Magnet: Built-in, Type: Pneumatic, Mounting: Integral Clevis, 90°, Bore: 32mm, Port Thread: Rc, Stroke: 300mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: -, Rod End Bracket: -, Auto Switch: -, Leadwire or Prewired Connector: -, Number: -

Series CM2 stainless steel cylinders are compact, lightweight and offer high performance. Improved piston seal and rod seal greatly improve the units life. Rubber bumpers are standard. The CM2 series offers a variety of mounting options and is auto switch capable. Double acting single rod, Bore sizes: 20, 25, 32, and 40 *, Strokes from 25mm through 500mm, Mounts: basic, foot, front and rear

Series CM2 stainless steel cylinders are compact, lightweight and offer high performance. Improved piston seal and rod seal greatly improve the units life. Rubber bumpers are standard. The CM2 series offers a variety of mounting options and is auto switch capable. Double acting single rod, Bore sizes: 20, 25, 32, and 40 *, Strokes from 25mm through 500mm, Mounts: basic, foot, front and rear

Series CM2 stainless steel cylinders are compact, lightweight and offer high performance. Improved piston seal and rod seal greatly improve the units life. Rubber bumpers are standard. The CM2 series offers a variety of mounting options and is auto switch capable. Double acting single rod, Bore sizes: 20, 25, 32, and 40 *, Strokes from 25mm through 500mm, Mounts: basic, foot, front and rear

Series CM2 stainless steel cylinders are compact, lightweight and offer high performance. Improved piston seal and rod seal greatly improve the units life. Rubber bumpers are standard. The CM2 series offers a variety of mounting options and is auto switch capable. Double acting single rod, Bore sizes: 20, 25, 32, and 40 *, Strokes from 25mm through 500mm, Mounts: basic, foot, front and rear

Air Cylinder

D-X Technical Data 293 CG1 Series Rod Boot Material Ordering Example of Cylinder Assembly Clevis Symbol Rod boot material Maximum operating temperature J Nylon tarpaulin 70C K Heat resistant tarpaulin 110C Cylinder model: CDG1DN20-100Z-NW-M9BW Auto switch Maximum ambient temperature for the rod boot itself.

High Vacuum L Type Valve

) KF (NW), K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealant material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 Air consumption cm3 Note 2) for 0.5MPa 31 61 220 390 680 1420 Port size M5 Rc 1/8 Weight kg 0.28 0.47 1.1 1.7 3.1 5.1 9 XL-OMS0001-B 4-2.

High Vacuum L Type Valve

oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW

High Vacuum L Type Valve

) KF (NW), K (DN) Main material Note 2) Body: aluminum alloy, Main part: SUS304 and FKM (standard sealant material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 for 0.5MPa 31 61 220 390 680 1420 Air consumption cm3 Note 3) Port size M5 Rc 1/8 Weight kg 0.29 0.49 1.2 1.9 3.3 5.7 Note 1) Conductance is molecular flow measured

XLA Series

60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures , excluding gas permeation Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW

XLA- ∗ -F7NJ ∗ - ∗ Series

) KF (NW) , K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 Air consumption cm3 Note 2 for 0.5MPa 19 46 200 360 660 1350 3000 5150 Port size M5 Rc 1/8 Rc 1/4 Weight kg 0.25 0.45 1.1 1.6 2.9 5.0 10.6 18.5 7 XL*-OML0013

XL-OMV0002

XLC-16 XLC-25 XLC-40 XLC-50-1 XLC-63-1 XLC-80-1 XLC-100-1 XLC-160-1 16 25 40 50 63 80 100 160 560(5150) -5 Pa (abs) 110 l/s 1 5 14 45 80 160 200 300 800 10 (FKM) 1.310 Pam 3/S -11 (FKM) 1.310 KF(NW) KF(NW)K(DN) SUS316LSUS304FKM() 2 MPa (G) 0.30.6 0.40.6 cm 3 3 0.5MPa 38 91 430 280 500 1000 2300 3700 M5 Rc 1/8 Rc1/4 kg 0.28 0.46 1.1 1.4 2.3 4.0 8.7 14.5 1) 2) Y-VAC2 3) 1 7 XL-OMV0002

XLDV Series

) KF(NW),K(DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Note 2 Surface treatment for body Outside: hard anodized Inside: basis material Pilot pressure MPa 0.4~0.7 Main pumping 46 200 360 660 1350 3000 5150 Air consumption cm3 for 0.5MPa Note 3 Initial pumping 3.5 12 15.5 30 42 54 54 Port size M5:1(SUP),3(EXE) port Weight kg

AC Servo Motor Driver (Pulse input type/Positioning type ）

Malfunction RA1 OFF ON MC MC SK Emergency stop switch Driver Servo amplifier Servo motor (Note 6) MCCB CNP1 MC (Note 10) 1-phase 200 V AC to 240 V AC L1 CNP3 (Note 5) U U L2 Motor V V L3 M W NW P3 (Note 1) (Note 9) P4 CNP2 P+ C (Note 2) D (Note 10) Encoder (Note 3) CN2 L11 Encoder cable L21 (Note 7) Main circuit power supply CN1 Forced stop 2 EM2 CN1 24 V DC (Note 11) (Note 4) Servo-on SON

XLF Series

60 (5 to 150 for high temperature type) Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW

High Vacuum L Type Valve

) KF (NW), K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealant material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 Air consumption cm3 Note 2) for 0.5MPa 31 61 220 390 680 1420 Solenoid valve SYJ319 SYJ519 Port size M5: Port1(P), 3(R) Rc1/8: Port1(P), M5: Port3(R) Weight

High Vacuum L Type Valve

) KF (NW) , K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Note 2) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 Air consumption cm3 for 0.5MPa Note 3) Main pumping 46 200 360 660 1350 3000 5150 Initial pumping 3.5 12 15.5 30 42 54 54 Port size M5 Rc 1/8 Rc 1

XLG Series

) KF(NW),K(DN) Main material Body : Aluminum alloy, critical part : SUS304, FKM (standard seal material) Note 2 Surface treatment for body Outside: hard anodized Inside: basis material Pilot pressure MPa(G) 0.3 to 0.6 0.4 to 0.6 Air consumption cm3 Note 3 0.5MPa 38 91 430 280 500 1000 2300 3700 Port size M5 Rc 1/8 Weight kg 0.28 0.46 1.1 1.4 2.3 4.1 7.6 14.9 8 XL*-OMI0010-E 3-2.

Series SV

SV1000 SV2000 SV3000 0 NW QW 1 2 3 P, E port position Input block Supply/Exhaust block assembly specification Input block type Without input block M12: 2 inputs M12: 4 inputs M8: 4 inputs (3 pins) A, B port size For mixed mounting, indicate the port size, such as C3 or C4, instead of a "" in the a section of the station table.

17

O-ring MY1B25-PS MY1B32-PS MY1B40-PS Note) For the replacement procedure of replacement parts/seals, refer to the Operation Manual. 1192 MY1B Series Mechanically Jointed Rodless Cylinder Basic Type Standard/Centralized Piping Type 25, 32, 40 MY1B25 /32 /40 Z Stroke (LL) L 2 x 2 x B counterbore depth C LD through-hole 4 x MM depth M P(MY1BG) (Hexagon socket head taper plug) PA YW PP QQ RR QW NW