HRX-OM-M090

Facility having a small installation area (that can not vent the air naturally) Make a forced air exhaust vent on a wall at a high level and an air vent on a wall at a low level.

HRX-OM-R016

Facility having a small installation area (that can not vent the air naturally) Make a forced air exhaust vent on a wall at a high level and an air vent on a wall at a low level.

HRX-OM-R005

Facility having a small installation area (that can not vent the air naturally) Make a forced air exhaust vent on a wall at a high level and an air vent on a wall at a low level.

HRX-OM-W038

Facility having a small installation area (that can not vent the air naturally) Make a forced air exhaust vent on a wall at a high level and an air vent on a wall at a low level.

HRX-OM-O021

Facility having a small installation area (that can not vent the air naturally) Make a forced air exhaust vent on a wall at a high level and an air vent on a wall at a low level.

modular-press-e

switch with piping adapter Note 7) Y24-01 02 Y34-01 02 Y54-03 04 Cross spacer Note 7) Y14-M5 Y14-M5 Note 1) in part numbers for a round pressure gauge indicates a type of connection thread.

Modular F.R.L. Pressure Control Equipment

switch with piping adapter Note 7) Y24-01 02 Y34-01 02 Y54-03 04 Cross spacer Note 7) Y14-M5 Y14-M5 Note 1) in part numbers for a round pressure gauge indicates a type of connection thread.

E-P HYREG ® Series VY1 1

1 E-P HYREG Series VY1 A hybrid regulator is created from a regulator and a solenoid valve F.R.L. AV AU Stepless control through electric signals AF A maximum effective area of 670 mm2 (2B) can be covered by the combination of an ultra-compact electro-pneumatic pilot valve (22.4 x 30 x 39) and a 3 port, high-capacity exhaust main regulator (Series VEX100).

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Description Material Note Body A PBT Elbow body PBT No.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 M5 x 0.8 AS221F-01 AS231F-01 R 1/8 AS221F-02 AS231F-02 R 1/4 AS321F-02 AS331F-02 R 1/4 AS321F-03 AS331F-03 R 3/8 Elbow type AS421F-04 AS431F-04 R 1/2 AS121F-U10/32 AS131F-U10/32 10-32 UNF AS221F-N01 AS231F-N01 NPT 1/8 AS221F-N02 AS231F-N02 NPT 1/4 AS321F-N02

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

L ZY O L ZF G H F ZP K J SP ZCUK B C E D I A 2 x 4.5 AMJ AMV AEP HEP Related Equipment A B C D E F G H I J K L Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC051-01 ZFC051-03 58.5 12.75 12.75 2 3.2 4 33 25 10 10.5 10.5 12 8.5 13.75 58 12.5 12.5 1/8" 5/32" ZFC100-04 4 ZFC100-06 6 53.2 9.1 14.1 30 10 18 11.6 19.5 23 20 29 ZFC101-03 5/32" ZFC101-07 1/4" ZFC200-06 6 ZFC200-08 8 67 15.5 17.5 34 14 22

Suction Guard (Produced upon receipt of order) FHG Series

When using a differential pressure indication switch and if a filter clogged signal is incorporated into the sequence circuit of the machine, make sure to design the system so the filter clogged signal does not operate until normal operation starts. 10 Pressure drop (kPa) -04/06/08 -10/12/16 -20/24 COM. N.O. N.C.

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

Plug: KPP Applicable fitting size d Weight g D Model L A L A 4 KPP-04 6 32 13.8 0.4 D d 6 KPP-06 8 35 15.7 0.7 8 KPP-08 10 39 17.3 1.1 Applicable fitting size d 10 KPP-10 12 43 19.2 1.7 12 KPP-12 14 45.5 20.7 2.5 The plug is commom for KPQ, KPG and KP series. 360 KP/KPQ/KPG Series Specific Product Precautions 1 Be sure to read this before handling the products.

Table of Contents

a 2 port solenoid valve is connected to the right: When 2 air catch sensors are connected or when a 2 port solenoid valve is connected to the left: Joint bracket ISA-3-A Lead wire with connector (Individual wiring type) ISA-8-A ISA-8-B Bracket ISA-4-A DIN rail mounting bracket ISA-9-A Straight, 5 m A pair consists 1 set.

Metal Seal/Rubber Seal Series VQ Body Ported

SOL. location A B A B A B A B () A B () () 0 1 2 3 4 5 6 Double Double Single SI unit A side B side 3 position A B A B B A B A B A VQC Double Double Single SI unit A side B side 3 position Stations 1 2 3 4 5 SQ The places of asterisk are not used. 3 position uses two stations for wiring.

High Purity Chemical Valve

Symbol A R P 4 Metric sizes 03 04 06 3 4 6 Valve type N.C. 0 N.C.

HRX-OM-R026

In case of facility having a small installation area (that can not vent the air naturally) Make a forced air exhaust vent on a wall at a high level and an air inlet on a wall at a low level. 3.

HRX-OM-W058

Facility having a small installation area (that can not vent the air naturally) Make a forced air exhaust vent on a wall at a high level and an air vent on a wall at a low level.

HRX-OM-X027

Facility having a small installation area (that can not vent the air naturally) Make a forced air exhaust vent on a wall at a high level and an air vent on a wall at a low level.

HRX-OM-R039

Facility having a small installation area (that can not vent the air naturally) Make a forced air exhaust vent on a wall at a high level and an air vent on a wall at a low level.