Precision: B (Basic), Size: 10mm, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, 0.5M, Lead Wire or Prewired Connector: SBPC (0.5m Cord Length, M8-4 Pin Connector)

Oscillation Angle A: [Arbitrary Setting Type] Free setting type, Torque (Range)(N⋅m): 1 to Less than 3, Type: Rotary Table 3-Points or More, Main Body Shape: Block Shape, Operation Method: Double Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.005 to Less than 0.01, Valves: Not Provided, Allowable Kinetic Energy(J): 0.007, Torque

Model: MSQ, Type: Basic Type, Size: 3, Port Location: Front Port, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-4 Pin Connector, Number: -

Model: MSQ, Precision: Basic, Size: 100, Suffix: Shock Absorbers, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-4 Pin Connector, Number: -, Thread Type: -

Band Mount: None, Rail Mount: None, Tie-rod Mount: None, Direct Mount: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: SBPC (0.5m Cord Length, M8-4 Pin Connector)

Oscillation Angle A: [Arbitrary Setting Type] Free setting type, Type: Rotary Table 2-Point Stop, Main Body Shape: Block Shape, Operation Method: Double Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.005 to Less than 0.01, Valves: Not Provided, Allowable Kinetic Energy(J): 0.007, Format: Includes adjusting bolt, Size: 10, Switch

Sensor Type: Non-Contact, Output Format: PNP Format, Wiring Method: 3-Wire, Type: Main Body, Wiring type: 2-wire, Output Type: None, Electrical entry direction: In-line, Lead wire length(m): 0.5, Connector Type: M8 4-pin

Series CM2 stainless steel cylinders are compact, lightweight and offer high performance. Improved piston seal and rod seal greatly improve the units life. Rubber bumpers are standard. The CM2 series offers a variety of mounting options and is auto switch capable. Spring extend or spring return, Bore sizes: 20, 25, 32, and 40 *, Strokes from 25mm through 250mm, Mounts: basic, foot, flange

Series CM2 stainless steel cylinders are compact, lightweight and offer high performance. Improved piston seal and rod seal greatly improve the units life. Rubber bumpers are standard. The CM2 series offers a variety of mounting options and is auto switch capable. Spring extend or spring return, Bore sizes: 20, 25, 32, and 40 *, Strokes from 25mm through 250mm, Mounts: basic, foot, flange

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

pressure Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 14 45 Leakage Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperature, excluding gas permeation Flange type KF(NW

XL-OMY0002

25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114 30 40 13 XL-OMY0002 8 X L D 25 M9N A A ( X A N1 A ) 25 40 B A 50 63 80 C P11 160 100 FKM() P8 KF (NW

High Vacuum L Type Valve

Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures , excluding gas permeation Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW

XLJ- -*G1 Series 25 40

Direction of exhaust Fixed Note 1 Operating pressure Pa (abs) Atmospheric pressure to 110-2 Conductance l/s Note 2 12 45 Operating power voltage 100VAC, 200VAC,110VAC,220VAC,230VAC,240VAC,24VDC,12VDC Electrical entry Grommet Pam3/s Internal 1.3 x 10-8 Leakage at ambient temperature, excluding gas penetration External 1.3 x 10-6 at ambient temperature, excluding gas penetration Type of flange KF(NW

10

-XC26 With split pins for double clevis pin/double knuckle joint pin and flat washers*4 Ordering Example of Cylinder Assembly -XC27 Double clevis and double knuckle joint pins made of stainless steel -XC29 Double knuckle joint with spring pin -XC30 Rod trunnion -XC35 With coil scraper -XC65 Made of stainless steel (Combination of XC7 and XC68)*2 Cylinder model: MDBD32-50Z-NW-M9BW Double clevis

Cylinder with Lock

300, 350, 400, 450, 500 Up to 1800 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Up to 2500 Cylinder model: MDWBD32-50-NW-M9BW

VQ4000

for 12 Rc 1/4 Rc 3/8 Bottom ported Rc 1/4 Mixed U D U D Input unit COM PNP (+) or with no SI unit (for SDOW) Nil Kit Serial transmission kit N NPN () Input unit Mounting SI unit Nil 0 1 2 3 4 With no SI unit, or input unit (In the case of SDOW) Without input unit With 1 input unit With 2 input units With 2 input units With 4 input units D U D side mounting U side mounting SI unit OW QW NW

Flange Size: 50, Flange Type: KF(NW), Port Direction: Flange Side, Temperature: 5 to 60°C, Version: 2 (Refresh), Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed)

Flange Size: 50, Flange Type: KF(NW), Port Direction: Flange Side, Temperature: 5 to 60°C, Version: 2 (Refresh), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: Z (5m), Number: A (2pcs, Valve Open/Closed)

Flange Size: 80, Flange Type: KF(NW), Port Direction: Flange Side, Temperature: 5 to 60°C, Version: 2 (Refresh), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: Z (5m), Number: A (2pcs, Valve Open/Closed)

How to Order MB Series ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Air Cylinder: Standard Type Double Acting, Single Rod

-XC26 With split pins for double clevis pin/double knuckle joint pin and at washers*4 Ordering Example of Cylinder Assembly -XC27 Double clevis and double knuckle joint pins made of stainless steel -XC29 Double knuckle joint with spring pin -XC30 Rod trunnion -XC35 With coil scraper -XC65 Made of stainless steel (Combination of XC7 and XC68)*2 Cylinder model: MDBD32-50Z-NW-M9BW Double clevis