Body Size: 1/2 Standard, Port Size: NPT1/2, Applicable Tubing O.D.: ø3/8"

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter-Out, Format: [Elbows] Cylinder direct-connected elbow type, Environment, Applications: Standard, Thread Portion Material: [303/304 Stainless Steel] Stainless steel 303, Knob Type: Resin, Lock Nut Option: Round Shape Lock Nut, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 1/2, Option: With Seal, Types

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: Universal, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Resin, Lock Nut Option: Round Shape Lock Nut, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 1/2, Types of Screw: NPT, Applicable Tube O.D. mm(mm): -, Applicable

IR1000/2000/3000

N01 Connection NPT 1/8 N02 Connection NPT 1/4 Port size N03 Connection NPT 3/8 Option specifications Application Size Symbol N04 Connection NPT 1/2 IRV3000 IRV2000 IRV1000 F01 Connection G 1/8 01 02 03 04 1/8 1/4 3/8 1/2 F02 Connection G 1/4 F03 Connection G 3/8 F04 Connection G 1/2 Accessory (Option) Part No. Part no.

Silencer Series AN

12 90 (5.0) A B D NAN500-N06 34 160 (8.8 NAN200-N02 63 22 19 NAN600-N10 1 270 (15) NAN300-N03 84 25 22 NAN700-N12 114 440 (24) NAN400-N04 92 30 27 NAN800-N14 112 590 (33) NAN500-N06 107 46 36 NAN900-N20 2 960 (53) NAN600-N10 132 50 41 Note: When ordering PT Ports, remove (N) from Model Number Eg: AN200-02 NAN700-N12 200 74 55 NAN800-N14 233 74 60 NAN900-N20 263 86 70 FOR FURTHER TECHNICAL

Nozzle Diameter: 20 (ø2.0mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N03 (Screw-in NPT 3/8), VAC: N04 (Screw-in NPT 1/2), EXH: N04 (Screw-in NPT 1/2), Accessories: N (w/o Bracket, w/o Silencer)

Nozzle Diameter: 20 (ø2.0mm), Vacuum Pressure: S (-90 kPa), SUP: N03 (Screw-in NPT 3/8), VAC: N04 (Screw-in NPT 1/2), EXH: N04 (Screw-in NPT 1/2), Accessories: N (w/o Bracket, w/o Silencer)

Nozzle Diameter: 20 (ø2.0mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N03 (Screw-in NPT 3/8), VAC: N04 (Screw-in NPT 1/2), EXH: N04 (Screw-in NPT 1/2)

Nozzle Diameter: 20 (ø2.0mm), Vacuum Pressure: S (-90 kPa), SUP: N03 (Screw-in NPT 3/8), VAC: N04 (Screw-in NPT 1/2), EXH: N04 (Screw-in NPT 1/2)

ZL3-OM00601

N06 NPT3/4 5/16(inch) 6) Rated voltage N04 2xNPT1/2 5 DC24V *1: The thread shape complies with the G thread standard (JIS B 0202).

ZL3-OM00801

N06 NPT3/4 5/16(inch) N04 2xNPT1/2 6) 5 DC24V *1G JIS B0202 ISO1603 ISO1179 8) Z 7 L L 0.3(m) 11) A NPN LO B PNP M M 0.3(m) MO 12) 9) M SI (kPa) D P (:psi) E 10) 14 GN (G) B G *7ZL212 27mm ZL212 (2 /1 , 4 ) E (2 ) F (2 ) V (1 ) 13 G 2m) W (2m) 5 No.ZL3-OM00801-A 2. 2.1 (1/P) (2/V) ZL3 ZL6 (3/E) // / (G) (2/V) 2.2 ZL6 1 ZL6 (ZL6-SC1-A) 2), 6 No.ZL3-OM00801-A 3. 3.1

100

Nil Silencer exhaust 6 600 L/min (ANR)*1 Symbol Vacuum (2/V) port Supply (1/P) port 06 Rc3/4 P Port exhaust (Rc1, G1, NPT1)*3 *1 Branch, Port exhaust 8 (Metric) 04 2 x Rc1/2 (Branch specification) F06 G3/4*2 *3 The same thread type selected for e is used for the port. t Supply valve/Release valve combination u Electrical entry F04 2 x G1/2*2 (Branch specification) N06 NPT3/4 5/16" (Inch) N04

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Min. 1/8" 5/32" 3/16" 1/4" 1/8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" AS131FM-U10/32-01 AS131FM-U10/32-03 AS131FM-U10/32-05 AS131FM-U10/32-07 AS231FM-N01-01S AS231FM-N01-03S AS231FM-N01-05S AS231FM-N01-07S AS231FM-N01-09S AS231FM-N02-03S AS231FM-N02-05S AS231FM-N02-07S AS231FM-N02-09S AS231FM-N02-11S 19.8 20.3 21.3 21.6 24.4 24.9 26.8 29.9 30.9 30.6 31.1 34.2 35.2 38.7 8.4 9.3

Series AS-FM/AS-M/ASD-FM

Min. 1/8" 5/32" 3/16" 1/4" 1/8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" 19.8 20.3 21.3 21.6 24.4 24.9 26.8 29.9 30.9 30.6 31.1 34.2 35.2 38.7 AS131FM-U10/32-01 AS131FM-U10/32-03 AS131FM-U10/32-05 AS131FM-U10/32-07 AS231FM-N01-01S AS231FM-N01-03S AS231FM-N01-05S AS231FM-N01-07S AS231FM-N01-09S AS231FM-N02-03S AS231FM-N02-05S AS231FM-N02-07S AS231FM-N02-09S AS231FM-N02-11S 8.4 9.3

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS131FM-U10/32-01 AS131FM-U10/32-03 AS131FM-U10/32-05 AS131FM-U10/32-07 AS231FM-N01-01S AS231FM-N01-03S AS231FM-N01-05S AS231FM-N01-07S AS231FM-N01-09S AS231FM-N02-03S AS231FM-N02-05S AS231FM-N02-07S AS231FM-N02-09S AS231FM-N02-11S 1/8" 19.8 8.4 28.7 7 17.5 12.7 5/32" 20.3 9.3 10.8 33.8 28.8 10-32 UNF 8 9.6 9.3 30.1 25.1 34.5 3/16" 23.3 16.5 21.3 11.4 8 31.9 1/4" 20.7 13.7 21.6 12 17 1/8"

Slit Valve

Description Part number Material Corresponding model XL XGT22-32XGT0101-2-1S Gate 1 A6063 XGT22-46236XGT0402-2-1S XLQ FKM XGT200-9-13S XGT22-32XM XY Kalrez 4079 XGT200-9-14S O-ring (Gate) 2 FKM XGT200-9-7S XGT22-46236Kalrez 4079 XGT200-9-9S DXGT22Wiper 3 XGT200-4-9S O-ring (Body opening side) 4 FKM XGT200-9-12S XSA XGT22O-ring (Bonnet assembly) 5 XGT200-9-11S XGT22Holding bolt 6 Stainless

Body Size: 6 (1/2 Basis), Port Size: N04 [Cylinder Side (NPT 1/2) Pilot Port (NPT 1/4)], Applicable Tube OD: Ø12

Body Size: 6 (1/2 Basis), Port Size: N04 [Cylinder Side (NPT 1/2) Pilot Port (NPT 1/4)], Applicable Tube OD: 13 (Ø1/2")

Body Size: 6 (1/2 Basis), Port Size: N04 [Cylinder Side (NPT 1/2) Pilot Port (NPT 1/4)], Applicable Tube OD: 13 (Ø1/2"), Lock Nut: J (Round)

IR1000/2000/3000

Standard specifications Order made specifications Set pressure max. 0.4MPa 1 Set pressure max. 0.8MPa 2 Series IR3000 Connection Rc(PT) 1/8 01 Connection Rc(PT) 1/4 02 Connection Rc(PT) 3/8 03 Connection Rc(PT) 1/2 04 Bracket B Accessories Pressure gauge G Pressure gauge reverse mounted R Connection NPT1/8 N01 Series IR2000 Connection NPT1/4 N02 Connection NPT3/8 N03 Connection NPT1/2 N04