Table of Contents

43 48 36 112 100 76 3/8 50.5 27.5 68.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 85.5 16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6 x 1 Depth 6 32 42 3 57 52 47 127 115 98 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5 39 50 0

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

fitting) C8 (8 One-touch fitting) C10 (10 One-touch fitting) C4 (4 One-touch fitting) C6 (6 One-touch fitting) Port size A, B port 2 to 10 stations: W = 26n + 207 11 to 20 stations: W = 26n + 229 2 to 10 stations: W = 52n + 245 11 to 16 stations: W = 52n + 279 Manifold base weight W (g) n: Stations Applicable flat ribbon cable connector Wiring specifications Flat ribbon cable connector,

One-touch Fittings

(See Fig. 2.)

MY1

2 2 2 2 2 2.5 QW 48 45 46 60 72 90 110 U4 3.4 3.4 3.4 3.4 4.5 4.5 5.5 W 68 72 84 102 118 144 168 U5 5.8 5.8 5.8 5.8 7.3 7.3 8.4 W1 128 152 U6 5 5.5 5 7 8 8 8 LK 2 5.5 Model MY1M16 MY1M20 MY1M25 MY1M32 MY1M40 MY1M50 MY1M63 Model MY1M16 MY1M20 MY1M25 MY1M32 MY1M40 MY1M50 MY1M63 "P" indicates cylinder supply ports.

MGP

Top ports 2. Side mount 2. Side ports 1. Top mount 3. T-slot side mount Easy adjustment of work piece and cylinder mounting 1. Top ports 1. Auto switch mounting 4. Bottom mount 2. Side ports 2. Auto switch mounting 4. Bottom mount Auto switches can be mounted on two sides 2. Side mount 3.

Electric Actuator/Slider Type

6 e u @0 @1 @2 w !4 !2 !0!1 !3 !

MXQ

2 e !3 !5 MX MTS t !6 r u y w !

Fluoropolymer Piping Equipment

P0.01MPa 2 0 2 4 6 8 10 0 Number of needle rotations 939 B LVN Series Construction t r w e q With reducer i y u Part lists Material Description No.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Standard stroke range (mm) Long stroke range (mm) Bore size (mm) B1 A C D E F GA GB H H1 I J K KA MM NA P S TA TB TC ZZ WA WB WH W CS1 AL 30 18 22 22 30 35 35 40 40 15.5 13 17 17 19 27 27 32 41 14 8 10 12 16 20 20 25 30 2 2 2 2 2 2 3 3 12 12 12 13 14 14 20 20 10(12) 35 5 6 6 8 11 11 13 16 26 M4 x 0.7 depth 7 5 6 8 10 14 18 18 22 26 M8 x 1.25 11 11 11 12 13 13 11 M5 x 0.8 106(114) 16 15(

VQ4000

position single 3 position closed center Coil rated voltage 12, 24 VDC, 100, 110, 200, 220 VAC (50/60 Hz) (A) 4 (B) 2 (A) 4 (B) 2 Allowable voltage fluctuation 10% of rated voltage Coil insulation type Class B or equivalent 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 24 VDC 1 W DC (42 mA), 0.5 W DC (21 mA) 3 position exhaust center 12 VDC 1 W DC (83 mA), 0.5 W DC (42 mA) 2 position double (Metal

KQ2

-U03 38 51.5 19 18.5 57.5 10 18.5 36 21 40 28.4 1 2 KQ2U10-U04 59 51 51 22 1 4 3 8 KQ2U12-U02 KQ2U12-U03 53 52 55 61 12 20.9 Connection thread 20.9 22 57.4 45.4 22 1 2 KQ2U12-U04 62.5 54.5 52 Reference dimensions after Uni thread installation.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

L n Dimensions 9 288 477 8 263 452 L1 L2 10 313 502 7 238 427 11 338 527 6 213 402 12 363 552 5 188 377 13 388 577 4 163 352 14 413 602 3 138 327 15 438 627 2 113 302 16 463 652 2-5-29 Series VQ4000 Construction Plug-in Unit e q w e q w Metal seal type Rubber seal type (A) 4 (B) 2 42 (A)(B) VQ4101 VQ4100 1 (P) 5 (R1) (R2) 3 1 (P) 5 (R1) (R2) 3 e q w e q w (B) (A) 42 4 (B) 2 (A) VQ4200 VQ4201

Micro Mechanical Valve Series VM1000

) 1 (P) (74.1) 3 port (A) 2 52 22 13 32 12 10 1 (P) 3 (R) 16 2 x 1/4 2 x 5.5 mounting hole 40 30 25 * 0.5 MPa supply F .O.F .* 52 N T.T. 6.5 mm 17 2/3 Port Mechanical Valve Series VM200 Series VM200 Push button (Flush) VM220-02-33A VM230-02-33A Panel mounting hole 38 23 T.T. 1.5 3 1.5 16.5 R port (3 port only) Max. 6 Symbol 2 port 22.1 (A) 2 (90.6) 12 10 (74.1) 1 (P) 52 3 port 22 13 (A)

High Vacuum Angle Valve

40-2 65 171 66 39 11 55 41 67 29 XLC-50-2 70 181 79 31 11 75 52 76 29 9 XLC-63-2 88 206 100 39 11 87 95 70 77 33 9 XLC-80-2 90 244 117 46 11 114 110 83 104 39 9 *1 The E dimension applies when the heater option is included.

Electric Actuator

2 3 Signal Cable color U V W Red White Black Connector A2 terminal no.

Rotary Actuator/Vane Type

2 q o !0 !0 !2 !3 o r !3 w !4 r w !5 !4 !1 !1 y u i D-M9m !6 Component Parts No. Description Material No.

Table of Contents

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

CXWM/CXWL

mounting screw 2 2 2 2 2 Block mounting screw Chrome steel/Nickel plated 2 2 2 2 Chrome steel/Nickel plated Screw for mounting rail 2 2 2 2 2 Chrome steel/Nickel plated Switch mounting screw 2 2 2 2 2 Carbon steel/Nickel plated Hexagon nut 2 2 2 Hexagon socket head plug Chrome steel/Nickel plated Note 1) mark indicates strokes.

NCG/CG1

CG1BA Basic style mm Standard stroke range (mm) Long stroke range (mm) Bore size (mm) B1 A C D E F GA GB H H1 I J K KA MM NA P S TA TB TC ZZ WA WB WH W AL 69(77) M5 x 0.8 12 14 18 25 30 32 40 50 24 18 22 22 30 35 35 40 40 15.5 13 17 17 19 27 27 32 41 14 8 10 12 16 20 20 25 30 2 2 2 2 2 2 3 3 12 12 12 13 14 14 20 20 10(12) 35 5 6 6 8 11 11 13 16 26 M4 x 0.7 depth 7 5 6 8 10 14 18 18 22 26

C95

Mounting CS1 Number of auto switch mounted Auto switch model 32 to 63 80, 100 C76 15 20 1, 2 A5 15 + 55 (n 2)/2 20 + 55 (n 2)/2 C85 n A6 n = 2, 4, 6, 8 n = 2, 4, 6, 8 15 20 2 C95 20 + 55 (n 2)/2 25 + 55 (n 2)/2 A59W n n = 2, 4, 6, 8 n = 2, 4, 6, 8 CP95 15 25 1 F5(W)/J5J 15 25 1, 2 59W NCM 15 + 55 (n 2)/2 25 + 55 (n 2)/2 n F5BAL/F59F n = 2, 4, 6, 8 n = 2, 4, 6, 8 15 25 1, 2 NCA F5NTL