Vacuum Pad

A A Width across flat D (Hexagon) Width across flat 8 (Hexagon) 3 3 B E E Width across flat 12 (Hexagon) B Width across flat 8 (Hexagon) 6 8 5 10.5 E 2.5 11.7 6.6 Dimensions Dimensions A B E 4 3 A B Model ZPT4-A6 ZPT4-A8 M6 x 1 M8 x 1 D 8 12 E 3 4.5 Model ZPT2-A5 ZPT2-A6 M5 x 0.8 M6 x 1 21 26 26 16 ZPT3-A6 Adapter part no. ZPT1-B4/B5 Adapter part no.

Industrial Filters

745 550 300 860 1650 2105 120 250 80 (3B) 100 (4B) 150 (6B) 65 (2 1/2B) 65 (2 1/2B) 630 920 37 750 24 317 795 600 300 880 1410 1865 120 250 80 (3B) 100 (4B) 150 (6B) 65 (2 1/2B) 65 (2 1/2B) 710 970 37 1000 24 394 795 600 300 880 1670 2125 120 250 80 (3B) 100 (4B) 150 (6B) 65 (2 1/2B) 65 (2 1/2B) 735 970 53 750 24 373 845 650 300 890 1420 1880 120 250 80 (3B) 100 (4B) 150 (6B) 65 (2 1/2B)

CL

only No. q w e r t y u i o !

LEY-OM007

ON/OFF / / 2 3 3 2 1 2 / 3 4.3. [] LEC -20- LEC / P.38 6.3 <> NPNPNP LEY16B-100 NPN <> INPIN []INP ON ON INP ON OFF ,[] [] / P.41 7.2 -21- <> No.1 a b c d e f g h i j k No. 1 2 mm/s mm mm/s^2 mm/s^2 % % mm/s % mm mm mm 0 ABS 250 50.00 3000 3000 60 40 30 100 48.00 50.00 20.00 1 ABS 250 0.00 3000 3000 0 0 1 100 0.00 2.00 0.50 a <> ABSINC ABS()/ / INC()/ / b c d e f 0

Electric Actuators

3 e u !

Step Motor Driver （ Pulse input type ）

1000 500 250 1200 500 250 500 500 250 Speed Strok 501-600 900 500 250 1200 500 250 500 500 250 601-700 630 420 230 930 500 250 500 500 250 701-800 550 330 180 750 500 250 500 500 250 801-900 610 410 200 500 500 250 901-1000 500 340 170 500 500 250 Step data default 1001-1100 500 440 220 1101-1200 500 380 190 Position 0.00 0.00 0.00 0.00 Acceleration 3000 3000 3000 3000 Deceleration 3000

energy saving effect

Right Left Rear Front w q Parts List e Part no. Applicable model Weight [kg] No.

Hydraulic

E MM A MA D K G H ZZ MM A MA D K G H ZZ 32 32 34 M16 x 1.5 25 22 18 7 14 55 250 +0.043 0 -0.025 -0.064 40 40 36 M16 x 1.5 25 22 18 7 14 55 250 40 M20 x 1.5 30 27 22.4 9 19 60 255 -0.025 -0.064 +0.052 0 50 50 40 M20 x 1.5 30 27 22.4 9 19 60 280 46 M24 x 1.5 35 32 28 11 24 65 285 63 63 46 M24 x 1.5 35 32 28 11 24 70 327.5 55 M30 x 1.5 45 42 35.5 13 30 80 337.5 -0.030 -0.076 +0.062

45

) Width of SI unit applicable to E: Matsushita Electric Works, Ltd. and G: Rockwell Automation, Inc. widens to 24.3 mm .

Fieldbus System

1(P), 3/5(E) port] Applicable tube O.D.

AC Servo Motor Driver

Negative response [E] [e] Command error Command not existing in the specifications was transmitted.

Smooth Cylinder/Low Speed Cylinder

-X 1233 Series CS2Y Dimensions Rod flange: CS2YF Port With rod boot V W G G 4 x J Cushion valve Width across flats KA 2 x P (Rc, NPT, G) 4 x FD MM FY D E E e B H K A AL ZZ1 + l + Stroke h + l l f FT B C N N F FZ FX ZZ + Stroke M S + Stroke (mm) Bore size (mm) Stroke range (mm) B C A AL B D E F FD FT FX FY FZ G J V 125 140 160 50 47 143 145 115 32 71 43 19 14 190 100 230 15 M14 x 1.5 15 Up

LEC-OM07605CN

EMC (2) EMC EMC MCCB MC 1 4 L1 (1) 2 5 (1) L2 3 6 L3 E L11 L21 ( (RSPD-250-U4) () (2) (2) (RSPD-250-U4) (OKAYA) 1 2 3 1. AC200V240VL1L3L2 2. 11 29 11.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

MGZ Floating Joint MGT Center of sphere M M U U D H G B F P C E R A (mm) DMax. operating tension and compression N Center of sphere R Model Max. screw-in depth P Allowable eccentricity U M A Applicable bore size Mass (kg) B C D E F G H Nominal size Pitch Compression Tension -X JB40-8-125 JB63-10-150 JB80-16-200 JB100-20-250 JB140-22-250 20, 25 32 40 50, 63 80 8 10 16 20 22 1.25 1.5 2 2.5

MLGP

236 M14 x 2.0 M14 x 2.0 WB Bore size (mm) 42 60 X YY YL Z st 25 st 50 50 < st 100 25 < st 100 100 < st 200 200 < st 300 300 < st 350 100 124 80 100 M14 x 2.0 24 28 28 35 92 97 128 135 178 185 54 71 M12 x 1.75 Dimensions A, DB, E: MLGPL (Ball bushing bearing) Dimensions A, DB, E: MLGPM (Slide bearing) A E A E Bore size (mm) 158 188.5 185 213.5 Bore size (mm) 152.5 173 198.5 DB

MLGP

236 M14 x 2.0 M14 x 2.0 WB Bore size (mm) 42 60 X YY YL Z st 25 st 50 50 < st 100 25 < st 100 100 < st 200 200 < st 300 300 < st 350 100 124 80 100 M14 x 2.0 24 28 28 35 92 97 128 135 178 185 54 71 M12 x 1.75 Dimensions A, DB, E: MLGPL (Ball bushing bearing) Dimensions A, DB, E: MLGPM (Slide bearing) A E A E Bore size (mm) 158 188.5 185 213.5 Bore size (mm) 152.5 173 198.5 DB

25

Static Neutralization Characteristics e Potential Amplitude IZS40, 41 Supply pressure: 0.3 MPa With high speed de-ionizing cartridge With energy saving type de-ionizing cartridge 2000 2000 1750 1750 Potential amplitude (V) Potential amplitude (V) 1500 1500 1250 1250 1000 1000 1 Hz 1 Hz 30 Hz 750 750 30 Hz 500 500 250 250 0 0 0 500 1,000 1,500 2,000 0 500 1,000 1,500 2,000 Installation distance

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Lx = 400 mm, Ly = 250 mm, Lz = 1500 mm 4.

MNB

Standard Stroke/ Bore size (mm) 32 40 50 63 80 100 Standard stroke (mm) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300

MNB

Standard Stroke/ Bore size (mm) 32 40 50 63 80 100 Standard stroke (mm) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300