High Vacuum Angle Valve

A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16

Compact Cylinder with Solenoid Valve/

Manual override Nil B Non-locking push type Locking slotted type Number of auto switches Nil S N 2 pcs. 1 pc. n pcs.

Auto Switch Guide

[The voltage drop will be n times larger when n auto switches are connected.] Even though an auto switch operates normally, the load may not operate. Load 10-20-4 5 Auto Switches Precautions 2 Be sure to read before handling. For detailed precautions on every series, refer to main text.

Auto Switch Guide

L D-A73 (Example) -X Lead wire length 205 m None Nil L 0.5 m 3 m Z N Data Applicable for the connector type (D-C) only.

Auto Switch Guide

L D-A73 (Example) 20Lead wire length Data 5 m None Nil L 0.5 m 3 m Z N Applicable for the connector type (D-C) only.

Auto Switch Guide

L D-A73 (Example) CLQ Lead wire length MLGP 5 m None Nil L 0.5 m 3 m Z N RLQ Applicable for the connector type (D-C) only.

Auto Switch Guide

L D-A73 (Example) 20Lead wire length Data 5 m None Nil L 0.5 m 3 m Z N Applicable for the connector type (D-C) only.

Auto Switch Guide

L D-A73 (Example) 20Lead wire length Data 5 m None Nil L 0.5 m 3 m Z N Applicable for the connector type (D-C) only.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

flange Head flange Copper, fluorine and silicone-free + Low particle generation Rod end thread L F G Solid state M9B, M9BW, K59, K59W Nil F Male rod end Female rod end Nil S n 2 pcs. 1 pc. n pcs.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

/2 n = 4, 8, 12, 16 65 + 30 (n 4) /2 n = 4, 8, 12, 16 70 + 30 (n 4) /2 n = 4, 8, 12, 16 75 + 30 (n 4) /2 n = 4, 8, 12, 16 85 + 30 (n 4) /2 n = 4, 8, 12, 16 2 (Different surfaces, Same surface) 1 70 75 80 85 95 100 D-A9m n 70 + 40 (n 4) /2 n = 4, 8, 12, 16 75 + 40 (n 4) /2 n = 4, 8, 12, 16 80 + 40 (n 4) /2 n = 4, 8, 12, 16 85 + 40 (n 4) /2 n = 4, 8, 12, 16 95 + 40 (n 4) /2 n = 4,

Air Slide Table

B A1 Shock Absorber/RJ Model A1 A2 B C D E F G J K L1 L2 M N Adjuster part no.

ISO Standard Hydraulic Cylinder

D(n = 2, 4, 6, 8) Note 3) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) 2 (Different surfaces and same surface), 1 25 145 135 130 120 120 (n 4) 2 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 D-A5/A6 25 + 55 120 + 55 120 + 55 130 + 55 135 + 55 145 + 55 "n" pcs.

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

Mass (g) D-M9N(V) D-M9P(V) D-M9B(V) Auto switch model Precautions Caution 0.5 8 8 7 1 14 14 13 Lead wire length (m) 3 41 41 38 Fix the auto switch with the existing screw installed on the auto switch body.

CLS

n = 2, 4, 6, 8 n 150 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) 110 + 100 (n 2) n = 2, 4, 6, 8 CNA 1 15 110 150 Different sides CNS 110 150 35 2 Same side 110 150 55 CLS D-A44 150 + 30 (n 2) n = 2, 4, 6, 8 150 + 50 (n 2) n = 2, 4, 6, 8 Different sides 110 + 30 (n 2) n = 2, 4, 6, 8 35 + 30 (n 2) n Same side 110 + 50 (n 2) n = 2, 4, 6, 8 55 + 55 (n 2) CLQ 1 110 150 15 MLGP D-Z7/Z80

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

thread N through-hole Workpiece transfer direction These 5 figures show the piston rod extended.

24

S 1 pc. n n pcs. Port thread type Nil Rc N NPT TF G Auto switch Nil Without auto switch (Built-in magnet) Cylinder stroke [mm] Refer to Standard Strokes on page 479. *: For applicable auto switches, refer to the table below. Applicable Auto Switches/Refer to pages 1119 to 1245 for further information on auto switches.

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

L D-A73 (Example) MHY Lead wire length MHW 5 m None Nil L 0.5 m 3 m Z N MRHQ Applicable for the connector type (D-C) only.

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

L D-A73 (Example) MHY Lead wire length MHW 5 m None Nil L 0.5 m 3 m Z N MRHQ Applicable for the connector type (D-C) only.

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

L D-A73 (Example) MRQ Lead wire length D5 m None Nil L 0.5 m 3 m Z N 20Applicable for the connector type (D-C) only.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

N Without magnet and rail Type N (Without magnet and rail) Auto switch can not be mounted on. Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.