HRX-OM-R026

AL37 sensor failure AL38 Compressor discharge temp. rise AL39 Internal unit fan stoppage Set time AL40 Dust-proof filter maintenance 500h 1 to 9h *12 AL41 Power stoppage AL42 Compressor waiting AL43 Fan breaker trip *12 AL44 Fan inverter error *12 AL45 Compressor breaker trip *13 AL46 Compressor inverter error AL47 Pump breaker trip *13 AL48 Pump inverter error Air exhaust fan stoppage

VQ7-6/7-8

06 C12 Rc 1/2 Rc 3/4 One-touch fitting for 12 Note) It is not applicable to One-touch fittings. 03 04 3/8 1/2 Thread type Rc Nil NPTF T G F Replacement Parts (For manifold block) Description Material Qty.

5 Port Solenoid Valve

PROFINET SD0 Serial kit without SI Unit VQC 4/5 VQC 4/5 32 M12 1 to 12 stations SNB 16 1 to 8 stations (12 stations, 16 points) SNC 32 D-sub Note 3) 1 to 12 stations SND 16 1 to 8 stations (12 stations, 16 points) SVA CC-Link 32 M12 1 to 12 stations SVB 16 1 to 8 stations (12 stations, 16 points) SDA EtherCAT 32 M12 1 to 12 stations SDB 16 1 to 8 stations (12 stations, 16 points) SFA PROFINET

HRX-OM-W038

Centigrade(oC) Fahrenheit(oF) 5.13 12 Changing pressure unit Pressure unit can be changed.

HRX-OM-O021

Centigrade(oC) Fahrenheit(oF) 5.13 12 Changing pressure unit Pressure unit can be changed.

SQ1000/2000

When ordering with manifolds, add "-N" at the end of the manifold number. 1 2 3 4 5 6 7 8 ... n: Stations 53 Silencer cover Blanking plug (for One-touch fitting) L Dimensions 04 06 08 10 Applicable fitting size d 4 6 8 10 A Model A L D KQ2PKQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 16 18 20.5 22 32 35 39 43 6 8 10 12 This is inserted into the cylinder port and SUP and EXH ports that are not used.

0.4

P=17.5 1 2 3 4 5 6 7 8 n: Stations 53 Silencer cover Blanking plug (For One-touch fitting) L Dimensions 04 06 08 10 Applicable fittings size d 4 6 8 10 A A L D Model KQ2PKQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 16 18 20.5 22 32 35 39 43 6 8 10 12 It is inserted into an unused cylinder port and SUP/EXH ports.

Booster Regulator/Air Tank

04 ANA1-04 G27-20-01 AN20-02 ANA1-02 KT-VBA10A-18 AN40-04 ANA1-04 SRF ITV Note 1) In the case of options GN, two pressure gauges and one silencer are included in the same container as accessories.

•

171 (6) (13) ZPn3 10 12 10 12 10 12 ,'6.5) (6) : (13) (6.5) (6) ' :13) 1 1 6.5) (6) (13) II . 13 (7) (7) (13) ZPn6 I ZPT20 IS 26 15 26 15 15 15 16 .

HRX-OM-W058

Centigrade (oC)Fahrenheit (oF) 5.13 12 Changing pressure unit Pressure unit can be changed.

CL

12 12 13 149 159 162 178 11 11 11 12 12 12 12 13 149 159 162 178 125 135 136 151 16 16 16 16 186 201 204 230 12 12 12 13 149 159 162 178 205.5 227.5 208.5 235 230.5 255 3.1-30 SeriesCLG1 Accessory Dimensions Single Knuckle Joint Double Knuckle Joint (Knuckle pin and snap ring are packed.)

HRX-OM-X027

Centigrade (oC)Fahrenheit (oF) 5.13 12 Changing pressure unit Pressure unit can be changed.

VM

12 46 63 31.5 31.5 21.5 4 67 14 21.8 21.8 17.5 3.2 Applicable tubing O.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Mass (g) 22 22 30 30 39 39 Model Tubing size ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 7 7 12 12 16 16 6 6 8 8 10 Metric size Unrestricted 360 piping tube mounting.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Dimensions Applicable tubing O.D. d Inch Size Metric Size L3 (1) Model L3 Model Weight (g) Weight (g) M1 d M1 D1 D2 L2 L1 D2 D1 L2 L1 d Min. 24.9 25.5 Min. 24.9 25.5 26.6 27.6 28.7 30.2 31.5 Max. 27.7 28.5 Max. 27.7 28.5 29.8 32.6 33.7 35.2 36.5 6 7 8 9 12 18 21 24 26 31 3.2 4 6 4 6 6 8 6 7 8 12 13 26 31 AS1001FM-23 AS1001FM-04 AS1001FM-06 AS2001FM-04 AS2001FM-06 AS2051FM-06 AS2051FM-08 AS1001FM

Digital Flow Switch (Manifold type)

Flow range: 0.5 to 4 L/min (symbol 04) Pressure: 0.3 MPa Piping bore size: 12 Flow range: 2 to 16 L/min (symbol 20) Pressure: 0.3 MPa Piping bore size: 12 Flow range: 5 to 40 L/min (symbol 40) Pressure: 0.3 MPa Piping bore size: 16 -60No.PF-OMW0004-B Analogue output Analogue output (Flow) (PF3W704/720/740) A B C Voltage output 1 V 1.5 V 5 V Current output 4 mA 6 mA 20 mA Rated flow [L/min

3 Port Air Operated Valve

Series/Base Mounted/Dimensions 3/8, 1/2 2(A) port Standard/VPA744-103 04 A B 40 16 64 24 3/8, 1/2 3(R) port 1/8 12(PA) port 18 67 2 x 6.2 (For mounting) NO 2A NC 53 66 12 12 3R NC 1P (1/8) 12(PA) port 11.5 16 115.1 107.1 24 96.5 95.5 32.5 M5 x 0.8 (Breathing hole) 16 X 40 3/8, 1/2 1(P) port 80 03 04 A B For vacuum/VPA744V-13/8, 1/2 2(A) port 40 16 64 3/8, 1/2 3(R) port 24 18 67 2 x 6.2 (

Combination Cylinder

12 12 13 149 159 162 178 11 11 11 12 12 12 12 13 149 159 162 178 125 135 136 151 190 16 16 16 16 12 12 12 13 149 159 162 178 186 201 204 230 205.5 227.5 208.5 235 230.5 255 3.1-30 Fine Lock Cylinder/Double Acting Single Rod Series CLG1 Construction CL MLG CNA CNG With air cushion MNB CNS CLS CB CV/MVG CXW CXS Component Parts Material Note Description Material Note Description Rolled steel

VQ7-6/7-8

One-touch fitting 04 06 C12 Cylinder port size Rc3/8 Rc1/2 03 04 < Manifold block replacement parts> Part No.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

to 04 type Bushing PBT 13 01 to 04 type O-ring NBR M3 type PVC 14 Gasket M5, U10/32 type NBR, Stainless steel Note 1) AS220 type, AS320 type: Electroless nickel plated.