VQC

spacer with residual pressure release valve VVQ4000-25A-1 Interface regulator (A regulator) ARBQ4000-00-A-1 Interface regulator (B regulator) ARBQ4000-00-B-1 Interface regulator (P regulator) ARBQ4000-00-P-1 P R1 R2 SUP/EXH block plate VVQ4000-16A 02 Rc 1/4 Cylinder port sizes Fill out in case of mixed sizes (CM/LM/NM). 03 Rc 3/8 C8 (N7) C10 (N9) With 8 (1/4") One-touch fitting With 10 (

V

Tube 01 Rc 18 02 Rc 14 07 1/4 Tube 11 3/8 Tube T01 1/8NPT T02 1/4NPT S Y M B O L S T Y P E I N L E T P O R T B Box type D Body type 06 6mm Tube 08 8mm Tube 01 Rc1/8 07 1/4 Tube 09 5/16 Tube T01 1/8NPT V A C U U M P R E S S U R E S 660mm Hg L 360mm Hg D I M E N S I O N S M A X I M U M S U C T I O N F L O W R AT E/ A I R C O N S U M P T I O N U N I T (ln/min) Nozzle Diameter mm Specifications

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

0 (B) (A) 2 4 (B) (A) 2 4 4(A) 3 5 1 3 5 1 (EB) (P) (EA) (EB) (P) (EA) 2(B) i 5(EA)/3(EB) 1(P) 2 position double with back pressure check valve 2 position double 2 position double o t r e w y q !1 u !

High Purity Chemical Valve

8 1/2 Port size (port P) 3/4 1/4 3/8 1/2 Port size (port A) LVH Note 1) Contact SMC if the manifold will be used with vacuum and A P flow.

Prevents Micro-Bubbles

P P With flow rate adjustment PA PA LVC20A-S07-1 2 sets 2 sets Valve part no. (stations 1 & 2) LVC20A-S07 1 set 1 set Valve part no. (station 3) N.C.

JXCx-OMT0005CN

(P.23) 17./P.70 USB LAN 8 - 2.4 () 1 JXC-CPW JXCD1 1 JXC-CPW 1 DeviceNet JXC-CD-S T JXC-CD-T *1 1 DeviceNet *2 JXC-CD-S JXC-CD-T 1 *1 *2 [] (LEC-T1-3G) (LEC-W2) (USB ) P5062-5 2 3.4 (P.16) 3 4.1 Node Address/ Data Rate (P.18) 4PLC PLC 5 5.(P. 23) 9 - 6 DC24V LED LED PWR ALM LED 8.LED (P.31) JXCLEDALM DeviceNet SI I/O 16.

VY511, VYU5

Preparation completed (READY) Output signal Operating pressure range 0.2 to 0.7MPa Valve output: 24V DC, 1.8W, 2 pieces E-P HYREG valve output: 24 V DC, 1.3W, 1 piece 0V DC to 5V DC, 1mW, 1 piece Valve output Set pressure range 0.2 to 0.7MPa VEX3222-5M: M type plug connector VY1200-00-N: DIN connector Electrical entry Temp range 0 to 50C No condensation Humidity range 35 to 85% No condensation

AR20-B to AR60-B

[MPa] 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure [MPa] 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure [MPa] AR50(K)-B AR60(K)-B 0.25 0.25 Outlet pressure [MPa] Outlet pressure [MPa] Set point Set point 0.2 0.2 0.15 0.15 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure [MPa] 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure [MPa] 71 Regulator AR10-A Series Regulator AR20

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

. . p. 19 Made to Order. p. 26 Function Details. . p. 27 Safety Instructions.

Direct Solenoid

..p s y. itrdu.r* 6p,{r) res$dtsLdi.O oF .td d 16, (1) indaaiorrigtrtGdrbry.b r 7 a 1 8, (1) d.t 19, (21 dsi 13, l2l (H 121. and O )dol7 {valw tvDe'F1 1 3 2 1 5 AXT333-16 1 5 1 1 1 a E K l9 I oao) 4.aa t122) 3.25 (43) 136) L0a (23) en 1.09 (23) 06j 1.63 0) 136) axl3i,t12-2 2 Hold ddn bolls r'd bd(waBlm I&s2 !

Antistatic One-touch Fittings Series KA

Soft nylon Polyurethane 4 3.2 KAT23-00 17.5 18 20 9.6 10.4 12.8 15.5 16 17 15.2 18.5 20.9 4.3 4.5 5.3 18.5 21 22 KAT04-00 KAT06-00 13.4 13.4 6.4 6.9 3.4 2.9 45.4 45.4 28.4 28.4 17.7 17.7 11 8 5 8 6 KAT08-00 6 6.8 7.5 23 26.5 28.5 16 25 12 10 KAT10-00 KAT12-00 29 BranchY: KAU Effective orifice (mm 2) Weight (g) Applicable tube O.D. (mm) L2 P Q L1 M D Part No.

Vacuum Unit Ejector / Vacuum Pump System

ZK2-OM01301 Manifold ZZK2 04 A A 1 L 00 00 (1) (2) (3) (4) (5) (6) Remains blank when no option is selected. (1) Number of stations Note 1) Symbol Stations 01 1 station 02 2 stations 10 10 stations Note 1) In the case of an ejector, for an adequate performance, the number of stations when operated simultaneously depends on the nozzle diameter.

Modular/F.R.L. Units Series AC

Pressure Switch with Piping Adapter JIS Symbol IS1000E 30 03 Body size Description Symbol 20 30 40 Nil N Note) F Note) Thread type Rc NPT G + 01 02 03 04 06 1/8 1/4 3/8 1/2 3/4 Left Right Port size Pressure switch with piping adapter + Regulating pressure range Pressure display Lead wire length Symbol Mounting position Nil X250 P Note) X250-P Note) X202 X252 X202-P Note) X252-P Note) X201

Soft Start-up Valve

SI units: MPa Z Name plate and pressure gauge in imperial units: psi *1 *1 *1 *1 *1 Only for the NPT thread -18- AV L 20 00 02 B A Manual operation AV L 20 00 02 B 1 D A with solenoid valve Lockout type Symbol Description Body size 20 30 40 50 NIL Rc Thread type N NPT F G 02 1/4 03 3/8 Port size 04 1/2 1(P), 2(A) 06 3/4 10 1 a Mounting NIL Without mounting option B With bracket Option b

VSA4

Attached parts 1 4 3 8 1 2 1 4 3 8 1 2 Blank plate XT015-4A XT016-5A XT038N-4A AXT394A AXT393A AXT396A Gasket, Bolt Interface speed control Gasket, Bolt Indicate valve and option number with the manifold base number. (Manifold base) VVSA430-05N1 1 (2 position single) VSA4134-00 3 (2 position double) VSA4234-00 1 (Blank plate) XTO16-5A 1 5-3-38

Title not found

:..1 : 4 0 0 . 1 > -90 . : : , ' : r ' ] t r , , l L : l l . l l P N 1 N E G c o P 1 2 Maximum number ot stations 20 Also available SY manifold with gateway type Sl unit and is capable to handle 128 UO points.

Modular Style Regulator with Built-in Pressure Gauge Series ARG

Modular Style Regulator with Built-in Pressure Gauge Series ARG Regulator with Built-in Pressure Gauge Series ARG Accessory Port size Model ARG20 1/8, 1/4 ARG30 1/4, 3/8 ARG40 1/4, 3/8, 1/2 Bracket Pages 20 to 23 Set nut for changing the mounting angle of pressure gauges Regulator with Built-in Pressure Gauge with Back Flow Mechanism Series ARGK ARG20K 1/8, 1/4 ARG30K 1/4, 3/8 ARG40K 1/4,

AWG

Port size Symbol 20 30 40 Mounting Angle of Pressure Gauge 01 02 03 04 1/8 G4 G3 G2 G1 Symbol 1/4 270 180 90 0 Mounting angle 3/8 1/2 MPa IN OUT IN OUT IN OUT IN OUT Mounting angle view MPa MPa MPa JIS Symbol P P P P K K K K C C C C U U U U O O O O S S S S H H H H L L L L to to to to AWG20K/30K/40K Possible to change to the optional mounting angles.

Vacuum Unit Ejector / Vacuum Pump System

ZK2-OM00201 Manifold ZZK2 04 A 1 L 00 00 (1) (2) (3) (4) (5) (6) Remains blank when no potion is selected. (1) Number of stations Note 1) Symbol Stations 01 1 station 02 2 stations 10 10 stations Note 1) In the case of an ejector, for an adequate performance, the number of stations when operated simultaneously depends on the nozzle diameter.

NAR Series

Specialty Regulators NAR Series Pressure Regulator NAR425, 435, 625, 635, 825, 835, 925, 935 s n o i t a c i f i c e p S l e d o M 5 2 4 R A N 5 3 4 R A N 5 2 6 R A N 5 3 6 R A N 5 2 8 R A N 5 3 8 R A N 5 2 9 R A N 5 3 9 R A N e z i S t r o P 2 / 1 8 / 3 4 / 1 1 4 / 3 2 / 1 1 4 / 1 1 2 ) a P M ( g i s p e r u s s e r p f o o r P ) 5 . 1 ( 0 2 2 e r u s s e r p g n i t a r e p o . x a