Device, Type: Smart rotary type, Specification: With Intrinsically safe explosion-proof (ATEX) + Output function + HART communication function, Pressure(MPa): 1.0, Fork lever type fitting: N/A, Lever unit: N/A, External scale plate: N/A, Body cover with window for LCD: N/A, Air connection port: Rc1/4, Conduit connection port: M20 × 1.5, Explosion-proof structure: ATEX Directive Category-1

Type: 101 (Smart Rotary Type), Pressure Gauge: 3 (1.0 MPa), Accessories: None (Standard), External Scale Plate: None, LCD Window: W (Body w/LCD Window)

Type: 001 (Smart Lever Type), Pressure Gauge: 2 (0.3 MPa), Specifications: 0 (Basic), Accessories: F (For Stroke 50 to 140mm w/Lever Unit), External Scale Plate: None, LCD Window: W (Body w/LCD Window), Connection, Air - Electric: 3 (NPT1/4 - NPT1/2), CE Compliant: Q (CE Marked Product)

Type: 001 (Smart Lever Type), Pressure Gauge: 3 (1.0 MPa), Specifications: 2 [With output (Alarm output x 2 + analog output (4 to 20 mA DC))], Accessories: F (For Stroke 50 to 140mm w/Lever Unit), External Scale Plate: None, LCD Window: W (Body w/LCD Window), Connection, Air - Electric: 4 (G1/4 - G1/2), CE Compliant: Q (CE Marked Product)

Type: Smart Lever Type, Pressure Gauge: 0.3 MPa, Specifications: Basic, Accessories: For Stroke 50 to 140mm w/Lever Unit, External Scale Plate: None, LCD Window: Body w/LCD Window, Connection, Air - Electric: NPT1/4 - NPT1/2, CE Compliant: CE Marked Product

Type: Smart Lever Type, Pressure Gauge: 1.0 MPa, Specifications: 2 [With output (Alarm output x 2 + analog output (4 to 20 mA DC))], Accessories: For Stroke 50 to 140mm w/Lever Unit, External Scale Plate: None, LCD Window: Body w/LCD Window, Connection, Air - Electric: G1/4 - G1/2, CE Compliant: CE Marked Product

Type: Relay Device, Type: Smart lever type, Specification: Basic type, Pressure(MPa): 1.0, Fork lever type fitting: N/A, Lever unit: With Stroke 50 to 140 mm / lever unit, External scale plate: N/A, Body cover with window for LCD: Available, Air connection port: G1/4, Conduit connection port: M20 × 1.5, Explosion-proof structure: Standard product, Ambient temperature(°C): -20 to 80,

Output restriction w/pilot valve, fork lever joint, compensation spring, w/external scale plate, POSITIONER, ATEX COMPLIANT, INSTRUMENTATION, IP8000/8100 POSITIONER, DB, IP8000/8100 1/4 NPT, 5.73201 lb

Electric Actuator / Slider Type 《 AC Servo Motor 》

Table4-1.

LEKF-OMZ0035

Part name Qty (1) Electric Actuator / LEF Series 1 (2) Driver / LECS Series 1 (in case with driver) (3) Motor cable 1 (in case with cable) (4) Encoder cable (5) Lock cable (6) I/O Connector 1 (in case with I/O connector) (2) Driver *2 1 (3) Motor cable (4) Encoder cable (5) Lock cable 24VDC Host controller, (1) Electric Actuator etc (6) I/O connector 2 *1 This picture is LECSA *2 The shape

Electric Slide Table / High Precision Type 《 AC servo motor 》

Product weight [kg] Model Stroke Additional weight Size Motor type 50 100 150 with lock 16 S2 1.96 2.35 0.20 25 S3 3.86 4.43 5.83 0.40 -5- LESYH*(D,R,L)*T6/T7 Motor type T6/T7 Model LESYH16*T6 LESYH25R/LT7 LESYH25DT7 Parallel In-line Stroke[mm] 50,100 50,100,150 50,100,150 Horizontal 8 12 12 Max. work load [kg] Vertical 6 12 10 20 10 20 Force [N](Set value: 12 to 24%) *1 65 to 131 127 to

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Environment Clean Room Specification ISO Class 4*1 (ISO14644-1) Built-in vacuum piping Possible to mount the main body without removing the external cover etc. Body-integrated linear guide specification *1 Changes depending on the suction flow rate.

High Power Cylinder:

A 1-B 1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B CE2 6 1/8, 1/4 1.5 500 0 1,000 2,000 3,000 ML2B Max. speed Vmax (mm/s) 6 1/4, 3/8 3 1000 Graph 3:25 ML1C 10 1/4, 3/8 20 (1/4) 4.5 1500 20 10 1/4, 3/8 REA Composed effective area So (mm2) Composed effective

2.0

Length 3 3 x 1 6 600 mm 10 1000 mm 3A 1/8" x 1/16" 4 4 x 2 4A 5/32" x 1/32" 6 6 x 4 6A 1/4" x 1/8" 100 mm Specifications Model LPV21 LPV22 Valve type N.C. N.O.

Type: 101 (Smart Rotary Type), Pressure Gauge: 3 (1.0 MPa), Accessories: D (Fork Lever-type Fitting S), External Scale Plate: H (w/External Scale Plate), LCD Window: None, Connection, Air - Electric: M (Rc1/4 - M20x1.5)

Type: 101 (Smart Rotary Type), Pressure Gauge: 3 (1.0 MPa), Accessories: D (Fork Lever-type Fitting S), External Scale Plate: None, LCD Window: None, Connection, Air - Electric: 2 (NPT1/4 - M20x1.5)

Type: 101 (Smart Rotary Type), Pressure Gauge: 3 (1.0 MPa), Accessories: None (Standard), External Scale Plate: None, LCD Window: W (Body w/LCD Window), Connection, Air - Electric: 3 (NPT1/4 - NPT1/2)

Type: 101 (Smart Rotary Type), Pressure Gauge: 3 (1.0 MPa), Accessories: D (Fork Lever-type Fitting S), External Scale Plate: H (w/External Scale Plate), LCD Window: W (Body w/LCD Window), Connection, Air - Electric: 3 (NPT1/4 - NPT1/2)

Type: 101 (Smart Rotary Type), Pressure Gauge: 3 (1.0 MPa), Accessories: None (Standard), External Scale Plate: H (w/External Scale Plate), LCD Window: W (Body w/LCD Window), Connection, Air - Electric: 3 (NPT1/4 - NPT1/2)

Type: 101 (Smart Rotary Type), Pressure Gauge: 3 (1.0 MPa), Accessories: None (Standard), External Scale Plate: H (w/External Scale Plate), LCD Window: None, Connection, Air - Electric: M (Rc1/4 - M20x1.5)