CL

64 78 92 115 128 144 40 50 55 65 80 90 90 90 27 32 32 37 37 47 47 53 69 78 84 92 100 141.5 150 167 16 20 20 25 30 36 36 40 32 40 40 52 52 60 70 86 102 116 145 161 182 6.5 6.0 6.0 8.0 8.0 43 43 43 22 27 27 32 41 14 14 14 15 17 17 21 21 16 16 18.5 15 17 17 21 21 16 16 18.5 11 11 11 11 11 16 16 18.5 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 M14 x 1.5 M14 x 1.5 M16 x

Micro Mechanical Valve Series VM1000

) 1 (P) (74.1) 3 port (A) 2 52 22 13 32 12 10 1 (P) 3 (R) 16 2 x 1/4 2 x 5.5 mounting hole 40 30 25 * 0.5 MPa supply F .O.F .* 52 N T.T. 6.5 mm 17 2/3 Port Mechanical Valve Series VM200 Series VM200 Push button (Flush) VM220-02-33A VM230-02-33A Panel mounting hole 38 23 T.T. 1.5 3 1.5 16.5 R port (3 port only) Max. 6 Symbol 2 port 22.1 (A) 2 (90.6) 12 10 (74.1) 1 (P) 52 3 port 22 13 (A)

Free Mount Cylinder

67 62 52 57 52 47 57 52 47 42 42 9 8 10 80 65 55 80 65 55 65 55 50 65 55 50 45 45 9 8 16 94 79 69 84 69 59 69 59 54 59 49 44 49 39 9 8 20 90 75 65 80 65 55 75 65 60 65 55 50 55 45 9 8 25 96 81 71 86 71 61 81 71 66 71 61 56 61 51 11 10 32 100 85 75 90 75 65 85 75 70 75 65 60 65 55 13 12 The dimensions other than the table above are the same as those of standard type. 44 46 Related Products

V100

VS3135 A01-01 A01-02 A07-52 q Description Electrical entry VS3145 Solenoid cover Body 100 VAC 200 VAC Grommet A12-01 A12-02 A08-52 w e Spool/Sleeve 24 VDC A01-01-63 A01-02-63 A07-52-63 100 VAC 200 VAC Conduit terminal 24 VDC A12-01-63 A12-02-63 A08-52-63 Replacement Parts Material Part no. VS3135 XT019-6 XT013-13-2 XT010-15 Description VS3145 No.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

(Blanking plate assembly) DXT192-52-1-4A 3 pcs. (Connector assembly) DXT192-52-2-4A 3 pcs. (Connector assembly) The asterisk denotes the symbol for assembly.

CQS

29 29 A 32 32 41 44 LS 50.3 50.3 62.7 66.2 B 10 10 17.5 17.5 A 22 22 29.5 32.5 LS 40.3 40.3 51.2 54.7 B 5 5 7.5 7.5 A 17 17 19.5 22.5 12 16 20 25 35.3 35.3 41.2 44.7 35 to 100 35 to 100 75 to 200 75 to 300 5 to 30 5 to 30 5 to 50 5 to 50 A + Stroke LS + Stroke CUJ Bore size (mm) L Y X LZ LY LX LT LH LG L1 LD CU 12 16 20 25 4.5 5 5.8 5.8 8 8 9.2 10.7 44 48 62 66 29.5 33.5 42 46 34 38 48 52

High Purity Fluoropolymer

R (NPT) Port size H E L1 M A N L2 L2 LQ2L21-M LQ2L22-M LQ2L23-M LQ2L24-M LQ2L31-M LQ2L32-M LQ2L33-M LQ2L34-M LQ2L35-M LQ2L36-M LQ2L41-M LQ2L42-M LQ2L43-M LQ2L44-M LQ2L51-M LQ2L52-M LQ2L53-M LQ2L54-M 6 4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 (A) 1/4 1/8" 20.5 (M) 38 19.9 19 24 18 1/4" 18 H (E) L1 43 Class 2, 3 1/4" 22 42.5 26.2 22 28 24 43 3/8" 21.5 42.5 52 51 52 51 59 58 59 58 (M) 3

ISO Standard Hydraulic Cylinder

flats G 4 x FD Rod side cushion valve D BB E FY V Head side flange air release MA Air release Head side cushion valve Air release FZ FX B C A K F NA NB H ZZ + Stroke S + Stroke Stroke range Bore size (mm) H K MA MM PJ A B BB C D E F FD FX FY FZ G GA GB J NA P S V Y Z ZZ NB 40 8 25 to 800 52 6.6 70 86 47 M6 x 1 19 M16 x 1.5 46 58 6.5 132 154 22 52 40 22 34 12 40 19 33 16 3/8 107 58 29 50 25

LJ1H

Outside Local Area: (800) 258-9200-www.stevenengineering.com Standard Motor/Horizontal Mount Specification Series LJ1H20 Dimensions/LJ1H202PA Scale: 10% 12.5 9.5 Work piece mounting reference plane LJ1 LG1 LC1 LX LC6D/LC6C Switches 110 4-M6 x 1 thread depth 15 67 20 4-M8 x 1.25 thread depth 20 8H8 depth 10 Cable entry side Body mounting reference plane 8H8 depth 8 Z section detail 130 200 52

KJ

38 51.5 19 18.5 57.5 10 18.5 36 21 40 28.4 1 2 KQ2U10-U04 59 51 51 22 1 4 3 8 KQ2U12-U02 KQ2U12-U03 53 52 55 61 Connection thread 20.9 12 20.9 22 57.4 45.4 22 1 2 KQ2U12-U04 62.5 54.5 52 Reference dimensions after Uni thread installation.

Slide Unit Series CX2/CXWM/CXWL

160 27 121 148 184 47 64 52 210 52 146 198 234 CXSJ 53 89 65 260 77 171 248 284 53 114 90 310 102 196 298 334 CXS 65.5 139 90 360 127 221 348 384 78 164 90 410 152 246 398 434 90.5 189 90 460 177 271 448 484 103 214 90 510 202 296 498 534 D-X Individual -X 507 Series CXWL 16 With End Lock: CXWL16Stroke/25 to 200 R 2 x 2 x M5 x 0.8 thread depth 10 Max.

KQ2

-U03 38 51.5 19 18.5 57.5 10 18.5 36 21 40 28.4 1 2 KQ2U10-U04 59 51 51 22 1 4 3 8 KQ2U12-U02 KQ2U12-U03 53 52 55 61 12 20.9 Connection thread 20.9 22 57.4 45.4 22 1 2 KQ2U12-U04 62.5 54.5 52 Reference dimensions after Uni thread installation.

Slide Unit Series CX2/CXWM/CXWL

160 27 121 148 184 47 64 52 210 52 146 198 234 CXSJ 53 89 65 260 77 171 248 284 53 114 90 310 102 196 298 334 CXS 65.5 139 90 360 127 221 348 384 78 164 90 410 152 246 398 434 90.5 189 90 460 177 271 448 484 103 214 90 510 202 296 498 534 D-X Individual -X 507 Series CXWL 16 With End Lock: CXWL16Stroke/25 to 200 R 2 x 2 x M5 x 0.8 thread depth 10 Max.

CQS

Rear flange With auto switch W/o auto switch Bore (mm) Stroke range (mm) FD FT FV FX FZ L L1 B 17 17 19.5 22.5 A 31 31 42 45.5 B 22 22 29.5 32.5 A 26 26 32 35.5 12 16 20 25 4.5 4.5 6.6 6.6 5.5 5.5 8 8 25 30 39 42 45 45 48 52 55 55 60 64 3.5 3.5 4.5 5 14 15.5 18.5 22.5 5, 10 (All dimensions are common between standard stroke and long stroke except "A", "B" and "CL".)

Air Cylinder Series MB

Technical data 293 Series MB Without Mounting Bracket Cushion valve Basic: (B) WV Port G 2 x P MM G With rod boot E E D e C B d H1 MB Effective thread 2 x 4 x J C B A K F N MA 10.2 10.2 f l N S + Stroke H h ZZ + Stroke Width across flats Stroke range (mm) Bore size (mm) Effective thread length S ZZ A C B D Ee11 F G H1 H MA MB J K MM N P V W 32 40 50 63 80 100 125 22 30 35 35 40 40 27 46 52

AC Servo Motor Driver (Pulse input type/Positioning type ）

PD_ _ ]) . 5-52 5.2.5 Extension setting 2 parameters ([Pr. PE_ _ ]) . 5-60 5.2.6 Extension setting 3 parameters ([Pr. PF_ _ ]) . 5-63 6. NORMAL GAIN ADJUSTMENT 61 to 6-33 6.

MGP

Refer to P.52 for order made specifications. Part number Refer to standard part numbers and ordering procedure. 11 to 249 1 to 249 12, 16 12, 16 Applicable stroke (mm) 21 to 399 1 to 399 20, 25, 32 20, 25 26 to 399 5 to 395 40 to 100 32 to 100 Part no.: MGPM2039 A spacer 1mm in width is installed in a MGPM2040. C dimension is 77mm.

Table of Contents

(mm) Model Maximum suction flow rate (l/min (ANR)) Air consumption (l/min (ANR)) Weight (With bracket) (kg) ZH ZR1-W10L ZR1-W13L ZR1-W15L ZR1-W18L ZR1-W20L 1.0 1.3 1.5 1.8 2.0 42 52 74 88 105 46 78 95 150 185 0.133 0.133 0.135 0.155 0.154 ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-

C85

51 35 25 32 0.7 64 DSeries CS1 only W Series C85: 20, 25 W 37 24 35 17 22 0.3 47 -X 100.0 T 27 18 26 12 16 0.5 35 2022 14 21 10 13 0.7 28 Foot: L Rod side flange: F Head side flange: G (100) (40) (40) (40) (40) (100) 0.3 Data Lateral load applied to the rod end fR (N) L (40) (40) (40) (40) (100) 89 0.5 W W W F 10.0 (40) (40) (40) 74 36 0.7 93 (40) 54 37 26 33 0.3 69 G 41 27 39 19 25 0.5 52

C85

51 35 25 32 0.7 64 DSeries CS1 only W Series C85: 20, 25 W 37 24 35 17 22 0.3 47 -X 100.0 T 27 18 26 12 16 0.5 35 2022 14 21 10 13 0.7 28 Foot: L Rod side flange: F Head side flange: G (100) (40) (40) (40) (40) (100) 0.3 Data Lateral load applied to the rod end fR (N) L (40) (40) (40) (40) (100) 89 0.5 W W W F 10.0 (40) (40) (40) 74 36 0.7 93 (40) 54 37 26 33 0.3 69 G 41 27 39 19 25 0.5 52