CNG

8 51.5 20 12 18 2 97 10 25 6.5 9 7 10 6 38 20 to 300 Up to 300 30 27 19 52 52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 20 to 300 301 to 500 Up to 300 301 to 500 Without rod boot With rod boot Bore size (mm) 20 25 32 40 P K KA MM NA PG PH PL S FD FT FX FY FZ XA XB J l ZZ H e f h ZZ 35 182 30 16 55 202 5 6 M8 x 1.25 24 1/8 21.5 2 65 141 5.5 6 52 25 65 3 12 M4 x 0.7 0.25 x Stroke

Table of Contents

How to Order Symbol 2 1 01 06 2 AS 1 F E S K JIS Symbol Hexagonal lock nut Body size 2 3 4 1/8, 1/4 standard 3/8 standard 1/2 standard With seal Applicable tubing O.D.

JA/JAH/JB/JS

52 52 56 56 70 80 80 88 116 19 25 25 30 30 30 38 38 47 58 58 69 89 1000 2000 2000 4400 4400 4400 9000 9000 14000 22000 22000 22000 55000 12 16 16 19 19 19 22 22 25 32 32 70 90 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 18 24 24 30 30 30 34 34 42 48 48 54 74 0.5 0.5 0.5 0.75 0.75 0.75 1 1 1.25 2 2 2 3 8 10 10 12 12 12 16 16 20 24 27 27 33 44 52 52 67 67 67 82.5 82.5 98.5 123 123 155 213 21

JA/JAH/JB/JS

52 52 45 45 55 65 65 72 100 48 52 52 70 70 70 19 25 25 32 32 32 65 65 75 90 90 100 150 0.08 0.12 0.12 0.28 0.28 0.28 0.63 0.63 1.15 2.07 2.07 2.8 9 1100 2500 2500 4400 4400 4400 11000 11000 18000 28000 28000 28000 55000 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 0.5 0.5 0.5 0.75 0.75 0.75 1 1 1.25 2 2 2 3 8 10 10 12 12 12 16 16 20 24 27 27 33 32.5 36 36 49 49 49 61.5 61.5 76.5 94 94 106 152

CNG

Load in the direction of rod extension Load in the direction of rod retraction m 0.3 MPa Graph (5) F 0.4 MPa Graph (6) m 0.5 MPa Graph (7) F 9-5-6 7 Model Selection Series CNG Selection Graph Graph (5) Graph (2) 0.3 MPa P < 0.4 MPa 0.3 MPa P < 0.4 MPa 200 200 100 100 40 30 40 50 30 40 50 32 Load weight: m (kg) 40 25 Load weight: m (kg) CL 20 20 20 32 CL1 10 10 25 20 MLGC 5 4 3 5 4 3

Cylinder with Lock Series CNG

2 97 10 25 6.5 9 7 10 6 38 to 300 20 to 300 27 30 19 52 52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 to 300 301 to 500 20 to 300 301 to 500 (mm) Without rod boot With rod boot Bore size (mm) 20 25 32 40 P K KA MM NA PG PH PL S FD FT FX FY FZ XA XB J l 0.25 ZZ 182 H e f h ZZ 202 35 30 16 55 5 6 M8 x 1.25 24 1/8 21.5 2 65 141 5.5 6 52 25 65 3 12 M4 x 0.7 Stroke x 220 198 40 30

Proposals for Energy Saving

OUT(2) Rc G NPT NPTF Nil F N T 1 IN(1) Port size Fluid Port size 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) Symbol 02 03 04 06 Class 3 Class 2 Class 4 Nil A General air Dry air Voltage 1 2 3 4 5 6 100VAC 200VAC 110VAC 220VAC 24VDC 12VDC Orifice size Orifice size (mm ) Symbol 3 4 5 7 10 Class 4 Class 3 Class 2 3 4 5 7 10 Consult SMC regarding other voltages.

Rotary Actuator/Vane Type

D2 = CB = C X = [mm] Size CRB2, CRBU2 Y L2 max D2 10 2 to 8 Y-1 3 [mm] Size CRB2 CRBU2 X L1 max D1 X L1 max D1 10 4 to 14 X-3 3 2 to 14 X-1 3 15 5 to 18 X-4 3 to 4 3 to 18 X-1.5 3 to 4 20 6 to 20 X-4.5 3 to 5 3 to 20 X-1.5 3 to 5 30 6 to 22 X-5 3 to 6 3 to 22 X-2 3 to 6 15 3 to 9 Y-1.5 3 to 4 20 3 to 10 Y-1.5 3 to 5 30 3 to 13 Y-2 3 to 6 40 6 to 15 Y-4.5 3 to 8 86 Simple Specials CRB2 Series

Table of Contents

m/s 2 in X, Y, Z directions, 3 times each (De-energized) 3% F .S. or less 1000 VAC for 1 min.

ZP

Model A B C D E Y Y B C D A E Flat Model ZPY10D--A10 10 12 15 25 41 6 Flat with ribs U C ZPY16D--A10 ZPY10 -A10 16 18 16 26 42 7 15 12 22 1.7 10 12 1.8 3 38 ZPY13 -A10 U C 13 Dimensions by Stroke ZPY16 -A10 U C 38.5 16 18 12.5 22.5 1.2 3.5 10 16 H Model Dimensions by Stroke F G F G 10, 13 16 ZPYD10--A10 52 23 86 53 87 H Model F G F G ZPYD20--A10 62 124 63 125 51 U C U C U C U C U C ZPYD30

VQ4000

VQ 4 1 0 0 0 5 Lead wire kit with cable (3 m) Enclosure Series VV5Q41-05C8LD2 1 set VQ4100-52 sets VQ4200-52 sets VQ4300-5 1 set Manifold base part no. Valve part no. (Stations 1 and 2) Valve part no. (Stations 3 and 4) Valve part no.

KJ

O.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 21 25 22 27 38 30 32 39 31 32 37 38 44 66 38 43 65 53 53 68 51 52 67 10 17 19 17 19 20 18 21 20 18 21 20 22 21 25 22 21 25 23 22 25 23 22 25 KFL04-01 KFL04-02 KFL06-01 KFL06-02 KFL06-03 KFL08U-01 KFL08U-02 KFL08U-03 KFL08N-01 KFL08N-02 KFL08N-03 KFL10U-02 KFL10U-03 KFL10U-04 KFL10N-02 KFL10N-03

CATALOG VC10

Series 70 8 Series 80 1 2WNO 2 2WNC 3 3WNC 4 3WNO 5 3WDC 6 3WMP 18 Direct Lift 2WNO 27 Direct Lift 2WNC 28 Pilot Lift 2WNC G 1/32 H 3/64 J 1/16 K 3/32 L 7/64 N 1/8 O 5/32 P 3/16 U 7/32 R 1/4 A 9/32 S 5/16 T 3/8 V 5/64 B 1/2 C 5/8 D 1 E 1 1/2 Y 3/4 F 2 W 3 SS BR AL 1/8 NPT 7 4 2 1/8 NPT 8 5 2 1/4 NPT 9 6 3 3/8 NPT 1 10 1/2 NPT 33 12 11 1 NPT 23 13 1 1/2 NPT 24 14 3/4 NPT 29 19 2 NPT 26 16

Air Cylinder

135 95 160 120 185 25 Up to 200 38.5 3.5 4 6 22 3 36 49 10 15 7 52 70 140.5 95 165.5 120 190.5 145 215.5 32 Up to 200 45 3.5 4 7 25 3 44 58 10 16 8 53 70 142.5 95 167.5 120 192.5 145 217.5 40 Up to 200 54.5 4 4 7 30 3 54 71 10 16.5 8.5 63.5 76 160 101 185 126 210 151 235 CM3 CG1 CG1 CG3 JMB Rod flange: CG1FN MB 4 x FD FT F MB1 CA2 FX0.15 B E 0 0.05 CS1 CS2 B FX0.15 H 4 x FD Head flange:

42

(Values at the initial period) Note 3) Available only with T, L, S and C. 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 3-position double check (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 450 Base Mounted Plug-in/Plug Lead: Single Unit VQ4000 Series How to Order Valves (Single Unit) [Option] Port size Body Nil Without sub-plate (For manifold) 0: Plug-in sub-plate 02 1/4 03 3/8 Thread type SV Nil Rc F G N NPT

Electric Actuator/Slider Type

3 !

CRBU

Model A B C D E(g6) F(h9) G H K L M N R S1 S2 T U V W X Y Z 12 0 -0.043 14 0 -0.043 16 0 -0.043 24 1 30 1 5-0.004 -0.012 6-0.004 -0.012 8-0.005 -0.014 34 25 21 3 29 36 48 29 18 1.5 15.5 10 0.5 10.5 10.5 M5 X 0.8 3.5 M3 X 0.5 18.5 CDRBUW15-lD 42 34.5 17 11 26 4 36 44 59 25 30 20 1.5 10 0.5 11.5 M5 X 0.8 4.5 M4 X 0.7 CDRBUW20-lD 34.5 3 25.5 3 17.5 12 50 47.5 13 29 4.5 42 52 69 25 31 22 2 12

High Vacuum Angle Valve

XLD-50 XLD-63 XLD-80 XLD-100 XLD-160 50 123 48 1 12 40 26 16 7.5 41 65 170 66 2 11 55 41 20 15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

C95

G C D T Nil S 3 n 2 pcs. 1 pc. 3 pcs. n pcs.

MNB

thread length (mm) Width across flats FB Fd FD FE FT FX B B1 A H1 B2 BN BP C D F FY FZ GA GB 20Up to 700 32 6 87 7 1/8 46 54 19.5 3 25 97 10 32.5 56 13 72 22 17 12 13 38 83 10 Data Up to 800 40 8 101 1/8 9 63 52 27 3 31 104 10 38 65 14 83 30 22 16 13 46 91 14 Up to 1000 50 11 9 120 1/4 75 65 32 2 38.5 120.5 12 46.5 77 15.5 100 35 27 20 14 52 104.5 18 Up to 1000 63 11 9 135 75 1/4 90 32 2