2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

10 M6 X 1.0 M6 X 1.0 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 45 52.5 59 64 76.5 86 33.5 38.5 45 50 62 71.5 47 51 58 58 72 72 21 27 27.5 28.5 37 37 13 14 15.5 16.5 19 19 13 13 14 14 20 20 30 35 40 45 45 55 9 12 13 13 16 16 12 16 20 20 25 30 32.5 38 46.5 56.5 72 89 46 52 65 75 95 114 10 14 18 18 22 26 22 30 35 35 40 40 Wl Stroke range (mm) Bore size (mm) ZZ S ZZ WL W V S RF P NB N MO 32 40

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

10 14 14 22 22 23 23 30 30 42 42 U CX L Z + Stroke RR ZZ + Stroke Double clevis/(D) Port Cushion valve Double clevis CDH10 (mm) Bore size (mm) Stroke range H10 CX +0.3 ZZ Z U RR L CD +0.1 CZ 32 40 50 63 80 100 164.5 169 197 197 251 251 154 158 182 182 228 228 13 13 17 17 26 26 14 14 20 20 30 30 10.5 11 15 15 23 23 up to 500 up to 500 up to 600 up to 600 up to 750 up to 750 10 10 14 14 22

PFMB.eng

Flow setting (3 step setting mode) Function setting (Function selection mode) Other functions [1000] 1000 L/min (PFMB7202) [F 1] OUT2 over current error The switch output (OUT2) load current has exceeded 80 mA. [ 10] 10 L/min (PFMB7201) [ 25] 25 L/min (PFMB7501) Do not use the product for flammable fluid. Fire or explosion can result.

PFM3.eng

Selection of connected sensor [ 10] 10 L/min (PFM510) [F 0] [Un i] Unit selection function [ L] L/min The zero clear function has been performed while the fluid is flowing. "Er4" will be displayed for 1 second. Perform the zero clear function again under no flow conditions. Attaching the connector to the sensor wire Strip the sensor wire as shown. Do not cut the insulator.

Air Cylinder: Single Rod Series MB ø32, ø40, ø50, ø63, ø80, ø100, ø125

(However, auto switch mounting brackets are assembled when being shipped.) 290 Air Cylinder: Single Rod Series MB Specifications Bore size (mm) 32 40 63 100 125 50 80 Action Double acting, Single rod Fluid Air 1.5 MPa Proof pressure 1.0 MPa Max. operating pressure 0.05 MPa Min. operating pressure CJ1 Without auto switch: 10 to 70C (No freezing) With auto switch: 10 to 60C (No freezing) Ambient

MB1

Besides, the overall length is longer than the cylinder with air cushion as follows, because the bumpers are attached to the both sides of the piston: 32, 40: +6 mm, 50, 63: +8 mm, 80, 100: +10 mm. Stroke (mm) Refer to Standard Stroke on page 6-7-5. Applicable Auto Switch/ Refer to page 6-16-1 for further information on auto switches.

PF2M7.eng

Hysteresis mode [1_P] Normal output [ ] 50% of maximums rated flow PF2M701: 0.5 L/min, PF2M702: 1.0 L/min PF2M705: 2.5 L/min, PF2M710: 5 L/min PF2M725: 12.5 L/min, PF2M750: 25 L/min PF2M711: 50 L/min, PF2M721: 100 L/min [ ] 5% of maximums rated flow PF2M701: 0.05 L/min, PF2M702: 0.1 L/min PF2M705: 0.25 L/min, PF2M710: 0.5 L/min PF2M725: 1.3 L/min, PF2M750: 2.5 L/min PF2M711: 5 L/min, PF2M721: 10

ZISE80.eng

If the installation is using accurate control, wait until the product has warmed up (approximately 10 to 15 minutes). : The Pressure switch will also output during setting. 1. Press the button once in measurement mode.

Body Size: 60, Thread: F (G), Port Size: 10 (1), Mounting: w/o Mounting Option, Bowl: 2 (Metal Bowl), Lubricant Exhaust Port: w/o Drain Cock, Flow Direction: Left to Right, Pressure Unit: Pressure Unit: MPa; Temp Unit: °C

Body Size: 60, Thread: F (G), Port Size: 10 (1), Mounting: w/o Mounting Option, Bowl: 6 (Nylon Bowl), Lubricant Exhaust Port: w/o Drain Cock, Flow Direction: Left to Right, Pressure Unit: Pressure Unit: MPa; Temp Unit: °C

Min. Dripping Flow Rate(l/min): 220, Oil Storage Capacity(cm³): 135, Case: [Metal] Metal case, Inlet Side Connection Type: G, Inlet Side Plumbing Thread Nominal: 1, Outlet Side Connection Type: G, Outlet Side Plumbing Thread Nominal: 1, Drain Exhaust: [Not Provided] No Drain Cock, Flow Direction: [Right] From Left to Right, Size of Body: 60, Accessory: Without optional mounting

Min. Dripping Flow Rate(l/min): 220, Oil Storage Capacity(cm³): 135, Case: [Nylon] Nylon Case, Inlet Side Connection Type: G, Inlet Side Plumbing Thread Nominal: 1, Outlet Side Connection Type: G, Outlet Side Plumbing Thread Nominal: 1, Drain Exhaust: [Not Provided] No Drain Cock, Flow Direction: [Right] From Left to Right, Size of Body: 60, Accessory: Without optional mounting

Min. Dripping Flow Rate(l/min): 220, Oil Storage Capacity(cm³): 135, Case: [Aluminum with Level Gauge] Metal Case with Level Gauge, Inlet Side Connection Type: G, Inlet Side Plumbing Thread Nominal: 1, Outlet Side Connection Type: G, Outlet Side Plumbing Thread Nominal: 1, Drain Exhaust: [Not Provided] No Drain Cock, Flow Direction: [Right] From Left to Right, Size of Body: 60,

Min. Dripping Flow Rate(l/min): 220, Oil Storage Capacity(cm³): 135, Case: [Aluminum with Level Gauge] Metal Case with Level Gauge, Inlet Side Connection Type: G, Inlet Side Plumbing Thread Nominal: 1, Outlet Side Connection Type: G, Outlet Side Plumbing Thread Nominal: 1, Drain Exhaust: [Not Provided] No Drain Cock, Flow Direction: [Left] From Right to Left, Size of Body: 60,

Min. Dripping Flow Rate(l/min): 220, Oil Storage Capacity(cm³): 135, Case: [Nylon] Nylon Case, Inlet Side Connection Type: G, Inlet Side Plumbing Thread Nominal: 1, Outlet Side Connection Type: G, Outlet Side Plumbing Thread Nominal: 1, Drain Exhaust: [Manual] With Drain Cock, Flow Direction: [Right] From Left to Right, Size of Body: 60, Accessory: Without optional mounting parts

Body Size: 60, Thread: G, Port Size: 1, Mounting: None, Semi-Standard, Body Size 10: Metal Bowl, Semi-Standard, Body Size 20: Flow Direction: Right to Left, Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 60, Thread: G, Port Size: 1, Mounting: None, Semi-Standard, Body Size 10: Drain Cock, Semi-Standard, Body Size 20: Standard, Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 60, Thread: G, Port Size: 1, Mounting: None, Semi-Standard, Body Size 10: Drain Cock, Semi-Standard, Body Size 20: Flow Direction: Right to Left, Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 60, Thread: G, Port Size: 1, Mounting: None, Semi-Standard, Body Size 10: Drain Cock, Semi-Standard, Body Size 20: Standard, Semi-Standard, Body Size 30, 40, 50 & 60: Metal Bowl w/Level Gauge