Size: 30, Thread Type: NPT, Port Size: 1/4, Accessory: No, Case options: Polycarbonate case, Drain outlet options: With drain cock, Flow direction options: Right → Left, Recommended flow rate(L/min (ANR)): 200

Size: 3000 (3/8 Basis), Thread: N (NPT), Port Size: 02 (1/4), Accessory: None, Option: J (Drain Guide)

Size: 3000 (3/8 Basis), Thread: N (NPT), Port Size: 02 (1/4), Accessory: None, Option: 2 (Metal Case)

Size: 3000 (3/8 Basis), Thread: N (NPT), Port Size: 02 (1/4), Accessory: None, Option: R (Air Flow: Right to Left)

Size: 3000 (3/8 Basis), Thread: N (NPT), Port Size: 02 (1/4), Accessory: None, Option: 2JR (Metal Case, Drain Guide, Air Flow: Right to Left)

Size: 3000 (3/8 Basis), Thread: N (NPT), Port Size: 02 (1/4), Accessory: None, Option: 2R (Metal Case, Air Flow: Right to Left)

Size: 3000 (3/8 Basis), Thread: N (NPT), Port Size: 02 (1/4), Accessory: None, Option: 2J (Metal Case, Drain Guide)

ITV

Flat bracket 7 15 25 4 x R3.5 INI-398-0-6 (Mounting thread is not included.)

70pvpump

Refer to pages 17-6-3 to 17-6-10 for Safety Instructions and Solenoid Valve Precautions. Operating Environment Maintenance Warning Warning 1.

S Couplers

/O.D. mm Symbol Symbol Symbol 01 02 03 04 N01 N02 N03 N04 07 09 11 13 06 08 10 12 07 09 11 13 6 8 10 12 1/4" 5/16" 3/8" 1/2" R, Rc1/8 R, Rc1/4 R, Rc3/8 R, Rc1/2 NPT1/8 NPT1/4 NPT3/8 NPT1/2 50 60 65 80 85 110 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 Metric size The figures in ( ) indicate the internal diameter of the applicable hose.

VFM300

6 !7 !8 !

Precision Regulator

6 @1 @1 !8 e VEX Main valve e @1 Exhaust tValve guide tValve guide tValve guide SRH IR2120 IR3120 SRP @0 !1 SRF @5 !1 ITV @0 @6 !9 @0 @6 IC SUP side passage OUT side passage SUP side passage OUT side passage ITVH o o !0 ITVX !0 PVQ y q q IN !1 VY1 w IN !1 Bleed Bleed VBA VBAT y !2 @2 Bleed Bleed r !3 !2 !5 w AP100 @4 !7 u @3 OUT (2) SUP (1) SUP (1) OUT (2) !8 @3 !

Digital Pressure Switch ( compatible)

The display 6 shows "HHH". (1) Adjust the pressure to (1) Check that the pressure is not The display within the set pressure range.

20

6 !1 Note Component Parts i u r e q w Description No. Material o Body L Body R Main valve Valve guide Nozzle holder Port Elbow Cover Ring Arm Spring Main valve seal Lever 1 2 3 4 5 6 7 8 9 10 11 12 13 PBT PBT PBT POM t Aluminium alloy Aluminium alloy Anodized Anodized Only for the VMG12 PBT Stainless steel Stainless steel PBT !4 Stainless steel !5 !0 HNBR PBT !

ITV

Output deviation (%F.S.) 0.5 0.5 Out VE 40 0 0 Return VY G 60 0.5 0.5 AL 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Input signal (%F.S.)

F

11 47 6 25 22.2 7.2 11.8 16.5 11.4 50 6.2 NAS2001F 3/16 33.6 28.6 17.1 AS2001F 11.8 14.5 4 8.9 43.8 5.2 32.6 27.6 11.4 17 13.2 52.2 7.1 1/4 34.5 29.5 20.1 15.5 6 11 48.5 6.3 33.7 28.7 12.4 16.5 11.4 52.2 6.2 3/16 34.6 29.6 24 AS2051F 14.8 15.5 6 11 50.7 6 34.4 29.4 19.4 14.8 17 13.2 54.4 7.1 NAS2051F 1/4 35.5 30.5 25.1 18 8 15.2 59.8 8.1 36.5 31.5 30.3 18 15.2 59.8 8.1 5/16 36.5 31.5 30.3

q"s

0.1 o -1 2 4 6 a 1 0 0.0 0 25 50 75 lnputsignal (%F.S.) 1 . 0 1 0 25 50 75 Inputsignal (%F.S.) 500 1000 1500 Flow rale (l/min (ANR)) :':i ::l Relief flow characterjslics supp y pressure: 0.7 Mpa Flow characteristics suppty pressure: 0.7 Moa Pressufe chafaCtgristics set oressue: 0 2 MHa 0.8 0-7 t'. I { 0 s l I l 6 l ; D.0 t' 6 l 0.6 0.5 o.4 0.3 6 ' ) !

I

E U N I T T Y P E D I M E N S I O N S S I N G L E U N I T: DIN R A I L M O U N T No. of Sensors 2 3 4 5 6 L1 70 105 140 175 210 L2 105 140 175 210 245 L3 140 175 210 245 280 No. of Sensors 2 3 4 5 6 L1 70 105 140 175 210 L2 36 71 106 141 Courtesy of Steven Engineering, Inc. !

Digital Pressure Switch

The recommended bend radius of the lead wire is 6 times the outside diameter of the sheath, or 33 times the outside diameter of the insulation material, whichever is larger. Replace the damaged lead wire with a new one. Wire correctly. Incorrect wiring can break the Pressure switch. -6No.PS-OMU0009-D Do not perform wiring while the power is on.

IR1000/2000/3000

Standard part number X1 Clean room specifications Specifications Non-grease specifications Cleanliness Bleed port Class 10 With M5 fitting (applicable tube O.D. 6) Manifold Specifications (except type IR2120 and series IR3000) 6 IR1000/2000: M5 fitting (applicable tube O.D. 6) IR3000: Rc(PT) 1/2 female thread EXH port Grease Teflon grease 2 to 8 station manifold type regulators.