Free Mount Cylinder

80 65 55 65 55 50 65 55 50 45 45 9 8 16 94 79 69 84 69 59 69 59 54 59 49 44 49 39 9 8 20 90 75 65 80 65 55 75 65 60 65 55 50 55 45 9 8 25 96 81 71 86 71 61 81 71 66 71 61 56 61 51 11 10 32 100 85 75 90 75 65 85 75 70 75 65 60 65 55 13 12 The dimensions other than the table above are the same as those of standard type. 44 46 Related Products For details, refer to the respective catalog.

Table of Contents

(N) MHZ2-25D (N) MHZ2-32D MHZ2-40D MHZ2-6S MHZ2-10S (N) MHZ2-16S (N) MHZ2-20S (N) MHZ2-25S (N) MHZ2-32S MHZ2-40S MHZ2-6C MHZ2-10C (N) MHZ2-16C (N) MHZ2-20C (N) MHZ2-25C (N) MHZ2-32C MHZ2-40C 6.1 17 45 66 104 193 318 3.3 11 34 42 65 158 254 1.9 7.1 27 33 45 131 217 27 55 115 235 430 715 1275 27 55 115 240 435 760 1370 27 55 115 240 430 760 1370 4 4 6 10 14 22 30 4 4 6 10 14 22 30 4 4 6 10

5-Port Solenoid Valve

n = 4 to 24 n = 1 to 3 n = 4 to 24 n = 1 to 3 42.3 62.5 n: Number of stations 3 5 4 3 2 1 1 3 1 2 3 4 5 n: Number of stations Pitch 10.5 Pitch P = 16 (SY5000) P = 19 (SY7000) Make sure to mount in the right direction. Make sure to mount in the right direction. (20) SY5000: SY50M-86(N) SY7000: SY70M-86(N) Name plate is the number of stations (1 to 24).

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Confirm that the external force is 20 [N] or less. (The external force is the resistance due to cable duct, flexible trunking or air tubing.)

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

R R ot ot at at R io io ot n n at ra ra A io n gl e n n n a g dj g ra us e e ti A ng A n of n g ng of gl e di e le k re of k a e ad dj ct e y ke us io ju y n st gr ti y gr n in g o gr g o o di oo di o v re re v e ve ct e ct io 9 io 9 18 n 0 n 0 0 Angle adjusting screw The rotation range under the adjustment of an angle at 120 is indicated below.

Clamp Cylinder with Lock

Widely applicable to different types of equipment CLK1 CLK1 Stroke (mm) Clevis width (mm) Bore size (mm) Switch mounting Series 12 32 Band 50 N 75 N 100 N 125 N 150 Built-in standard magnet type Applicable to magnetic field resistant auto switches D-P4DWl CLK2Gl series 16.5 40 Rod, Band 16.5 N 19.5 50 N 63 Built-in strong magnet type Applicable to magnetic field resistant auto switches D-P7ll

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

R R ot ot at at R io io ot n n at ra ra A io n gl e n n n a g dj g ra us e e ti A ng A n of n g ng of gl e di e le k re of k a e ad dj ct e y ke us io ju y n st gr ti y gr n in g o gr g o o di oo di o v re re v e ve ct e ct io 9 io 9 18 n 0 n 0 0 Angle adjusting screw The rotation range under the adjustment of an angle at 120 is indicated below.

CS1

12.5-1.5 N-12.5-1.5 N-12.5-1.5 N-12.5-1.5 N-12.5-1.5 N-12.5-1.5 N-12.5-1.5 Non-lube style Seals except @5 and @6 are the same as for the lube-style.

10

) 51.5 (59.5) 55 1 2 52.5 55 57.5 57.5 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/2 47.5 50 52.5 52.5 36 (41.5) 47 (55) 51.5 (59.5) 55 3 ( ): Denotes the Normally Open (N.O.) dimensions.

Digital Flow Switches

Nil N F Rc NPT G Lead wire (Refer to page 35.)

2–4

. n pcs.

Round Type Hydraulic Cylinder

(n 2) 2 20 + 35 55 + 35 (n 2) (n = 2, 3, 4, 5) D-M9 5 20 CHQ 55 (n = 2, 4, 6) Note 3) (n 2) 2 55 + 35 (n 2) (n = 2, 3, 4, 5) 20 + 35 D-M9W 10 20 55 CHK (n = 2, 4, 6) Note 3) (n 2) 2 60 + 35 (n 2) (n = 2, 3, 4, 5) 25 + 35 D-M9A 10 25 60 CHN (n = 2, 4, 6) Note 3) (n 2) 2 50 + 35 (n 2) (n = 2, 3, 4, 5) 15 + 35 D-A9 5 15 50 CHM CHM (n = 2, 4, 6) Note 3) (n 2) 2 35 + 35 (n 2) (n = 2,

5 Port Solenoid Valve Series SV1000/2000/3000/4000

For mounting EX126 SI unit SX5000-57-6 SX3000-146-2 SX5000-138-1 SV2000-55-1SV2000-55-2A SV2000-21-1 (M3 x 30) SX7000-57-5 SX3000-146-2 SV3000-65-1 SV3000-55-1SV3000-55-2A SV3000-21-1 (M4 x 35) SY9000-11-2 SX3000-146-2 SV4000-65-2 SV4000-55-1SV4000-55-2A SV2000-21-2 (M3 x 40) SX3000-57-4 SX3000-146-2 SX3000-181-1 SV1000-55-1SV1000-55-2-1 SX3000-22-2 (M2 x 24) : Manifold stations Round head

ISO Cylinder

(n 2) 2 15 + 45 10 15 60 60 + 45 (n 2) (n = 2, 4, 6) 10 15 60 60 + 22.5 (n 2) (n = 2, 4, 6) (n=2, 4, 6) (n 2) 2 15 + 50 D-H7C D-C73C D-C80C 10 15 65 65 + 50 (n 2) (n = 2, 4, 6) D-H7C D-C73C D-C80C 10 15 65 50 + 27.5 (n 2) (n = 2, 4, 6) (n 2) 2 15 + 50 (n = 2, 4, 6) (n = 2, 4, 6) D-F7lV D-J79C 5 5 10 + 10 (n 2) (n = 4, 6) D-F7l D-J79 5 5 15 + 15 (n 2) (n = 4, 6) D-A9l D-A9lV

SMC Pneumatic Clean Series

MM 2-LC LX D D I LZ 20, 25 Width across flats B2 Standard port MM Relief port 45 45 Width across flats NA LT N 4-LD N X Y S + Stroke X Y Z LS + Stroke Z + Stroke ZZ + 2 x Stroke 32, 40 (mm) 11 8 8 8 Z H H2 H1 S P N I F A 13 8 AL D K MM NA NN B1 B2 G 54 47 47 40 B ZZ 188 154 152 144 LX 55 40 40 40 LH 30 28 28 25 LT LS LD 4 4 4 4 LC 75 55 55 55 LZ X Y 40 32 25 20 Bore size 1/8 27 25 25 21 24

High Vacuum Angle Valve

5.5 DXSA B G Main exhaust solenoid valve XVD M5 Port 1(P) (Pressure port) A XGT CYV 8.5 8.5 A (mm) Model A B C Fn G M N Fd K XLDV-40 XLDV-50 XLDV-63 XLDV-80 XLDV-100 XLDV-160 15 65 170 66 55 41 48.5 53.5 17.5 70 183 79 75 52 55 57.5 20 88 217 100 87 95 70 66.5 72.2 26.5 90 256 117 114 110 83 75 82.6 38 108 321 154 134 130 102 93.5 95.2 101.2 40 138 335 200 190 180 153 116.5 Note) For details

58

(Different surfaces, Same surface), With 1 pc. 135 125 25 135 + 55(n 4) 2 25 + 55(n 2) 2 (n = 4, 8, 12, 16) 125 + 55(n 4) 2 With n pcs. (Same surface) (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) With 2 pcs. (Different surfaces, Same surface), With 1 pc. 145 35 155 D-F5NTL 35 + 55(n 2) 2 (n = 4, 8, 12, 16) 145 + 55(n 4) 2 155 + 55(n 4) 2 With n pcs.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

lbf N lbf N lbf (mm) N lbf N lbf IN 4 12 0.9 3.1 14 0.24 6 65 20 0.175 113 43 4.5 OUT 14.6 9.7 IN Spring return Spring extend 6 16 1.3 3.4 15 8 0.31 126 45 0.312 201 OUT 86 10.1 28.3 19.3 IN 6 20 1.3 3.4 15 10 0.39 204 78 0.487 314 OUT 141 17.5 45.9 31.7 IN 11 25 2.5 4.7 21 12 0.47 323 126 0.761 491 OUT 224 28.3 72.6 50.4 48 14 0.131 84.8 IN 31 3.1 10.8 7.0 3 12 0.7 2.2 10 0.24 6 OUT 85

21

Number of auto switches Same surface Different surfaces Same surface (n 2) 2 D-M9m/M9mW D-A9m 15 + 45 10 15 Note 1) Note 1) 45 45 + 45 (n 2) (n = 2, 4, 6) (n 2) 2 15 + 45 D-H7BAL/H7NF 10 15 60 60 + 45 (n 2) (n = 2, 4, 6) (n 2) 2 D-C73C/C80C D-H7C 15 + 50 10 15 65 65 + 50 (n 2) (n = 2, 4, 6) (n 2) 2 D-B54/B64 D-G5NTL 15 + 50 10 15 75 75 + 55 (n 2) (n = 2, 4, 6) (n 2) 2 20 + 50 D-B59W

SMC

H 45 45 45 55 35 35 35 38 40 NA 2 2 2 2 2 2 4 4 4 G 22 22 22 22 20 26 32 40 30 KA 162 218 258 N 4 4 4 4 6 6 6 8 8 HA 45 45 45 55 35 70 70 76 80 FF 40 40 40 50 35 60 70 75 80 F 50 50 50 60 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 13-/22-MXS25-10 13-/22-MXS25-20 13-/22-MXS25-30 13-/22-MXS25-40 13-/22-MXS25-50 13-/22-MXS25-75 13-/22-MXS25-100 13-/22-MXS25-125 13-/22-MXS25-150 149 MXS