A, The number of the switches: N/A, Type of Auto Switch Mounting: Band mounting, Head Cover Port Position: 90° to axis, Pivot Bracket: Shipped with pivot bracket, Rod End Bracket: Single knuckle joint, Type of Mount Support: U-Shaped Clevis Type, Custom-made Specifications: None, Lock unit magnet: Built-in magnet, Customized specification (port positions): -, Made-to-Order (hose nipple type

A, The number of the switches: N/A, Type of Auto Switch Mounting: Band mounting, Head Cover Port Position: 90° to axis, Pivot Bracket: Shipped with pivot bracket, Rod End Bracket: U-Shaped Knuckle Joint, Type of Mount Support: U-Shaped Clevis Type, Custom-made Specifications: None, Lock unit magnet: Built-in magnet, Customized specification (port positions): -, Made-to-Order (hose nipple

A, The number of the switches: N/A, Type of Auto Switch Mounting: Band mounting, Head Cover Port Position: 90° to axis, Pivot Bracket: Without bracket, Rod End Bracket: U-Shaped Knuckle Joint, Type of Mount Support: U-Shaped Clevis Type, Custom-made Specifications: None, Lock unit magnet: Built-in magnet, Customized specification (port positions): -, Made-to-Order (hose nipple type): -

Magnet: D (Built-in), Series: J2, Mounting: D (Double Clevis), Bore Size: 10mm, Stroke: 100mm, Cushion: Rubber Bumper, Head Cover Port Location: Perpendicular to Axis, Pivot Bracket: None, Rod End Bracket: W (Double Knuckle Joint), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.06～1, Cushion: Rubber cushion, Auto Switches: M9BW, Lead

A, The number of the switches: N/A, Type of Auto Switch Mounting: Band mounting, Head Cover Port Position: 90° to axis, Pivot Bracket: Shipped with pivot bracket, Rod End Bracket: Single knuckle joint, Type of Mount Support: U-Shaped Clevis Type, Custom-made Specifications: None, Lock unit magnet: Built-in magnet, Customized specification (port positions): -, Made-to-Order (hose nipple type

A, The number of the switches: N/A, Type of Auto Switch Mounting: Band mounting, Head Cover Port Position: 90° to axis, Pivot Bracket: Shipped with pivot bracket, Rod End Bracket: U-Shaped Knuckle Joint, Type of Mount Support: U-Shaped Clevis Type, Custom-made Specifications: None, Lock unit magnet: Built-in magnet, Customized specification (port positions): -, Made-to-Order (hose nipple

A, The number of the switches: N/A, Type of Auto Switch Mounting: Band mounting, Head Cover Port Position: 90° to axis, Pivot Bracket: Without bracket, Rod End Bracket: U-Shaped Knuckle Joint, Type of Mount Support: U-Shaped Clevis Type, Custom-made Specifications: None, Lock unit magnet: Built-in magnet, Customized specification (port positions): -, Made-to-Order (hose nipple type): -

Magnet: Built-in, Mounting: Double Clevis, Bore: 10mm, Stroke: 100mm, Head Cover: Perpendicular to Axis, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: H7B--Solid State, Gen. Purpose, 2 Wire, Lead Wire or Prewired Connector: 3m, Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting: Band Mounting, Cushion: -, Series: -

Magnet: D (Built-in Magnet), Series: J2, Mounting: D (Double Clevis), Bore Size: 10, Stroke: 100mm, Cushion: Rubber Bumper, Head Cover Port Location: Perpendicular to Axis, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Type

Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

Table of Contents

10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o o g g 1 O-ring seals separate vacuum and atmosphere. t Employs a magnetically coupled rodless cylinder with no air leakage from moving parts. n 1 r a L L e e e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and low particulate

High Vacuum Angle Valve

(P) (Pressure port) 50 Main exhaust solenoid valve 50 XLDV-40 to 160/With solenoid valve C (KF flange) (K flange) Fd Fn C XLA XL XL M M5 Port 3(R) (Exhaust port) Auto switch (Option) XLQ K XM XY Initial exhaust solenoid valve N 5.5 DXSA B G Main exhaust solenoid valve XVD M5 Port 1(P) (Pressure port) A XGT CYV 8.5 8.5 A (mm) Model A B C Fn G M N Fd K XLDV-40 XLDV-50 XLDV-63 XLDV-80 XLDV-100

ISO Cylinder

n A Rail mounting B Band mounting Head cover type *1 The symbol is Nil for no magnet.

Table of Contents

Use a 3-wire switch if this specification cannot be satisfied. Moreover, leakage current flow to the load will be n times larger when n auto switches are connected in parallel. 7. Do not use a load that generates surge voltage.

Table of Contents

If a cover is rotated when installing a cylinder or screwing a fitting into the port, it is likely to damage the junction part with cover. 75 + 55 (n 2) 20 + 50 ( n 2) (n = 2, 4, 6) 20 75 2 D-B59W 15 Caution Weight (kg) 1.

Aluminum High Vacuum Angle Valve

(P) (Pressure port) 50 Main exhaust solenoid valve 50 XLDV-40 to 160/With solenoid valve C (KF flange) (K flange) Fd Fn C XLA XL XL M M5 Port 3(R) (Exhaust port) Auto switch (Option) XLQ K XM XY Initial exhaust solenoid valve N 5.5 DXSA B G Main exhaust solenoid valve XVD M5 Port 1(P) (Pressure port) A XGT CYV 8.5 8.5 A (mm) Model A B C Fn G M N Fd K XLDV-40 XLDV-50 XLDV-63 XLDV-80 XLDV-100

Free Mount Cylinder

Use a 3-wire switch if this specification cannot be satisfied. Moreover, leakage current flow to the load will be n times larger when n auto switches are connected in parallel. 6. Do not use a load that generates surge voltage. If driving a load such as a relay which generates a surge voltage, use a contact protection box.

Smooth Cylinder/Low Speed Cylinder

(n=2, 3, 4, 5) (n-2) 2 35 + 35 (n-2) 20 + 35 (n=2, 4, 6) Note 3) D-M9V 5 35 20 (n=2, 3, 4, 5) (n-2) 2 25 + 35 (n-2) 15 + 35 (n=2, 4, 6) Note 3) D-A9V 5 25 15 (n=2, 3, 4, 5) (n-2) 2 D-M9WV D-M9AV 35 + 35 (n-2) 20 + 35 (n=2, 4, 6) Note 3) 10 35 20 (n=2, 3, 4, 5) (n-2) 2 50 + 45 (n-2) D-C7 D-C80 15 + 45 (n=2, 4, 6) Note 3) 10 50 15 (n=2, 3, 4, 5) D-H7 D-H7W D-H7NF (n-2) 2 60 + 45 (n-2) 15 +

Electric Actuator/Slider Type

3 q u t y u o A !9 r e @0 !0 !2 !5 !6 !4 i A w A-A Component Parts No. Description Material Note No.