LG1H

A: Acceleration time B: Constant velocity time C: Deceleration time D: Resting time (0.4sec.)

Ionizer Gun

1200 1350 1500 Distance [mm] Distance [mm] 5) 6) Supply pressure 0.4 MPa Consumed flow rate 316 L/min (ANR) Supply pressure 0.5 MPa Consumed flow rate 390 L/min (ANR) 200 200 150 150 2s 1.5s 100 100 50 50 1.5s 1s 0.5s 1s 0.5s 0 0 -50 -50 -100 -100 -150 -150 -200 -200 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350 1500 Distance [mm] Distance [mm] 7)

Gun Type Ionizer

Twists or crushing of connected tubes d. Hardness and deterioration of connected tubes e. Air leakage 192

Step Motor Driver （ Pulse input type ）

500 250 500 500 250 Speed Strok 501-600 900 500 250 1200 500 250 500 500 250 601-700 630 420 230 930 500 250 500 500 250 701-800 550 330 180 750 500 250 500 500 250 801-900 610 410 200 500 500 250 901-1000 500 340 170 500 500 250 Step data default 1001-1100 500 440 220 1101-1200 500 380 190 Position 0.00 0.00 0.00 0.00 Acceleration 3000 3000 3000 3000 Deceleration 3000 3000 3000 3000 Pushing

5 Port Solenoid Valve Series SV

To find the stroke time (t), follow arrow from your stroke length ("L") to the solid line representing the load ratio (d%) for the application then up to the stroke time (t). To find the ending cylinder speed (u), follow arrow from your stroke length ("L") to the dotted line representing the load ratio (d%) then down to the ending cylinder speed (u).

End Lock Cylinder Series CBG1

Number of auto switches mounted Rod boot material Symbol Models 2 pcs. 1 pc. 70C00 Nylon tarpaulin J D-C7, C8 D-B5, B6 D-H7 D-G5, K5 110C Heat resistant tarpaulin K 15mm 10mm The maximum ambient temperature for the rod boot itself. 20mm 15mm D-B59W 20mm 10mm D-H7LF 3 Series CBG1 Rubber Bumper Type: CBG1BN With rear lock: CBG1BN Bore size Stroke H MM H GA GB Width across flats B1 2-Rc

HRX-OM-W038

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-W038 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly. Incorrect piping might cause leakage of supplied or drained leakage and wet surrounding area and facility.

HRX-OM-W002

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-8 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-W002 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

LEF-OM006xx

ON/OFF / / 2 3 3 2 1 2 / -20- 3.3. [] LEC LEC / P.32 5.3 <> NPNPNP LEFS16A-100 NPN <> INPIN []INP ON ON INP ON OFF -21- <> No.1 01 a b c d e f g h i j k a ABSINC No. 1 2 mm/s mm mm/s2 mm/s2 % % mm/s % mm mm mm 0 ABS 250 50.00 3000 3000 0 0 0 100 48.00 50.00 0.50 1 ABS 250 0.00 3000 3000 0 0 0 100 0.00 2.00 0.50 ABS()/ / INC()// b c d e f 00 g h i 100%DC24V 250% j 12

0.4

B 40 1000 C 10 550 D 4 350 E Note) Two mounting screws (M3 x 0.5) and a gasket are included.

0.5

1400 1600 0 200 400 600 800 1000 1200 1400 1600 0 0 0 0 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] Installation distance [mm] Installation distance [mm] Installation distance [mm] IZF10R 25 IZF10R IZF10R

PFxx-OMX0002

(Displays 0 when the (Displays 0 when the (Displays 0 when the value is below 270 L/min) value is below 540 L/min) value is below 1080 L/min) 300 to 3150 L/min 600 to 6300 L/min 1200 to 12600 L/min 10.0 0 to 10%F.S.

CY1

Note 2) D-Z73, D-Z76, D-Z80 D-F79, D-F7P, D-J79 D-F7NV, D-F7PV, D-F7BV D-J79C D-F79W, D-F7PW, D-J79W D-F7NWV, D-F7BWV Note 1) D-F9N, D-F9P, D-F9B Note 2) D-Y59A, D-Y7P, D-Y59B D-Y69A, D-Y7PV, D-Y69B Note 2) D-Y7NW, D-Y7PW, D-Y7BW D-Y7NWV, D-Y7PWV, D-Y7BWV D-F7BA D-F7NT D-F79F D-F7LF Note 1) Indicates auto switches for CY1R6 to 20.

Secondary Batteries

-900, D-M9BWSDPC-900 and D-A90L-900.

Air Cylinder

D-J51: 5ms or less Lead Wire Length D-A73 L Lead wire length Nil L Z N 0.5m 3m 5m None Applicable for the connector style (DC) only Applicable auto switch with 5 meter lead wire ("Z") Reed switch: D-B53/B54, D-C73 (C)/C80C, D-A73(C)(H)/A80C, D-A53/A54, D-Z73, D-90/97/90A/93A Solid state switch: Manufactured upon receipt of order as standard (Except D-F9/F9lV) The standard lead wire length

High Power Cylinder Series RHC

d D D C C H B H B B C D d H B C D d H Part no.

CY1F

(mm) Bore size D-A9, D-A9V D-F9, D-F9V D-F9W D-F9WV (mm) 10 15 25 5 10 Minimum stroke for auto switch mounting (2pcs.) (mm) D-A90V D-A96V D-A93V 22 Bore size D-F9V D-F9WV D-F9 D-F9W D-A90 D-A96 D-A93 (mm) 32 20 Mounting patternq, w 32 35 Mounting patterne 20 12 Auto Switch Mounting As shown below, there are 3 ways to mount the auto switch according to 3 types of electrical entries.

NCA1

(Tolerance 30%) 47 Series NCA1 Medium Duty Air Cylinder Specifications D-F5 W/D-J59W (With indicator light) PLC: Programmable Logic Controller Grommet D-F5PW D-F59W D-J59W Auto switch model number The suitable operating point can be indicated with a green light.

AC Servo Motor Driver (Network card type ）

470 (423 to 517) [Unit: mm] (Note) Model D H T E d W T D L Max.

Basic Type/Direct Mount Type

Note 4) D-Z7 and D-Y types cannot be mounted. 25 to 63 (mm) Auto switch model D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-Y7BA A B C D D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-Y7BA D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-Y7BA D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-Y7BA D-A9 D-M9 D-M9W D-M9A D-A9 D-M9 D-M9W D-M9A D-M9 D-M9W D-M9A D-A9 D-M9 D-M9W D-M9A D-A9 Bore size (mm) 25 32 40 50 63 19 23 18 98 94 99 42 38 43 75 79 74 22.5 26.5