LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W G 1 N.C. (B contact) 2 pcs.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(g) n: Stations W = 30n + 50 W = 37n + 63 W = 61n + 101 W = 79n + 127 W = 100n + 151 Note 1) For more than 10 stations (more than 5 stations in case of 10-SS5Y7), supply pressure to P port on both sides and exhaust from EA/EB port on both sides.

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1 Drain q r e w t i u y o !0 !

MY1

(max. 38) W 58 58 70 88 104 128 152 h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 FC 14 14 13 17 17 26 31 EY 39.5 45.5 53.5 67 83 106 129 EC 5.8 5.8 6.5 8.5 10 14 14 EB 30 32 38 50 57 66 77 EA 7 10 12 14 17 20 26 E 14.6 20 24 29 35 40 52 Model MY1C16 MY1C20 MY1C25 MY1C32 MY1C40 MY1C50 MY1C63 Low load shock absorber + Adjusting bolt MY1C Bore size Stroke L TT h h h E F EA EB W F For MY1C16, 20 Stroke adjusting

MGP

Bearing type M Slide bearing L Ball bushing Bore Auto switch type Nil W/O auto switch (built-in magnet cylinder) 120 12mm 16 16mm 20 20mm 25 25mm 32 32mm 40 40mm 50 50mm 63 63mm 80 80mm 100 100mm Compact stroke (mm) Port PT N NPT Ports w/ bolt on tool plate Applicable auto switches Load voltage Lead wire length (m) Note 1) Auto switch model Electrical entry direction Special function Electrical

Electric Actuator/Slider Type

How to Order q w e r t y u i o !

MXQ

6 r u y w !

Fluoropolymer Piping Equipment

B L1 W M2 B side Inch Size 6 4 Model A side B side B C1 C2 E1 E2 H1 H2 L1 L2 M1 M2 Min. port size W Applicable tubing O.D.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Contents Series Bore size (mm) Kit no. 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 CBG1N20-PS-W CBG1N25-PS-W CBG1N32-PS-W CBG1N40-PS-W CBG1N50-PS-W CBG1N63-PS-W CBG1N80-PS-W CBG1N100-PS-W Order seal kit in accordance with the bore size. Order seal kit in accordance with the bore size.

VQ4000

or less 7.0 1.9 52 or less 6.4 0.42 1.9 VQ4000 Rc 3/8 0 5 VQ44 0 Metal seal 0.18 45 or less 47 or less 6.2 1.5 47 or less 6.9 0.17 1.7 Exhaust center 0.28 (0.34) 0 5 VQ44 1 Rubber seal 0.38 50 or less 52 or less 7.0 1.9 52 or less 7.3 0.38 2.0 0 5 VQ45 0 Metal seal 0.18 45 or less 47 or less 6.2 1.6 47 or less 6.4 0.18 1.6 Pressure center 0.28 (0.34) 0 5 VQ45 1 Rubber seal 0.38 50 or less

Micro Mechanical Valve Series VM1000

) 1 (P) (74.1) 3 port (A) 2 52 22 13 32 12 10 1 (P) 3 (R) 16 2 x 1/4 2 x 5.5 mounting hole 40 30 25 * 0.5 MPa supply F .O.F .* 52 N T.T. 6.5 mm 17 2/3 Port Mechanical Valve Series VM200 Series VM200 Push button (Flush) VM220-02-33A VM230-02-33A Panel mounting hole 38 23 T.T. 1.5 3 1.5 16.5 R port (3 port only) Max. 6 Symbol 2 port 22.1 (A) 2 (90.6) 12 10 (74.1) 1 (P) 52 3 port 22 13 (A)

Rotary Actuator/Vane Type

hole to through-hole W, S, J, K, T, Y XC3 Change the screw position W, S, J, K, T, Y XC4 Change the rotation range W, S, J, K, T, Y XC5 Change rotation range between 0 to 200 W, S, J, K, T, Y XC6 Change rotation range between 0 to 110 W, S, J, K, T, Y XC7 Reversed shaft W, J XC30 Fluorine grease W, S, J, K, T, Y X5 For M5 port (90/180) W, S, J, K, T, Y Rotation time adjustment range s/90

High Vacuum Angle Valve

e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

CXWM/CXWL

For details, refer to page 8-30-52. It is impossible to mount solid state switches to the housing mounting 10. 8-26-50

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u w t e r !

Air Cylinder CP Series Cylinder Positioner Assembly

Srole = 0.79 120mm) waool E CPA1 FN w/o Boot with gool' BORE a EB c o E K M tit N P FD FT FX FZ H zz d 1 n e zz 1 3 8 (35) 3 1 9 (811 2.76 (70) 2.05 (52) 0.79 (20) 1 5 7 (40) 117) MBxl 25 0.24 (7) 0 4 3 { r 1 ) Mr8x1.5 1 1 8 {30J 3.54 (90) 2.76 t70l 035 (9.0) l.12) (90) (50) 4.33 (110) 228 l5a) 6.26 o59) 2.24 (s) 2.05 (52) 0.59 (1s) 2.60 (66) s T o 167 '1.22 {40) o 6 7 tlr) M10x1.25 0.24

Title not found

Srole = 0.79 120mm) waool E CPA1 FN w/o Boot with gool' BORE a EB c o E K M tit N P FD FT FX FZ H zz d 1 n e zz 1 3 8 (35) 3 1 9 (811 2.76 (70) 2.05 (52) 0.79 (20) 1 5 7 (40) 117) MBxl 25 0.24 (7) 0 4 3 { r 1 ) Mr8x1.5 1 1 8 {30J 3.54 (90) 2.76 t70l 035 (9.0) l.12) (90) (50) 4.33 (110) 228 l5a) 6.26 o59) 2.24 (s) 2.05 (52) 0.59 (1s) 2.60 (66) s T o 167 '1.22 {40) o 6 7 tlr) M10x1.25 0.24

LX

E-M5 thread depth 10 6 LJ1 LG1 LC1 LX LC6D/LC6C Switches 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch

MG

4 @1 w @4 !0 y !3 !5 @3 !0 !

C95

Basic circuit CJ1 W 1.