S070

1 o Note) Order is accepted in 10 units. 16 Series S070 Exploded View of Stacking Type Body Ported Type/SS073M01-C Exploded View of Stacking Type D side end plate assembly Valve U side end plate assembly w Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com e q r < U

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

1 u Material Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 Note CRJ Aluminum alloy Body A Light gray color Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !

F

R S E R I E S (N)AS1000-4000 S Y M B O L S NAS 3 000 A R E A C O D E Japan, Asia, Australia, UK N Canada, USA P O R T T H R E A D P A N E L M O U N T V E R S I O N R(PT) N NPT B O D Y S I Z E P O R T S I Z E 1 M3, M5 2 1/8, 1/4 Standard 3 3/8 Standard 4 1/2 Standard M3 M3x0.5 M5 M5x0.8 01 1/8 (10-32Nom) 02 1/4 03 3/8 04 1/2 T E C H N I C A L SPECIFICATIONS D I M E N S I O N S S E R I E S

Electric Actuator/Slider Type

How to Order q w e r t y u i o !

VQ5000

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Terminal no.

Model Selection 1

Before tightening VQ VX2 Nut VX Tubing support Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Tubing Insert bushing VX3 w e r VXA New PFA New PFA New PFA Series LQ 1 2 After tightening Quadruple sealing parts VN q LVC LVA Needle Valve Series LVN Needle Valve Series

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com E depth EK Q + Stroke Z + Stroke A G Stroke adjustment screw Note 3) (inner cover) Plug Plug [P (port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

For actuators with external stopper, the rotation end can be set within the ranges shown in the drawing by adjusting the stopper bolt. c l o r e c t k n w u o i s C e CRB2 CRBU2 CRB1 MSU B port A port C e l o s c i w k CRJ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Secondary Batteries

Electric Actuators/Cylinders 6 Electric Actuator Series LJ1/LG1 Electric Actuator with Integrated Guide Series LTF Series LJ1 Short Stroke Electric Actuator Series LX Electric Cylinder Series LZB/LDZB/LZC/LDZC Electric Gripper Series LEHZ/LEHF Series LX Electric Slide Table Series LES e-Rodless Actuator Series E-MY2 Series LEHZ Series E-MY2 Front matter 17 a C O N T E N T S Product

MGQ

Dimensions MGQL (Ball bushing bearing) A, DB, E Dimensions E E 30 st or less Over 30 st A A Symbol Symbol DB DB Stroke Stroke Bore size (mm) 12 16 20 25 Bore size (mm) 12 16 20 25 50 st or less Over 50 Over 50 50 st or less 30 st or less Over 30 st 43 39 4 6 8 16 0 55 49 43 6 8 10 22 0 65 57 10 61.5 10 12 27 14.5 0 74 47 63.5 16 62 13 16 32 14.5 0 79.5 47.5 8-20-9 10 Series MGQ Bore Size

CUJ

3 w e q !1 r y o e t !2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4 Built-in magnet Without magnet Single acting u i r y o e w i e u !

VXP21/22/23

Normally open Normally closed Model Grommet Electrical entry Conduit Conduit terminal Bracket H F E D C B f M L K J A e 57 62 67 b 39 45.5 49.5 Q 39 39 41.5 Q 23 23 25.5 N 61 (68) 69 (76) 79 (89) d 47 52 57 a 34 51 58 N 69 (76) 77 (84) 87 (97) N 61 69 79 c 65 78 86 Q R 57 74 81 VXP2142 , 30 30 35 20 20 23 34 43 47 29 37 43 28 35 40 3 8 8 63 80 90 59 59 62 104 (116) 118 (136) 133 (150) 26

ZQ

) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com L2 L1 ZL Release flow adjusting screw ZY 8 P PE Exhaust part 2-3.5 ZQ 62.8 (Body mounting hole Note 1)) 3 75 Suction filter ZF With L type plug connector ZP Vacuum pressure switch PE P EXH ZCU AMJ S R U N L H L H S R U N L H L H S R U N L H L H S R U N L H L H k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS

CE2

) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Metal connector With rod boot + ZZ + 5/4 stroke Stroke range A B C GA H1 FF GL F GD D E E GC M BB J BL C CC D EE GB K AA AL Bore size (mm) Without rod boot With rod boot 40 50 63 80 100 25 to 850 25 to 700 45 30 10 10 10 54 32 26 11 22 20 44 16 11 15 6 27 71.5 60 42 22 21 150.5 8 M8 x 1.25 25 to 800 25 to 650 50 35 12

1

q w e SY No.

CJP

M15 x 1.5 4 10 20 23.5 17 15 27 30.5 24 5 14.5 19 11.5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 15 19 4.5 M22 x 1.5 5 10 20.5 25 17.5 15 27 31.5 24 Note) E and F should be machined in a concentric manner.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

(Mounting hole) B C D E F G H Model A Applicable tubing diameter J ZH18DS-12-12-12 ZH18DL-12-12-12 ZH20DS-12-16-16 ZH20DL-12-16-16 12 12 12 12 114 40.95 30.5 15.8 3.5 15.8 20.95 20.95 114 40.95 30.5 15.8 3.5 15.8 26.75 124.6 45.95 32.7 15.8 3.5 17.2 26.75 124.6 45.95 32.7 15.8 3.5 17.2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650)

Refrigerated Air Dryers Series IDF/IDU

G Specifications/Dimensions B A B C D E F G Mass Inlet voltage Outlet voltage IDF-TR7000-8 IDF-TR9000-8 IDF-TR14000-8 IDF-TR18000-8 Transformer Applicable dryer IDF120D IDF150D Capacity Type 360 400 400 400 11 13 13 13 30 40 40 40 7 kVA 9 kVA 14 kVA 18 kVA 540 650 650 650 400 450 450 450 260 300 300 300 300 350 350 350 94 kg 220, 240, 380, 400, 415, 440 V( 50/60 Hz) Threephase Doubleturn

VCL

(mm) A B C D E F G H J L Port size Bracket part no.

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Construction Individual exhaust spacer Gasket Spacer E M2.5 x 36 (2 pcs.)