Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

(mm) 4 6 8 10 12 (1) AS221FE-01 AS231FE-01 20, 25, 32 R 1/8 AS221FE-02 AS231FE-02 20, 25, 32, 40 R 1/4 AS321FE-03 AS331FE-03 40, 50, 63 R 3/8 AS421FE-04 AS431FE-04 63, 80, 100 R 1/2 Note 1) Elbow type only Note 2) Distinction between meter-out/meter-in types by appearance Those are distinguished by the lock nut.

Vacuum System Peripherals:

3 3 8 1.1 M V VX3334 -03 M V 4 VX3244 -03 1.6 M V VX3344 -03 For Vacuum Pad Orifice dia.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric size Inch size Nil S Resin Stainless

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

VZ (A) 2 (A) 2 VS 1 (P) 3 (R) 1 (P) 3 (R) q r w e q r w e N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

Hydraulic

B-series rod A 13.5 14.5 Piston seals are NBR for both types R and V.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

How to Order JSXZ 3 1 C N 02 R 5 G D B w y e r t u o !

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

) port 13 21 (For Rc 3/8) (For Rc 3/8) L plug connector (L): VQZ35(R)-LDIN terminal (Y): VQZ35(R)-Y02 03 02 03 Indicator light 300 89.5 (Lead wire length) Cross section 0.23 mm2 Cover diameter 1.5 Pg.7 55 <60> 92.5 Max. 10 Applicable cable O.D. 3.5 to 7 Indicator light < >: AC 78.5 86 M plug connector (M): VQZ35(R)-M02 03 (Lead wire length) Cross section 0.23 mm2 Cover diameter 1.5 62 <67

LEC-OM07605CN

PA10] ON DB RD ONRDON SA OFFSAOFFSAON ((X0.05)+20)r/min 20r/min VLC VLCONOFF ZSP ZSPON[Pr. PC07] 1) OFF 70 r/min 2) 3 20 r/min ON 50 r/min () [Pr. PC07] 0 r/min [Pr. PC07] ON -50 r/min 20 r/min OFF () -70 r/min 4 ZSP ON () OFF 50r/min(1)ZSPON 70r/min(2)ZSPOFF 50r/min(3)ZSPON-70r/min(4)ZSPOFF ZSPON 2Or/min 3 16 3.

IDG

IDG 10 M 03 X016 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Option Size Symbol Contents Size 3 3 10 20 30 50 5 5 Nil Standard R Flow direction (Right Left) 10 20 S With dew point indicator Standard equipment 30 50 Drain discharge symbol Standard dew point

Compact Cylinder with Air Cushion Series RQ

A A' A' R H R H e When air is supplied for piston extension, the check seal opens and the piston starts with no delay.

E-P HYREG ® Series VY1 1

0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5 2 4 Hysteresis (2) 1% F.S. 2.5% F .S. 3% F .S. 5% F .S.

AR20-B to AR60-B

X425 w t e 03 q w t e r For high/low temperature Option/Semi-standard: Select one each for a to g.

HRX-OM-T004

Refer to 4.3.2 Setting and checking,5.3.2 Setting and checking. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.

HRX-OM-R028

Broken wire o r coming off 60 sec. 60 sec. AL19 Communication error is generated.

Modular Type Regulator Series AR

r w w AR50, 60 AR30, 40 t q t q e e IN OUT IN OUT r w w r Parts list Material Note No.

Industrial Filters

Applicable model 84 84 03 FGD-CV002-04 06 03 FGD-CV003-04 06 03 FGD-CV004-04 06 03 FGD-CV001-04 06 32 32 FGDT/F FGDT/F FGDC/E FGDC/E Note 1) Same as standard product except for cover assembly Note 2) 03, 04, and 06 indicate the relevant port sizes (Rc3/8, 1/2, 3/4).

SYJ300/500/700

R port.

A

R 4-R 36.8 E 36.8 E R P P D D + + MADE IN JAPAN MADE IN JAPAN SMC SMC Model Port size A B C D E G H I K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000

Electro-Pneumatic Proportional Valve Series VEF/VEP

characteristics Set pressure range (MPa) Without sub-plate Without sub-plate 1 2 3 Nil 02 03 13 9 5 Symbol 2 1/4 Nil 02 03 0.05 to 0.65MPa 1 3/8 2 1/4 2 0.1 to 0.9MPa 2 02 03 04 03 04 06 1/4 3/8 1/2 3/8 1/2 3/4 1 2 3 4 3/8 03 04 06 3 1 30 3/8 0.005 to 0.15MPa 1 4 1/2 4 45 1 3/4 12 8 4.5 2.5 Without sub-plate Nil 02 03 1(P) Symbol Flow type (VEF2) Flow type (VEF3) Pressure type (VEP3) 2 2

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

Port size ASV Model M3 x 0.5 ASV120F-M3 0.3 0.3 AK M5 x 0.8 ASV220F-M5 1.3 1.3 R 1/8 ASV310F-01 8 7 ASS R 1/4 ASV310F-02 8 7 R 1/8 ASV410F-01 14 13.5 ASR R 1/4 ASV410F-02 14 13.5 R 3/8 ASV410F-03 14 13.5 ASF R 1/4 ASV510F-02 27 23 R 3/8 ASV510F-03 29 27 R 1/2 ASV510F-04 29 27 10-32 UNF ASV220F-U10/32 1.3 1.3 NPT 1/8 ASV310F-N01 8 7 NPT 1/4 ASV310F-N02 8 7 NPT 1/8 ASV410F-N01 14 13.5 NPT 1