C95

Hs A Ht Hs A B A B A B B 10.5 24.5 0 35 14.5 25 32 32 32.5 17 2 21 4.5 22 8.5 9.5 21.5 27.5 0 38.5 25.5 27.5 40 40 36.5 28 2 32 4.5 33 8.5 9.5 23 34.5 0 43.5 27 34 50 50 41 29.5 2.5 33.5 5 34.5 9 10 28 39.5 0 48.5 32 39 63 63 46 34.5 2.5 38.5 5 39.5 9 10 28 46.5 2.5 55 22 46.5 80 80 52.5 24.5 6.5 28.5 9 29.5 13 14 28 55 2.5 62 32 55 100 100 59.5 34.5 6.5 38.5 9 39.5 13 14 1.11-32 Series C95

Refrigerated Air Dryers

Applicable air dryer A B Weight [g] Part no.

CM2

0() 0() A 6(4) 6(4) 7(5) 12 B B 0() 0() 1(0) 6 Hs 22.5 25 28.5 32.5 B 5(3) 5(3) 6(4) 11 A 7(5) 7(5) 8(6) 13 Hs 25 27.5 31 35 A B 6(4) 6(4) 7(5) 12 Hs 60 62.5 66 70 A 4(2) 4(2) 5(3) 10 Hs 69.5 72 75.5 79.5 B 3(1) 3(1) 4(2) 9 A 0.5() 2.5(0.5) 1.5(0) 0.5() 2.5(0.5) 1.5(0) 0.5(0) 5.5 2.5(0.5) 7.5 1.5(0) 6.5 3.5(1.5) 8.5 ( ): Denotes the values with air cushion.

IDU/IDF

B 220V Dryer Capacity Model A Part No.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

A B !

5-Port Solenoid Valve

regulator Individual SUP/EXH spacer assembly (Side ported) SUP stop valve spacer assembly with residual pressure release valve D-sub, Flat Ribbon B A B A B A B A B A B A B A 14 A 14 A 14 A 14 A 14 A 14 A 14 A 116.7 116.7 143.8 161.8 Max. 21 101.3 94.3 81 56.5 116.7 (21.5) (For 12) 148.7 EX510 Manifold Exploded View (9.6) 55 B 12 B 12 B 12 B 12 B 12 B 12 B 12 Fitting, Plug Part Nos.

21

Hs B A B A 13 Series CM3 Auto Switch Proper Mounting Position (Detection at stroke end) and Its Mounting Height Auto Switch Proper Mounting Position (mm) Auto switch model D-A3lA D-A44A D-G39A Note 2) D-K39A Note 2) D-M9l D-M9lW D-A9l D-B59W D-H7C D-H7BAL D-H7NF D-G5NTL D-B54 D-B64 D-C73C D-C80C A A B A B B B A B A B A B A B Bore size A 20 25 32 40 10 9 6 5 0.5 0 5.5 3.5 2.5 0 0 5.5 4.5

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

B Stroke B-A Stroke B operation 1) Initial state (0 stroke position) Stroke B Stroke A C 2) Operation When the air pressure is supplied from the C port, the rod operates the stroke B. B B A Stroke B A C Stroke B Stroke A Double output is possible.

Table of Contents

B 1.8 1.6 Groove position of auto switch A 10.4 12.8 Model MHK2-12 MHK2-16 A B Dimensions A and B of other models are same as standard switch grooves.

7

P a b d e f 1/4, 3/8 1/2 48.5 47 55 53.5 67 52 28 27 VXD2 3 A ( ): Denotes the Normally Open (N.O.) dimensions.

CS1

(Except cushion seal) Cushion ring B Rolled steel Zinc chromated Cushion valve Rolled steel Electroless nickel plated Rod seal SKY-36 SKY-36 SKY-40 @5 @6 NBR Spacer A Rolled steel Zinc chromated Piston seal RPS-125 RPS-140 RPS-160 Spacer B Rolled steel Zinc chromated Replacement Parts (Seal kits) Air releasing valve B Rolled steel Zinc chromated Air releasing valve A Chrome-molybdenum steel

Digital Flow Switches

Pin description Load is an analog input equipment such as a voltmeter, ammeter. 1 DC(+) PF2A7H-(-M) 68 69 2 Analog output 3 DC() Accumulated pulse output wiring examples 4 OUT1 4-I thread with depth J 40 Max. 30 V 80 mA or less OUT1 Load Black H 0 V or Blue 50 msec 50 msec PF2A7H-(-M) 28 29 B C D E F G H I J A Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc1, NPT1, G1 36 M5 x

LJ1H

(B contact) 2 pcs.

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

High Power Cylinder Series RHC

AS600 (258) AS420 (102) AS600 (258) AS600 (258) AS600 (258) AS800 (586) AS500 (123) 1-A 2-B 1-C 2-A 2-B 1-A 2-B 2-A 2-B 2-B 2-B 2-B 2-B 1-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B 2-A 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 20 8, 10 1/4 500 9.5 0 1,000 2,000 3,000 Maximum speed Vmax (mm/s) 50 12, 16 1/4, 3/8 1000 19 63 Composed effective area So (mm2) Composed effective area So (mm2)

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Adjusting direction B: When angle adjusting screw on B side is screwed into the right direction.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Adjusting direction B: When angle adjusting screw on B side is screwed into the right direction.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

C10: 10 (SMC) N11: 3/8" (SMC) (C12: 12 (SMC) (In case of double sided type)) [Communication connector D-sub] (DIN rail clamping screw) R R R BUS OUT BUS 76.7 76.5 12 3 12 3 3 72 BUS IN X 49.5 B B B B B B B B P X P X P 12 PWR PWR 30 25 A 1 1 A 1 A A A A A A A 55 25 13 (7.5) 18 55 One-touch fitting [4(A), 2(B) port] Applicable tube O.D.

Modular F.R.L. Units

A AF20-A AF30-A Air Filter AF40-A P.43 AF40-06-A AF50-A AF60-A AFM AFM20-A P.55 AFM30-A Mist Separator AFM40-A AFM40-06-A AFD AFD20-A Micro Mist Separator P.55 AFD30-A AFD40-A AFD40-06-A AR AR10-A AR20-B AR25-B Regulator AR30-B P.64 AR40-B AR40-06-B AR50-B AR60-B ARlK AR20K-B Regulator with Backflow Function AR25K-B AR30K-B AR40K-B P.67 AR40K-06-B AR50K-B AR60K-B 3 A Modular F.R.L.

Compact Cylinder

In that case, please order it separately. 21 ISO Standards [ISO/21287] Compact Cylinder (ATEX directive category 2) 20,25,32,40,50,63,80,100 Series 55-C55 How to Order B 20 10 C D 55 55 ATEX directive category 2 Rod end thread Rod end female thread Rod end male thread Nil M Compliant with ATEX directive category 2 55 Magnet Cylinder stroke (mm) Refer to page 2 for standard and intermediate