 WV D-F7BAL, F7BAVL D-F79F D-F7NTL D-F7, D-F7V D-J79, D-J79C D-F7W, D-F7WV D-J79W D-F7BAL, D-F7BAVL D-F7NTL, D-F79F -X Switch mounting screw (M3 x 0.5 x 10 ) Switch spacer Switch mounting nut D-A7 , A80 D-A73C, A80C D-A7 H, A80H D-A79W 6 6 6 32, 40 50 BQ-2 20Data D-F9W, D-F9WV D-F9BAL 5.5 3 4 5 5.5 5.5 5.5 Switch mounting

MLGP

There may be large variations depending on the surrounding environment (variations on the order of 30%). 12 Solid State Switches/Direct Mount Type D-Y59 /D-Y69 /D-Y7P(V) A B A B Auto Switch Specifications D-Y5, D-Y6, D-Y7P, D-Y7PV (with indicator light) D-Y7PV D-Y59B D-Y59A D-Y69A D-Y7P D-Y69B Auto switch part no.

MLGP

There may be large variations depending on the surrounding environment (variations on the order of 30%). 12 Solid State Switches/Direct Mount Type D-Y59 /D-Y69 /D-Y7P(V) A B A B Auto Switch Specifications D-Y5, D-Y6, D-Y7P, D-Y7PV (with indicator light) D-Y7PV D-Y59B D-Y59A D-Y69A D-Y7P D-Y69B Auto switch part no.

CLK1

Symbol Auto switch positioning and mounting 40 50 63 2 pcs. 1 pc. "n" pcs. Model A B Same side Same side 8 0 0 D-P7, D-P8 25 25 25 50 + 65(n-2) 50 50 D-P7, D-P8 D-P5 Approx. Hs 45 49 54.5 Approx. Ht 28 28 28 A B 3 4.5 4.5 26 27.5 27.5 D-P5 Approx. Hs 46 50 56 Approx.

Electric Actuator with Integrated Guide

D C B A 7 11 Standard Motor Series LTF6 Motor Output Rolled Ball Screw 100W 10mm/10mm lead Horizontal Mount How to Order Stroke LTF6E NH 1 R 2 Motor/switch entry direction Left entry Power supply voltage Cable length 1 2 2 3 4 5 100V/110V AC(50/60Hz) 200V/220V AC(50/60Hz) 2m 3m 4m 5m Motor/switch entry direction R L Motor straight, motor cable, switch and switch rail located on the right

V

Y P E 41 S I D E P O R T E D M A N I F O L D.

Air Cylinder Series MB

Auto Switch Mounting Height (mm) D-Z7, Z-80 D-Y59 D-Y7P D-Y7W D-F5, D-J5 D-F5F D-F5W, D-J59W D-F5BAL, D-F5NTL D-A5 D-A6 D-A59W D-A3 D-G39 D-K39 D-Y69 D-Y7PV D-Y7WV Bore size D-Y7BAL D-A44 D-P5DWL (mm) Ht Hs Ht Hs Hs Hs Hs Hs Hs Hs Ht Ht Ht Ht Ht Ht 32 24.5 35 25 32.5 25.5 77 38 67 26.5 30 23 27.5 31 27.5 23 23 40 27.5 38.5 27.5 36.5 29.5 81.5 42 71.5 30 34 26 27.5 33 27.5 26 26 50 34.5 43.5

Aluminum High Vacuum Angle Valve

Power/Voltage At the Rated Voltage Model Starting Power (W) Current (A) Power (W) Current (A) Holding G/C/D/T, P5G 1.5 36 4.8 14.8 10 4.9 2.3 5.3 20 13.5 6.7 3.0 0.38 0.35 0.27 0.11 0.10 0.5 0.46 0.36 0.15 0.12 50 Hz 60 Hz 50 Hz 60 Hz P1G 0.47 30.5 XLS-16P2G 0.24 30 G/C/D/T, P5G 2.0 47 50 Hz 60 Hz 50 Hz 60 Hz P1G 0.62 42 XLS-25P2G 45 0.35 XLA Construction/Operation XL XL Internal control

Compact Cylinder with Lock Series CLQ

Hs A Auto switch mounting height (mm) Proper auto switch mounting positions (mm) D-F9 D-F9V D-F9W D-F9WV D-A9V D-F9BAL D-F9V D-F9WV D-A9 D-A9V Bore size (mm) D-F9BAL Bore size (mm) Hs Hs Hs 20 22 22.5 25 B A B A A B 20 25 36 6.5 37 7.5 33 3.5 24.5 27 24 25 32 41 8.5 9.5 38 5.5 42 27 29 26.5 32 40 8 9 43 5 44 40 32.5 30 30.5 40 50 10.5 49 7.5 50 11.5 46 36 36.5 38.5 50 63 48 13.5 49 14.5 45

REA/REB

REC A dimension B dimension Auto switch model CX D-A72 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-J79C D-F7V/F7WV D-F7BA D-F79F D-A72 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-J79C D-F7V/FWV D-F7BA D-F79F CY D-F7NTL D-A73/A80 D-F7NTL D-A73/A80 MQQ M Bore size (mm) RHC 10 35 35.5 45 44.5 40.5 39.5 MK(2) 15 34.5 35 62.5 62 40 57 20 64 64.5 50 49.5 69.5 44.5 RS Q G 25 44 44.5 71 70.5 49.5

REA/REB

REC A dimension B dimension Auto switch model CX D-A72 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-J79C D-F7V/F7WV D-F7BA D-F79F D-A72 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-J79C D-F7V/FWV D-F7BA D-F79F CY D-F7NTL D-A73/A80 D-F7NTL D-A73/A80 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800

MY1

D-Y69A, D-Y69B, D-Y7PV D-Y7NWV, D-Y7PWV, D-Y7BWV ( ) MY1CW 25, 32, 40, 50, 63 B A Solid state switch D-Y59 , D-Y69 , D-Y7P(V) D-Y7NW(V), D-Y7PW(V), D-Y7BW(V) A B A B Reed switch D-Z73, D-Z76, D-Z80 D-Y7BAL 63 50 40 32 25 Mounting position 40 32 25 Mounting position 25 Mounting position 32 40 50 63 A 323.5 278.5 157.5 127.5 97.5 157.5 127.5 97.5 97.5 127.5 157.5 278.5 323.5 A A B 136.5 121.5

CL

Minimum Stroke for Auto Switch Mounting (mm) No. of auto switches mounted 2 Different sides Auto switch model Same side n Different sides 1 Same side D-C7 D-C80 15 50 + 45 (n 2) 50 10 n 2 2 15 + 45 ( ) (n = 2, 4, 6) D-H7 D-H7W D-H7BAL D-H7NF 15 60 + 45 (n 2) 60 10 D-C73C D-C80C D-H7C n 2 2 15 + 50 ( ) (n = 2, 4, 6) 65 + 50 (n 2) 15 65 10 n 2 2 D-B5 D-B64 15 + 50 ( ) (n = 2, 4, 6) 15

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

D-F5BAL/F59F D-F5W/J59W CP95 ~ = NCM ~ = ~ = NCA D-X 20Proper Auto Switch Mounting Position Auto Switch Mounting Height Data D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F59F D-F5NTL Auto switch model D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F59F D-A5 D-A6 D-A3 D-A44 D-G39 D-K39 D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W D-A59W D-F5NTL Bore size (mm) A B A B A B A B Hs Hs Hs Ht Hs Ht 74.5 125 0 0 2 2 4.5 4.5 9.5

ZP

F 4-9.5 F 4-8 4-6 3-6.5 4-5 G 3-4 Y 3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37

Base Mounted Metal Seal/Rubber Seal Series VQ

L11 = L4 + 50 100 L8 = 16n + 118.5 L9 = 16n + 131 The broken lines indicate the DIN rail mounting style [-D].

Compact Cylinder/Guide Rod Type Series CQM

Auto Switch Mounting Height (mm) D-A7H/A80H D-F7/J79/F7W D-J79W/F79F D-F7BAL/F7NTL Auto switch model D-P4DWL D-J79C D-F7V D-F7WV D-F7BAVL D-A79W D-A73C D-A80C D-A7 D-A80 Hs 31.5 35 41 47.5 57.5 67.5 Hs 32.5 36 42 48.5 58.5 68.5 Hs 38.5 42 48 54.5 64.5 74.5 Hs 34 37.5 43.5 50 60 70 Hs 35 38.5 44.5 51 61 71 Hs 38 41.5 47.5 54 64 74 Hs 44 50 56.5 66.5 76.5 Bore size 32 40 50 63 80 100 D-P4DWL

MU

style D-A73C, D-A80C, D-J79C 25, 32 40, 50, 63 22.6 30.5 HS HS HS Auto switch D-A79W, D-F7WV, D-F7V D-F7BAVL 25, 32 40, 50, 63 22 30.5 HS Auto switch D-P5DWL 40, 50, 63 20 HS Auto switch 7-8-20 21 Series MDU With Auto Switch Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height Proper Auto Switch Mounting Position Auto Switch Mounting Height Auto