Size: 40 (1/2), Thread: M Thread, Rc(PT), Port Size: 04 (1/2), Accessory: None, Option 1: 11 (1000cm³ Tank w/Switch Lower Limit OFF), Option 2: R (Flow Direction: Right->Left)

Size: 40 (1/2), Thread: M Thread, Rc(PT), Port Size: 04 (1/2), Accessory: None, Option 1: 1 (1000cm³ Tank), Option 2: R (Flow Direction: Right->Left)

ZP

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

ZP

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

Table of Contents

3 u e !3 !8 t y e !2 !1 !3 !6 r A A A A !4 i u q i !4 r y t y !2 o !5 r u t q !5 e i o !2 r Component Parts No. Description Material Note No. Description Material Note Body A O-ring PBT NBR q !3 Elbow body O-ring PBT NBR w !4 Body B O-ring Electroless nickel plated Brass NBR e !5 Body B O-ring Electroless nickel plated Brass NBR r !

CATALOG

1 Drain Port 3/4 3/4, 1 D I M E N S I O N S AD S E R I E S A U I T O D R A I N S S Y M B O L S H O W T O O R D E R A U T O D R A I N S E R I E S AD AD402-02 (1/4) PT AD402-03 (3/8) PT AD402-04 (1/2) PT AD600-06 (3/4) PT AD600-10 (1) PT H O W T O O R D E R A U T O D R A I N S E R I E S NAD NAD402-N02 (1/4) NPT NAD402-N03 (3/8) NPT NAD402-N04 (1/2) NPT NAD600-N06 (3/4) NPT NAD600-N10 (1) NPT

ZP

Applicable pad 4020W/5020W/6020W/8020W Applicable pad 3507W/4010W/5010W/6010W Applicable pad 4030W/5030W/6030W/8030W A-A A-A A-A (5) (5) (5) 14.8 8.8 6 1.5 A A A A A A 2 0.8 2 3.5 4 4 15 15 30 3 5 5 3 5 3 0.8 0.8 8.4 12.8 20.4 Note) R part has to be smooth with no corners.

Table of Contents

(mm) Model D1 Weight (g) 18 25 38 4.5 KM14-04-06-02S-3 12.8 10.4 KM14-04-06-03S-3 D2 L1 L2 L3 P A Q1 Q2 M1 M2 Port B Min. port size H a b (Width across flats) 6 4 KM14-04-06-01S-3 1 8 1 4 3 8 68 71.5 73.5 13 14 17 18 13 10.4 38.2 16 9.9 17 64 65.5 67.5 H D 8 4 KM14-04-08-01S-3 30 1 8 1 4 3 8 73.5 76.5 77.5 17 19 15.5 10.4 38.2 16 11.1 18.5 69.5 70.5 71 38 6 KM14-04-08-02S-3 15.2 10.4 KM14

AS

AS2001F-04-3-X12 Ex.) AS2001F-04-3-X21 KE Note) Not particle-free TMH Throttle Valve (Without Check Valve) X214 Ex.) AS2001F-04-3-X214 435 Series AS1F-3 Construction No.

Vacuum Pad

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

Vacuum Pad

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

Vacuum Pad

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

AC

A M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 3 Body ported style 5 1 1 1 1 4 7 1 4 1 1 2 1 9 2 2 1.15-2 E-P HYREG Series VY1 Standard Specifications 02 03 04 0 1 VY140 02 03 04 0 1 VY150 04 06 10 0 1 VY170 0 1 10 12 01 02 0 1 0 1 01 02 0 1 VY190 0 1 14 20 M5 01 0 1 VY110 VY1D00-M5 VY1A0 -M5 VY1B0 VY120 VY130 Model 14 M5 01 04 02 03 04 20 10 M5 Port P A R mm2 M5 01 02 01 02 02 03 04 06 10 12 11 2 1

ZP

or vacuum pad 72 A Bellows Type ZP Series Basic Pad Dimensions/Models With adapter/One-touch fitting 6 to 8 w q ZPR 06 B N 04 B4 r Connection thread (Female thread) D Width across flats 10 Vacuum inlet e (One-touch fitting) B B4 M4 x 0.7 B5 M5 x 0.8 A 04 4 06 6 E Model A B Vacuum inlet direction q Pad dia.

Table of Contents

Piping port 3 8 03 04 06 1 2 3 4 3-5-79 80 Series VFR5000 Construction 2 position single 2 position double VFR520 VFR510 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 r u e t r u q o e !

KJ

(mm) Model D1 Weight (g) 18 25 38 4.5 KM14-04-06-02S-3 12.8 10.4 KM14-04-06-03S-3 D2 L1 L2 L3 P A Q1 Q2 M1 M2 Port B Min. port size H a b (Width across flats) 6 4 KM14-04-06-01S-3 1 8 1 4 3 8 68 71.5 73.5 13 14 17 18 13 10.4 38.2 16 9.9 17 64 65.5 67.5 H D 8 4 KM14-04-08-01S-3 30 1 8 1 4 3 8 73.5 76.5 77.5 17 19 15.5 10.4 38.2 16 11.1 18.5 69.5 70.5 71 38 6 KM14-04-08-02S-3 15.2 10.4 KM14

Table of Contents

100 200 300 400 500 600 4.5 200 400 600 800 1,000 1,200 3 2 3 2 3 2 3 2 03 04 6 500 1,000 1,250 8 500 700 900 10 500 700 900 10 700 1,000 Flow rate Q l/min (ANR) How to read the graph The sonic range pressure to generate a flow rate of 500 l/min (ANR) is P1 0.14 MPa for a 6 orifice (VX2 4), and P1 0.3 MPa for a 4.5 orifice (VX23). 3 2 For Saturated Steam [663] (179) Upstream pressure of

ZP3

w w e q q ZP3-T-A-B ZP3-T-A-(02/04) w t r q Component Parts No.

Table of Contents

-04 AME450-06 AMF450-06 AME550-10 AMF550-10 AME550-10 AMF550-10 AME650-14 AMF650-14 AME850-20 AME850-20 AMF850-20 AMH150-03 AMH250-03 AMH250-03 AMH350-04 AMH350-04 AMH450-06 AMH550-10 AMH550-10 AMH650-14 AMH850-20 AM850-20 AMH850-20 IDG20-03 IDG30-03 IDG50-03 IDG75-04 IDG100-04 IDF2D-1 IDF3DIDF4DIDF6DIDF8DIDF11CIDF15CIDF22C1-3 IDF37C1-3 IDF55C-3 IDF75D-3 IDF120D-3 IDF150D-3 IDF240D-3 IDF55C

5 Port Solenoid Valve Series SY3000/5000/7000/9000

(Pitch) P = 24 22.2 24.3 With External Pilot Specifications 1118.3 R R 4 A 4 A 4 A 4 A 18.8 3/5 3/5 18.8 18 4 A 4 A R R 4 A 4 A 4 A 4 A 3/5 3/5 39.3 40.1 4 A 4 A 39.3 63.3 79.8 SJ 1 P 1 P 2 B 2 B 2 B 2 B 2 B 2 B 1 P 1 P 2 B 2 B 2 B 2 B 2 B 2 B Plug [1(P), 3/5(R) port] One-touch fitting [1(P), 3/5(R) port] Applicable tubing O.D.: 12, 3/8" 1/4, 3/8 [4 (A), 2 (B) port] SY SV One-touch fitting