CL

MLGC Front flange CNA Bore (mm) B BZ FT FD FX FZ FY CB 20 25 32 40 57.5 69 69 76 5.5 5.5 6.6 6.6 6 7 7 8 52 60 60 66 38 45 45 52 65 75 75 82 25 30 30 36 Rear flange/CLG1GN Front flange/CLG1FN CV/MVG CXW Refer to p.3.1-30 for long stroke dimensions.

AC Servo Motor Driver (Pulse input type/Positioning type ）

B-phase 0 A-phase A-phase B-phase B-phase 1 _ _ x _ Encoder output pulse setting selection 0h Refer to app. 15 for details.

Combination Cylinder

CNA Front flange CNG Bore (mm) B BZ FT FD FX FZ FY MNB 20 25 32 40 25 30 30 36 65 75 75 82 38 45 45 52 57.5 69 69 76 5.5 5.5 6.6 6.6 6 7 7 8 52 60 60 66 Rear flange/CLG1GN Front flange/CLG1FN CNS CLS Refer to p.3.1-30 for long stroke dimensions.

High Vacuum Angle Valve

VAC, 50/60 Hz XLA 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz U XL XL 5 24 VDC 6 12 VDC S type: Not available for AC.

SV

A B A B COM PWR A A A A B B B B Cable with M12 connectors EX500-ACCable with M12 connectors EX500-ACP. 1-2-27 P. 1-2-27 Relay output module SV1000-60-5-1A (Refer to page 1-2-94.) Connection of sensors with M8, M12 connectors (auto switch, pressure switch, etc.) A B A B COM PWR A A A Connection to a large solenoid valve, etc. A separate power supply is required.

ZP

Y 3.5 80 ZPT80H-A16 82 16.5 28 4.5 B 65 C 14.5 D 26 E 56 58 80 ZPT80H-B12 82 16.5 28 M12 x 1.75 4.5 80 ZPT80H-B16 82 16.5 28 M16 x 1.5 4.5 13-11-73 Series ZPT ZPT H-A16 (Male thread) 100 125 ZPT H-B (Female thread) 100 125 Hexagon width across flats 22 Width across flats 60 Width across flats 60 70 Hexagon width across flats 24 10 A B 8 A B 40 40 (mm) Model A 100 ZPT100H-B12 C M12 x 1.75

smcmaintenancepartslist

Material Applicable model Note) Qty. 3 5 3 5 3 5 FGF3A-40 FGF5A-60 FGF3B-40 FGF5B-60 FGF3-40 FGF5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 Stainless steel 304 BT-3S Replacement Parts 3 Basket Stainless steel 304 Part No. Qty. 1 1 1 1 1 No.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

IH2-10C 25 16 76 60 25 32 M16 x 1.5 26 M5 x 0.8 16 25 16 76 60 25 32 M20 x 1.5 31 M5 x 0.8 16 F J E 31.5 20 90 70 30 40 M24 x 1.5 36 M5 x 0.8 20 dH10 B series rod 40 31.5 145 115 45 60 M30 x 1.5 50 M6 x 1.0 30 40 31.5 145 115 45 60 M39 x 1.5 61 M6 x 1.0 30 H0.1 0.4 D 50 40 185 145 57 79 M48 x 1.5 76 M8 x 1.25 40 25 16 76 60 25 32 M16 x 1.5 26 M5 x 0.8 16 C 31.5 20 90 70 30 40 M20 x 1.5 31

Integrated Controller

B-B B Component Parts Component Parts (Right/Left side parallel only) No.

MY1

B 100 124 88.5 Operating range l Note) 9 10 6 B A MY1HT (High rigidity/High precision guide type) (mm) 63 50 Mounting position A 290.5 335.5 B 123.5 138.5 Operating range l Note) 5 5 A B 8-11-106

MHZ

MHZ Applicable Tubing Max. 5 MHF B 5 A E2 Nylon tubing T0425 TS0425 TU0425 TCU0425B-1 coil tubing Soft nylon tubing Polyurethane Polyurethane Description/ Model Specifications tubing MHL Auto switch mounting groove (Both sides) Outside diameter (mm) 4 1.0 13 20 to 60 Nylon 12 4 0.8 12 20 to 60 Nylon 12 4 0.5 10 20 to 60 4 0.5 20 to 60 Refer to the dimension table.

MHZ

MHZ Applicable Tubing Max. 5 MHF B 5 A E2 Nylon tubing T0425 TS0425 TU0425 TCU0425B-1 coil tubing Soft nylon tubing Polyurethane Polyurethane Description/ Model Specifications tubing MHL Auto switch mounting groove (Both sides) Outside diameter (mm) 4 1.0 13 20 to 60 Nylon 12 4 0.8 12 20 to 60 Nylon 12 4 0.5 10 20 to 60 4 0.5 20 to 60 Refer to the dimension table.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

M plug connector Rated voltage 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 to 120 VAC, 50/60 Hz 220 VAC, 50/60 Hz 1 2 3 4 5 6 7 9 Solenoid valve configuration Single solenoid Double solenoid Closed center Exhaust center Pressure center Manual override 1 2 3 4 5 24 VDC 12 VDC None Locking B type Locking C type Nil B C 240 VAC, 50/60 Hz Other Without auto switch B S 50 90 1 1 G CVRA1 B S 50 90 1

Electric Slide Tables

B-1 A-1 B-2 A-2 B-3 A-3 B-4 A-4 Connector D terminal no. 12 13 7 6 9 8 11 10 3 Signal Cable color Shield Brown Black Red Black Orange Black Yellow Black Vcc GND A A B B Z Z Connector B terminal no.

Parallel Style Air Gripper Series MHZ

MHZL2-25 K 25f8 96.2 24 15 25 D1 Applicable Tubing Max. 5 B 5 A E2 F Note 2) Nylon tubing coil tubing Soft nylon tubing Polyurethane Polyurethane Description/ Model Specifications Auto switch mounting groove (Both sides) tubing T0425 TS0425 TU0425 TCU0425B1 Outside diameter (mm) 4 0.5 20 to 60 4 1.0 13 20 to 60 Nylon 12 4 0.8 12 20 to 60 Nylon 12 4 0.5 10 20 to 60 Refer to the dimension

7.5

(16.3) 10 (7) 5.5 20.8 56.2 35 17.2 PE X DIN rail B A B A B A B A B A B A 9.9 Manual override (Locking type: Press, then rotate.)

CXS

A A a B B s j C f g t C0.5 C0.2 C0.2 b d e 45 45 Section A-A p k C0.5 45 C n h i l (d) C0.5 q m O Section B-B r (l) View C (mm) +0.2 0 l i o j k m n p q r s t b e g a c d f h Model 0 0.2 0.05 0.15 + 0.1 0 +0.2 0 3.5 +0.013 +0.001 CXS 6 2.75 M2.5 x 0.45 4.5 3.5 4.75 C0.5 2.8 0.5 4 3.5 3 3.5 16 0.1 M3 x 0.5 4 1 5.5 6 +0.2 0 0.05 0.15 0 0.2 + 0.1 0 +0.2 0 5 +0.016 +0.001 CXS10 4 M3 x 0.5 8 5

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

For details, refer to page 6-16-60. Normally closed (NC = b contact), solid state switch (DY7G/Y7H type) are also available.

Table of Contents

button Body O-ring Seal Stud Port B Port B Port B Port B Seal Guide Chuck Guide Chuck Collet Collet Port A Release button Port A 15-3-6 2 FR One-touch Fittings Manifold Series KRM Dimensions: KRM11 2-FB Applicable tubing O.D.

Tie-rod Type Hydraulic Cylinder

Hs Auto switch 12 D-B5/B6 15 22.5 A B 33 410 Auto Switch Mounting CHA Series Auto Switch Proper Mounting Positions (mm) D-G5/K59 D-G5W/K59W D-G59F/G5BA D-G5NT D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-F5/J59 D-F5W/J59W D-F59F/F5BA D-F5NT D-G39/K39D-A9/A9V D-A5/A6 D-A59W D-B5/B64 D-B59W D-A3/A44 Bore size (mm) CHQ A B A B A B A B A B A B A B A B A B A B A B CHK 40 20.5 21.5 17 18 22 23 12.5 13.5 10.5