Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

1 8 : : 20 stations 20 R port Rc(PT) 1 8 40 Type (5 Port/Base mounted) Applicable solenoid valve SYJ5l40-l SYJ5l43-l SYJ5l50-l SYJ5l53-l Applicable blank plate assembly SYJ5000-21-1A How to Order SS5YJ5-40-05 -M5 P port Rc(PT) 1 8 Stations 02 2 stations : : 20 20 stations Applicable individual exhaust spacer assembly SYJ5000-17-1A Applicable interface regulator assembly ARBYJ5000-00-P R

KR

(mm) Note) D1 D2 L I Q M Nylon Urethane KGUD04-01 1 8 17 25 43.5 47 50.5 53.5 21 39.5 41 13 10.4 4.2 4.2 9.7 16 10.4 12.8 4 1 4 KGUD04-02 14 1 8 1 4 KGUD06-01 KGUD06-02 26 46.5 47.5 11.7 17 13.4 10.6 12.8 12.8 15.2 6 29 17 Reference dimensions after R thread installation.

Modular/F.R.L. Units Series AC

G46-2-02 G46-10-02-L G46-2-02-L G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L Round type Standard 0.02 to 0.2 MPa setting Standard 0.02 to 0.2 MPa setting Standard 0.02 to 0.2 MPa setting Pressure gauge Note 1) Round type (with color zone) Square embedded type Note 2) GC3-10AS [GC3P-010AS (Pressure gauge cover only)] GC3-2AS [GC3P-010AS (Pressure gauge cover only)] ISE35-N-25-MLA [ISE35-N-25

ZP

L J Model A B C D E 2 F G H J K L M N P Vacuum inlet direction q Pad dia.

Clean Gas Filter

SFA101-02 SFA200-02 SFA201-02 SFA300-02 SFA301-02 46 76 IDFB 51 96 IDH 0.0001 1000 1 10 100 59 120 ID Flow rate L/min (ANR) IDG SFA20 SFA102, SFA202, SFA302 IDK 0.1 2 x TSJ 1/4 Inlet pressure AMG 0.3 MPa Max. flow rate line AFF Pressure drop MPa 0.1 MPa B IN 0.01 AM 0.7 MPa AMD A 0.001 AMH 0.5 MPa A B Model Connection SFA102-02 SFA202-02 SFA302-02 76 96 120 89 93 101 TSJ 1/4 Tube Swage Joint

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Note VP344 VP544 VP744 VP 3 1 202 00 8 Gasket HNBR VP300-217-1 VP500-217-1 VP700-217-1 VP300-202-l VP500-202-l VP700-202-l 9 Sub-plate Aluminum die-casted Hexagon socket head bolt (1 pc.)

modular-press-e

Pressure Control Equipment Industrial Filters Bracket assembly Note 1) AW20P-270AS AW30P-270AS AW40P-270AS AR30P-270AS AR30P-260S AW20P-270AS AR20P-260S AR40P-270AS AR40P-260S G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L Set nut AFM20P-060AS AFM30P-060AS AFM40P-060AS G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L Round type Note 2) Standard Drain 0.02 to 0.2 MPa setting Standard Round type Note 2

Modular F.R.L. Pressure Control Equipment

Pressure Control Equipment Industrial Filters Bracket assembly Note 1) AW20P-270AS AW30P-270AS AW40P-270AS AR30P-270AS AR30P-260S AW20P-270AS AR20P-260S AR40P-270AS AR40P-260S G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L Set nut AFM20P-060AS AFM30P-060AS AFM40P-060AS G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L Round type Note 2) Standard Drain 0.02 to 0.2 MPa setting Standard Round type Note 2

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

(LL) 52-SY5140 (R) -LL-02 L 104 (Lead wire length) Insulation: Red (+) Insulation: Black () 0.3 mm2 4.1 34.5 37.2 Cable type (TT) 52-SY5140 (R) -TT-02 Max.10 L 120.8 (Lead wire length) Lead wire marking No.1 (+), No.2 () 0.75 mm2 5.9 14 ATEX Compliant Base Mounted Type Series 52-SY5000 Dimensions 2-position double L plug connector (L) 52-SY5240 (R) -L-02 19 18 9.5 2 x 4.3 (Mounting holes)

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

Secondary Batteries

pre-wired connectorSDPC M9BWSDPC *Order part numbers for auto switches alone are D-M9BW(V)L-900, D-M9BW(V)SDPC-900 and DY7BW(V)L-900.

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

ASR ASQ AS1201F, AS1211F AS2201F-01, AS2211F-01 AS2201F-02, AS2211F-02 Inlet pressure 0.5 MPa Inlet pressure 0.5 MPa Inlet pressure 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Number of needle rotations Number of needle rotations Number of needle rotations AS4201F, AS4211F AS3201F, AS3211F Inlet pressure 0.5 MPa Inlet pressure 0.5 MPa Flow rate (L/min (

Dual Speed Controller with One-touch Fitting Series ASD

14 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 20 12 12 10,11 10, 11, 12 08, 09 1000 10 15 8 500 06, 07 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle rotations Number of needle rotations 15-9-53 Series ASD-FG Construction ASD230FG ASD330FG/430FG ASD530FG/630FG ASD530FG-02 @1 !

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

gasket positioning Rc(PT)1/4 P port VQZ VQD 0 1 0 1 DIN connector (Y): VQZ312 (R)wYwC6, C8, C10, 02 L plug connector (L): VQZ312 (R)wLwC6, C8, C10, 02 VZS 107.5 <108.5> 300 VFS (Lead wire length) 71 <72> Indicator light VS VS7 111.5 MAX.10 31.5 <35> Applicable cord O.D.

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: 0.62(n1) + 2.6 F, L, T1 kits 12 stations L F kitD-sub connector L T kitTerminal block box L T1 kitIndividual terminal block kit L L kitLead wire L S kitSerial transmission 3/8 1/2 Side 3/4 Option Direct exhaust with silencer box SV VQ5l00 VQ5l01 T kit 12 stations VQ5000 VV5Q51-lll Not including valve weight.

I

ISE5-02-27L Two Output NPN Open Collector 30V, 80mA ISE5-02-67L Two Output PNP Open Collector 80mA ZSE5B02 L O P T I O N S L 3m W I R I N G S P E C I F I C AT I O N S Non-Backlit (Std) B Backlit LCD S W I T C H S P E C I F I C AT I O N S P I P I N G S P E C I F I C AT I O N S 26 Analog 3-Wire 27 2 Output (NPN) 4-Wire 67 2 Output (PNP) 4-Wire 02 PT 1/4 T2 NPTF 1/4 T E C H N I C A L SPECIFICATIONS

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Stainless Steel 316 Fittings KFG2 Series RoHS Compact and Light Compact and Light Compact and Light KQ2 KQB2 Approx.44% KS KX New New Current model Shorter Dimensions KM KFGL0806-02S KFG2L0806-02 KFG2L0806-02 31.2 mm 17 .4 mm KF Approx.37% M Lighter Weight H/DL L/LL KFG2L0806-02 KC 38 g 24 g KK KK130 Material DM KDM KB Grease-free/Can be used with steam.

0.4

L dimension 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 L dimension No. 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 L dimension No. 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 L dimension No. 57 F kit P kit J kit G kit T kit L kit S kit M kit Construction Semistandard Manifold Optional

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port) 1/4, 3/8 [1(P), 3(R) port] 13 (14) 21 (19) 47 ( ): VQZ315-lGl1-01 L-type plug connector (L): VQZ3l5l-lLl1DIN terminal (Y): VQZ3l5l-lYll102 03 02 03 86.1 [88.3] (Lead wire length) Approx. 300 57 [64] Max. 10 94 54.1 Pg7 Applicable cable O.D. 3.5 to 7 Unless otherwise indicated, dimensions are the same as Grommet (G). [ ]: AC 86.3 78.8 67.5 02 03 M-type plug connector

SYJ300/500/700

plug connector (L): SYJ74-LM plug connector (M): SYJ74-M01 02 01 02 DIN terminal (D): SYJ74-D01 02 M8 connector (WO): SYJ74-WO01 02 VZ VS VFN Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 89.6 Max. 10 58 [65] 91.5 84 42.6 62.5 72.7 M8 x 1 45 69.1 [76.1] Approx. 300 (Lead wire length) Pg7 80.6 [82.8] 90.6 70.8 [73] 79.7 72.3 65.8 23 15 23 15 23 15 23 15 48 48 48 48 12 12 12