ZQ-OM01301

ZQ-OM01301-A Vacuum ejector Manifold type (with the PD-port) ZZQ1A-BSC *ZQ3MA-K15L---S *ZQ3MA-K25L-K--S Vacuum pump system Manifold type (without the PD-port) ZZQ1A-ROB *ZQ000MA-K15L-*ZQ000MA-K25L-*ZQ000MA-J15L-FVacuum pump system Manifold type (with the PD-port) ZZQ1A-ROC *ZQ000MA-K15L---S *ZQ000MA-K25L---S EC EE FC FE EA EB FA FB *ZQ3MAK1 5L-*ZQ3MAK2 5LK--S EA EB FA FB EC EE FC FE *ZQ000MAJ1

15

EC ED Section XX2 XB (R2) XAH9 Section Y details XA [mm] LEYGlL (Ball bushing bearing) [mm] LEYGlM (Sliding bearing) * Refer to page 872 for the dimensions of motor flange.

ZSM1-115/121

Time Failure predict number (EC) Since it is normal, the number count is reset EC = 0. Abnormal EC = 1 Abnormal EC = 2 Abnormal EC = 3 884 Technical Information Auto shift function 12 The auto switch function is the function to regard the pressure value at the point of this signal being input as the benchmark and to display and conduct switching.

HRX-OM-O021

Table 9-5 Compliance EMC Directive 2004/108/EC CE Marking Machinery Directive 2006/42/EC NRTL E112803(UL61010-1) HRS Series Documents 9-9 HRX-OM-O021 Chapter 9 Documents 9.9 Sample DoC. Sample DoC.

HRX-OM-R005

Table 9-5 Compliance EMC Directive 2004/108/EC CE Marking Machinery Directive 2006/42/EC NRTL E112803(UL61010-1) HRS Series 9.8 Compliance 9-9 HRX-OM-R005 Chapter 9 Documents 9.9 Sample DoC. Sample DoC.

JXCx-OMX0009

LEY40#EA: 9 kg, LEY40#EB:19 kg, LEY40#EC:38 kg LEYG40#EA:7 kg, LEYG40#EB:17 kg, LEYG40#EC:36 kg 109 - Caution (1) Supply power when the actuator is stationary. The controller acquires the absolute position data from the absolute encoder when power is applied.

Regulator

EC EC EC NPN open collector 1 output + Analog voltage output NPN open collector 1 output + Analog current output + ED ED ED ED c Flow direction Nil Nil Nil Nil Flow direction : Left to right R R R R Flow direction : Right to left + d Knob Nil Nil Nil Nil Upward V V V V Downward + 6 Nil Nil Nil Nil Name plate and pressure gauge in imperial unit : MPa e Pressure unit Note2) Z Z Z Z Name plate

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

LEY40#EA: 9 kg, LEY40#EB:19 kg, LEY40#EC:38 kg LEYG40#EA:7 kg, LEYG40#EB:17 kg, LEYG40#EC:36 kg 75 - Cution (1) Supply power when the actuator is stationary. The controller acquires the absolute position data from the absolute encoder when power is applied.

Regulator

EC EC EC NPN open collector 1 output + Analog current output + ED ED ED ED c Flow direction Nil Nil Nil Nil Flow direction : Left to right R R R R Flow direction : Right to left + d Knob Nil Nil Nil Nil Upward V V V V Downward + 6 Name plate and pressure gauge in imperial unit : MPa Nil Nil Nil Nil e Pressure unit Note2) Z Z Z Z Name plate and pressure gauge in imperial unit : psi ZA ZA

Compact Cylinder/Guide Rod Type Series CQM

Standard without auto switch: 12 and 16; 5 stroke, 20; 5 to 15 stroke, 25; 5 and 10 stroke, Built-in magnet with auto switch: 20; 5 stroke 798 Compact Cylinder: Guide Rod Type Series CQM Dimensions 32 to 50 2 x HA through 2 x HB through Auto switch 2 x P V KA F Q 2 xN through 2 x 2 x OB counterbore with depth RB IB IA EC EB EA M Z (KB) KA M B + Stroke W L J EA EB EC A + Stroke CUJ CU 2 x

1

) Since it is normal, the number count is reset EC = 0.

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Technical Data 47 6 1193 MY1B Series Stroke Adjustment Units With adjustment bolt MY1B AZ Stroke Bore size E EA EB W TT h Stroke adjustment unit FC EC EY (mm) FC Applicable cylinder E EA EB EC EY h TT MY1B25 MY1B32 MY1B40 W 60 5 (Max. 16.5) 3.5 13 53.5 6.5 49 10 20 8 (Max. 20) 4.5 17 67 8.5 61 12 25 74 9 (Max. 25) 4.5 17 81.5 9.5 76 15 31 94 With high load shock absorber + adjustment bolt

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

bolt MY1H LZ Stroke Bore size (Shock absorber stroke) T S E EA EB W h TT Stroke adjustment unit Shock absorber FC FA EY EC (mm) E EA EB EC EY h S T TT FA FC Shock absorber model Applicable cylinder W F MY1H25 18 9 40 7.5 53.5 16 21 3.5 46.7 7 53 RB1007 5 (Max.16.5) MY1H32 25 14 45.6 9.5 67.5 23 20 4.5 67.3 12 64 RB1412 8 (Max.20) MY1H40 31 19 55 11 82 24.5 26 4.5 67.3 12 9 (Max.25) 75

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

A 8 COMPLIANCE WITH EC DIRECTIVES 1. WHAT ARE EC DIRECTIVES? The EC directives were issued to standardize the regulations of the EU countries and ensure smooth distribution of safety-guaranteed products.

Regulator

EC EC EC NPN open collector 1 output + Analog voltage output ED ED ED ED NPN open collector 1 output + Analog current output + Flow direction : Left to right c Flow direction Nil Nil Nil Nil R R R R Flow direction : Right to left + d Knob Nil Nil Nil Nil Upward V V V V Downward + 6 Name plate and pressure gauge in imperial unit : MPa Nil Nil Nil Nil e Pressure unit Note2) Z Z Z Z Name plate

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

K 2H9 +0.025 0 J 2 P (finger closing port) G I Auto switch mounting groove positions (2 locations) MHS2-16D MHS2-20D MHS2-25D 5 6.5 5 3 24 5 3 24 6 3 5 4.5 24 4 4 4 33 33 33 (mm) I 4 5 5 Model MHS2-16D MHS2-20D MHS2-25D G 25 27 28 FZ 3 3 5 FY 11 13 14.5 FX 12.5 14.5 17 CB 11 13 15 EC 10 12 14 EO 14 16 20 NB 5h9 6h9 6h9 DC 30 36 42 NA 8 10 12 DO 34 40 48 K 4 5 6 B 30 36 42 Q 6 7 8 J 10 12

energy saving effect

(including 6 M8 bolts) Note 9) Weight (dry state) kg Approx. 180 Approx. 215 Approx. 280 CE marking EMC Directive 2004/108/EC Machinery Directive 2006/42/EC Note 1) When the ambient temperature or circulating fluid temperature is 10C or below, refer to "Operation at low ambient temperature or low circulating fluid temperature" (page 186-1).

Ejector Valve Unit Series ZYY/ZYX

Dimensions ZYX3L-S1-EC-FMN Silencer Vacuum switch Ejector unit V ZA Release flow rate adjusting needle Supply/Release valve ZX ZR P1 Circuit diagram ZM ZMA ZQ ZH ZU ZL 109 ZY ZF ZP SP ZCUK AMJ 28.5 23.5 AMV 13 + AEP 28.1 HEP 9.6 85 Related Equipment Accessory (packed together) 1.

HRX-OM-M090

Table 9-6 Compliance EMC Directive 2004/108/EC CE Marking Machinery Directive 2006/42/EC NRTL E112803(UL61010-1) 9.8 Compliance HRS Series 9-16 HRX-OM-M090 Chapter 9 Documents 9.9 Sample DoC. Sample DoC.

HRX-OM-R016

Table 9-2 Compliance EMC Directive 2004/108/EC CE Marking Machinery Directive 2006/42/EC NRTL E112803(UL61010-1) HRS Series 9.8 Compliance 9-9 HRX-OM-R016 Chapter 9 Documents 9.9 Sample DoC. Sample DoC.