High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

CLS

V W FA AL T A K N N C B F M S + Stroke H BY ZZ + Stroke BW With rod boot 180, 200, 250 BV e BZ BG BE l f 15 h + l 4-MA Effective thread depth MB (To attach eyebolt) ZZ1 + l + Stroke Bore size (mm) Stroke range (mm) 125 140 160 180 200 250 A B BA BB BC BD BE BG BZ BW BP C D EA GB GC H J K MM MA MB BY BV AL E F KA FA N GA M 145 75 18 110 136 115 90 90 90 115 115 140 16 107 58 110 M14 x 1.5

MNB

C Width across flats B1 Rc(PT)P Front cylinder port Rc(PT)P Rear cylinder port MM MM GR D E ??

CG1

C-16 type for pivot C-18 type for pivot Rod End Nut Clevis pins and knuckle pins are common for bore size 80 and 100.

Basic type / Direct mount type Series CY3B/CY3R

Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a w 0.0 10 0 20 10 t i o o n L Operation cycles a t e l u g c e i t 1 n r a e p r a Non-contact construction w t Particulate generation from the linear guide unit has been reduced with the use

Electric Actuator with Integrated Guide

Yasukawa Electric Corporation M4 x 0.7 8 4 75 C (Thread size) M5 x 0.8 10 4 70 When mounting a coupling on the motor, mount it within the dimensional range shown on the left.

Vacuum System Peripherals:

10 16 Max. vacuum pressure S 84 kPa 53 kPa 17 L 18 Silencer Nil None With silencer 19 1 Vacuum switch 55 Nil None With vacuum switch Wiring specifications (for vacuum switch) E Lead wire length 0.6 m Lead wire length 3 m Lead wire length 0.6 m Lead wire length 3 m Connector type Nil L C CL CN Grommet type Connector type (15 stations maximum) t r r e e w w q q Number of ejector/valve

Low Friction Cylinders Series MQ

C B H E F A B H Applicable bore size (mm) Applicable bore size (mm) Part no.

REA/REB

8 Hard anodized Aluminum alloy Port cover C J G5-S Stainless steel Shaft e !

REA/REB

8 Hard anodized Aluminum alloy Port cover C J G5-S Stainless steel Shaft e !

VFR

Wiring Applicable valve model VFR40-F VFR41-D VFR41-E VFR44-G, VFR44-E VFR44-T, VFR44-D Collection rate of drainage and oil mist: 99.9% or more.

Modular F.R.L. Units

Cross spacer E F F E E B C A E D E: 4 Rc F: Without thread Model Note) Applicable model Port size 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 D C B A Y24-01-A Y24-02-A Y34-01-A Y34-02-A Y44-02-A Y44-03-A Y54-03-A Y54-04-A AC20-A 40 22 40 40 48 AC25-A, AC30-A 28 43 49 54 AC40-A 36 48 60 Caution on Mounting 62 AC40-06-A 40 62 72 1.

C95

25 25 25 25 37.5 37.5 37.5 37.5 37.5 37.5 50 50 50 50 50 50 75 75 75 75 75 75 75 75 87 87 103 103 88 88 100 100 116 116 100 100 112 112 128 128 113 113 125 125 141 141 138 138 150 150 166 166 32 40 50 63 80 100 1.11-8 Series C95 Accessories Rear single clevis C Rear double clevis D CJ1 CJP CJ2 CM2 Bore (mm) TG1 E1 EW FL L1 L L2 d1 CD MR d2 R1 E2 UB CB 45 51 64 74 94 113 26 28 32 40 50 60

MGG

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

90

M ZK2 ZS A E A G Supply valve, self-holding type (Linked to release valve) Supply valve only (Single) e Rated voltage r Lead wire entry direction C L LO q w e r t q Rated pressure range and function 5 6 24 VDC 12 VDC For plug-in (Manifold common wiring) L-type plug connector with lead wire (Individual wiring) L-type plug connector, without connector E F V 0 to 101 kPa 100 to 100 kPa 100 to

CY1

B Counter bore depth C 2 x 4-MM thread depth M 4-J x E (depth) H 2-P (piping port) Y T T HA CB L HP TC F X WP GW GP WS QW PW D 4-LD W K With switch rail Plug HS Q + Stroke G Z + Stroke HR CR Area E (Area E) For CY1R25, 32, 40, 50, 63 (mm) A B C CB CR D G GP GW H HA HB HC HP HR HS HT J x E F Model CY1R 6 9 6.5 3.2 2 0.5 7.6 4 20 18.5 19 17 10.5 18 9 17 6 7 M4 x 0.7 x 6 5.5 CY1R10 9 6.5 3.2

AC

27.5 N Gauge P C Q IN OUT AR2001/2501/3001: Max. 3.5t AR4001: Max. 5.0t Port size B H J Bracket (Optional) K M G L E F Bracket mounting dimensions N Q Model Port size A B C D E P F G H J K L M 30 34 44 5.4 15.4 55 2.3 1/8, 1/4 40 3.3 95 17 AR2001 40 35 33.5 25 30 34 44 5.4 15.4 55 2.3 1/4, 3/8 53 4.3 102.5 25 AR2501 48 32 33.5 25 41 40 46 6.5 8 53 2.3 1/4, 3/8 53 0.8 127.5 35 AR3001 53

JXCx-OMU0004

RESET B 8.3 P.41 RESET C OFF I/O STOP OFF OFF 8.5 ONP.44 RESET C D RESET C RESET D 66 No.JXC-OMU0004-A (M24V) RESET D RESET D 3.4 P.14 (C24V) RESET D RESET D ( E ) 67 No.JXC-OMU0004-A E ON E BK RLS E EEPROM EEPROM E 10 CPU CPU E 68 No.JXC-OMU0004-A 13. / 50mm ( ) 5m 5m 10% 15m 20% 69 No.JXC-OMU0004-A 14. / 14.1.

MXS Series Air Slide Table

Applicable model H G A B C J K E D F 16.5 MXS-AT6 5 MXS 6 7 10.5 2.5 21 19 8 5 M2.5 X 8 M5 X 0.8 MXS6, MXS8 26.5 MXS-AT6-X11 15 D 16.5 MXS-AT8 5 E E H MXS 8 M3 X 10 M6 X 1 8 12.5 3 25 9 6 22.5 26.5 MXS-AT8-X11 15 36.5 MXS-AT8-X12 25 5 G 20 MXS-AT12 MXS12 12 18.5 4 32 13 8 31 M4 X 8 M8 X 1 30 MXS-AT12-X11 15 B C 40 MXS-AT12-X12 25 24.5 MXS-AT16 5 F K K F A J MXS16 M5 X 10 M10 X 1 14 23 5 40

C95

sides) 35 + 30 (n 2) 35 + 30 (n 2) 60 + 30 (n 2) 65 + 30 (n 2) 65 + 30 (n 2) 75 + 30 (n 2) 80 + 30 (n 2) 85 + 30 (n 2) n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 1 10 10 70 75 75 80 80 85 2 (Same side) 55 55 70 75 75 80 80 85 2 (Different sides) 35 35 70 75 75 80 80 85 A44 55 + 50 (n 2) 55 +