1.1

Facility water required flow rate (l/min) Circulating fluid flow (l/min) 30 HRG010-A, HRG010-W HRG005-W 0.5 50 Outlet port [60 Hz] 0.4 40 Outlet port [50 Hz] 0.3 20 30 0.2 20 HRG002-W Return port HRG001-W 0.1 10 10 0 0.0 0 20 40 80 60 10 30 50 70 Pressure [MPa] Lifting height [m] Circulating fluid flow (l/min) HRG015-A, HRG015-W 0 0.5 50 0 10 20 30 40 Outlet port [60 Hz] 0.4 40 Facility water

Vacuum

(mm) 2, 4,6, 8, 10. 13, 16, 2 0 , 2 5 , 3 2 , 4 0 , 5 0 10, 13, 16,20 25,32, 40, 50 10,16,25,406,8, 10,13, 16,20 25,32, 40, 50 :otqq, NBR (black). Silicone (while). Urethane (brownl, Fluorine (black with markl NBR (50"), Sil'cone (40"), Urethane (60"), Fluoine (60") , : l . . : ] ] : l l How to Order Pad dia.

Vacuum

(mm) 2, 4,6, 8, 10. 13, 16, 2 0 , 2 5 , 3 2 , 4 0 , 5 0 10, 13, 16,20 25,32, 40, 50 10,16,25,406,8, 10,13, 16,20 25,32, 40, 50 :otqq, NBR (black). Silicone (while). Urethane (brownl, Fluorine (black with markl NBR (50"), Sil'cone (40"), Urethane (60"), Fluoine (60") , : l . . : ] ] : l l How to Order Pad dia.

High Purity Fluoropolymer

Replacement part type L shows the parts for LQ-GL and LQ-GM. 33 High Purity Fluoropolymer Fittings & Tubing Series LQ1 2 Dimensions LQ-GJ LQ-GK LQ-GJ 36 30 45 (adjustable) 117 76 24 LQ-GK 36 SET POS. 53 127 43 63 (Max. 50) 114 53 43 63 LQ-GM LQ-GL 50 50 207 85 342 85 LQ-GL 40 28 SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 4-R3 4-R3 (Max. 91) 325 (Max. 91) 191 87 60 87 60 112 112 34 Series

0.4

Bore size Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQC1101 800 700 600 500 400 300 200 100 0 VQC2101 It

0.55

16 64 24 3/8, 1/2 3(R) port 1/8 12(PA) port 18 67 2 x 6.2 (For mounting) NO 2A NC 53 66 12 12 3R NC 1P (1/8) 12(PA) port 11.5 16 115.1 107.1 24 96.5 95.5 32.5 M5 x 0.8 (Breathing hole) 16 X 40 3/8, 1/2 1(P) port 80 03 04 A B For vacuum/VPA744V-1l 3/8, 1/2 2(A) port 40 16 64 3/8, 1/2 3(R) port 24 18 67 2 x 6.2 (For mounting) NO 2A NC 53 66 12 3R NC 1P 1/8 12(PA) port 11.5 16 115.1 24 96.5

PF-OMM0004_C

PVC PVC PVC PVC PVC , -10No.PF-OMM0004-D -11No.PF-OMM0004-D N M8 M8 R / ZS-40-K PF3W704/720 4 3X8 ZS-40-L PF3W740 4 3X8 ZS-40-M PF3W711 4 4X10 M8 ZS-40-A 3 m 2 250 L/min PVC 25 A ZS-40-U25 25 A PVC 1 PVC 30 A ZS-40-U30 30 A PVC 1 25 A ZS-40-U25-A 1 M5x80 2 30 A ZS-40-U30-A 1 M5x65 2 PVC 1~2% -12No.PF-OMM0004-D 1 DC+ 2 OUT2 3 DC4 OUT1 M8 IN OUT OUT1OUT2 ON UP ON/OFF SET

Digital Flow Switch (Remote type sensor unit)

Option Part number Remarks ZS-40-K Taptite screw for PF3W504/520 (3 x 8), 4 pcs. Bracket ZS-40-L Taptite screw for PF3W540 (3 x 8), 4 pcs. ZS-40-M Taptite screw for PF3W511 (4 x 10), 4 pcs. Lead wire with M8 connector ZS-40-A Lead wire length: 3 m : 2 brackets are necessary if using the type with flow rate adjustment valve. Bracket cannot be mounted onto the 250 L/min type.

JXCx-OMT0023

Ambient temperature is over 40 . Lower the ambient temperature of servo motor. the servo motor is over 40 . Ambient temperature is 40 Check 2). or less. 2) Servo motor is Check the effective load ratio. The effective load ratio is too high. Reduce the load or take heat dissipation measures. overheated.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VV5FA3-40-052-021 pc. VFA31402 pcs. VFA32402 pcs. DXT031-38-1A1 pcs.

Compact 5-Port Solenoid Valve

Can drive 40*1 bore cylinders Can drive 50*1 bore cylinders Can drive 80*1 bore cylinders JSY1000 JSY3000 JSY5000 6.4 mm 10 mm 15 mm A, B port size: 2, 4, 6 A, B port size: 6, 8 A, B port size: 10, 12 6 One-touch fitting 12 One-touch fitting 8 One-touch fitting 540 550 520 63 25 40 Bore size [mm] Bore size [mm] Bore size [mm] 360 310 430 80 40 50 100 140 110 160 63 100 100 300 500 100 300

155

V or less at 10 mA (2 V or less at 40 mA) 4 V or less 100 A or less at 24 VDC Leakage current 0.8 mA or less Indicator light Red LED illuminates when turned ON.

3 Port Air Operated Valve Series SYJA300 1

Change of fluid passage Flow Characteristics Flow characteristics 1 2 (P A) C [dm 3/(sbar)] 27 38 Port size 2 3 (A R) C [dm 3/(sbar)] 27 40 2 1 (A P) C [dm 3/(sbar)] 25 40 3 2 (R A) C [dm 3/(sbar)] 26 38 b 0.38 0.30 b 0.37 0.32 b 0.36 0.22 b 0.37 0.20 Cv 7.0 9.8 Cv 7.4 9.8 Cv 7.3 9.8 Cv 6.8 9.6 1/2 3/4 N.C. N.O.

VQ5000

1 5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted Series VQ5000 VQC Space-saving profile SQ Clean space saving design with all pilot valves concentrated to one side with no protrusions in any direction VQ0 VQ4 VQ5 Space-saving 40% less Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-

VP4

or less 30 or less 30 or less 30 or less 30 or less 50 or less 65 or less 30 or less 30 or less 30 or less 30 or less 40 or less 55 or less 40 or less 45 or less 40 or less 40 or less 40 or less ON OFF ON OFF AC Response time (ms) (at the pressure of 0.5 MPa) DC 55 or less 40 or less 45 or less 30 or less 30 or less Note) Based on dynamic performance test, JIS B 8375-1981.

Bore Size: 12mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 20mm, Adjuster: A (Both Sides Adjusters/Rubber Stoppers)

Bore Size: 12mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 100mm, Adjuster: A (Both Sides Adjusters/Rubber Stoppers)

Bore Size: 12mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 100mm, Adjuster: A (Both Sides Adjusters/Rubber Stoppers), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: S (1 pc.)

Bore: 12mm, Body: Standard, Stroke: 75mm, Adjuster Function: ZQ (Shorter Overall Length, Shock Absorber, Retraction)

Bore: 12mm, Body: Standard, Stroke: 75mm, Adjuster Function: Z (w/o Adjuster)